US3494853A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum deposition apparatus including a programmed mask means having a closed feedback control system
Assignee: University of Minnesota Twin Cities
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Filing: 1967-06-30
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Granted: 1970-02-10
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Expires: 1987-06-30
Abstract
No abstract record available.
Inventors
- 👤 Donald E Anderson
- 👤 William T Peria
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:17
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US3015806A
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US3148085A
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US3207126A
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US3230109A
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US3228663A
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US3344054A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-02-09 | 1973-08-11 | 1974-02-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-02-09 | 1977-08-11 | 1978-02-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-02-09 | 1981-08-11 | 1982-02-10 | $7700.00 | Window Closed / Lapsed |