EP0209972A1
Expired / Lapsed
EP
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Methods of depositing germanium hydrogen carbide
Assignee: Plessey Overseas Ltd
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Filing: 1986-05-28
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Granted: —
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Expires: 2006-05-28
Abstract
Abstract A prior art method of depositing Germanium Hydrogen Carbide involves the use of glow discharge techniques which involve high substrate temperatures and explosive gases. Methods according to the present invention comprise exposing a target (7) of Germanium to a plasma (9) comprising an inert gas and a hydrocarbon gas. The plasma (9) is maintained by means of a radio frequency magnetron electrode (6) which is associated with the target (7). Atoms and ions of Germanium, Hydrogen and Carbon are sputtered onto the substrate (21 in order to deposit the Germanium Hydrogen Carbide.
Inventors
- 👤 David John Pedder
- 👤 Paul Vincent Dennis
- 👤 Alan Lettington
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:27
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; C23C14/06; C23C14/0635; C23C16/00; C23C16/22; C23C16/30; C23C16/32
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
73 words
A method of depositing Germanium Hydrogen Carbide on a substrate (2), the method comprising exposing a target (7) of Germanium to a plasma (9) comprising an inert gas and a hydrocarbon gas, maintaining the plasma by means of a radio frequency magnetron electrode (6) which is associated with the target (7), and sputtering atoms and ions of Germanium, Hydrogen and Carbon onto the substrate (2) in order to deposit the Germanium Hydrogen Carbide.
Claim 2
Independent Claim
73 words
A method of depositing Germanium Hydrogen Carbide on a substrate (2), the method comprising exposing a target (7) of Germanium to a plasma (9) comprising an inert gas and a hydrocarbon gas, maintaining the plasma by means of a radio frequency magnetron electrode (6) which is associated with the target (7), and sputtering atoms and ions of Germanium, Hydrogen and Carbon onto the substrate (2) in order to deposit the Germanium Hydrogen Carbide.
Claim 3
Dependent Claim
20 words
A method according to claim 1, wherein the inert gas is Argon and the hydrocarbon gas is methane or butane.
Claim 4
Dependent Claim
28 words
A composition of Germanium Hydrogen Carbide produced by a method according to claim 1 or claim 2, wherein the composition comprises 79% Germanium, 14% Carbon and 7% Hydrogen.
Claim 5
Dependent Claim
28 words
A composition of Germanium Hydrogen Carbide produced by a method according to claim 1 or claim 2 wherein the composition comprises 54% Germanium, 24% Carbon and 22% Hydrogen.
Claim 6
Dependent Claim
28 words
A composition of Germanium Hydrogen Carbide produced by a method according to claim 1 or claim 2 wherein the composition comprises 65% Germanium, 32% Carbon and 2.6% Hydrogen.
References Cited (Backward Citations)
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