Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
201 words
A method of producing an optical information recording medium, comprising the steps of: introducing a plasma-generating gas comprising hydrocarbon into a plasma-generating region provided with a metal target on a first electrode and a substrate on a second electrode; maintaining the pressure of the plasma-generating gas within a predetermined range within the plasma-generating region; applying electric power to the said first electrode so as to dissociate the plasma-generating gas, thereby forming a plasma; and sputtering the metal target with the plasma so as to allow the sputtered metal to be deposited on the substrate in the form of a film, said film containing the carbon liberated from the hydrocarbon; characterized in that the product between the density of the power applied to said first electrode and the average residence time of the plasma-generating gas within the plasma-generating region is controlled such that said product falls within the range of more than 0.5 W-sec/cm 2 0.005 and less than 50 w-sec/cm 2 , wherein the partial pressure ratio of a secondary hydrocarbon, which is different from the introduced hydrocarbon, present during the dissociation to the secondary hydrocarbon before the dissociation and after said introduction is set to range between 2 and 12.
Claim 2
Independent Claim
201 words
A method of producing an optical information recording medium, comprising the steps of: introducing a plasma-generating gas comprising hydrocarbon into a plasma-generating region provided with a metal target on a first electrode and a substrate on a second electrode; maintaining the pressure of the plasma-generating gas within a predetermined range within the plasma-generating region; applying electric power to the said first electrode so as to dissociate the plasma-generating gas, thereby forming a plasma; and sputtering the metal target with the plasma so as to allow the sputtered metal to be deposited on the substrate in the form of a film, said film containing the carbon liberated from the hydrocarbon; characterized in that the product between the density of the power applied to said first electrode and the average residence time of the plasma-generating gas within the plasma-generating region is controlled such that said product falls within the range of more than 0.5 W-sec/cm 2 0.005 and less than 50 w-sec/cm 2 , wherein the partial pressure ratio of a secondary hydrocarbon, which is different from the introduced hydrocarbon, present during the dissociation to the secondary hydrocarbon before the dissociation and after said introduction is set to range between 2 and 12.
Claim 3
Dependent Claim
29 words
The method according to claim 1, characterized in that the metal target is formed of at least one metal selected from the group consisting of tellurium, antimony and silver.
Claim 4
Dependent Claim
18 words
The method according to claim 1, characterized in that the hydrocarbon contained in the plasma-generating gas is methane.
Claim 5
Dependent Claim
17 words
The method according to claim 1, characterized in that the plasma-generating gas further contains a rare gas.
Claim 6
Dependent Claim
15 words
The method according to claim 1, characterized in that the plasma-generating gas further contains ammonia.
Claim 7
Dependent Claim
26 words
The method according to claim 1, characterized in that the plasma-generating gas is introduced into the plamsa-generating region at the rate of 1 to 200 cc/min.
Claim 8
Dependent Claim
20 words
The method according to claim 1, characterized in that the power density ranges between 0.01 and 5 W/cm 2 .
Claim 9
Dependent Claim
20 words
The method according to claim 1, characterized in that the average residence time ranges between 0.1 second and 100 seconds.
Claim 10
Dependent Claim
30 words
The method according to claim 1, characterized in that the pressure of the plasma-generating gas within the plasma-generating region is on the order of 10-3 Torr and 10 -2 Torr.