Patent US8477283B2 successfully refreshed from Google Patents.
US8477283B2
Active / In Force
US
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Exposure apparatus and device manufacturing method
Assignee: Nikon Corp
•
Filing: 2007-05-10
•
Granted: 2013-07-02
•
Expires: 2027-05-10
Abstract
Abstract An exposure apparatus comprises a first member, which is arranged so as to oppose a surface of a substrate, and between which and the surface of the substrate a liquid immersion space is formed; and a second member, which traps liquid that is present at the surface of the substrate. A distance between the second member and the substrate is smaller than a distance between the first member and the substrate.
Inventors
- 👤 Yasufumi Nishii
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:10
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70341; G03F7/26; G03F7/30; G03F7/3092; G03F7/70358; G03F7/708; G03F7/70908; G03F7/70916
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
176 words
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising: a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed; a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate; and a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein the first member has a first liquid recovery port arranged so as to oppose the surface of the substrate, the second member is positioned at an outer side of the first liquid recovery port with respect to an optical path space of the exposure light, and the second member is configured to trap the liquid that is present on the substrate without there being complete recovery by the first liquid recovery port.
Claim 2
Dependent Claim
176 words
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising: a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed; a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate; and a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein the first member has a first liquid recovery port arranged so as to oppose the surface of the substrate, the second member is positioned at an outer side of the first liquid recovery port with respect to an optical path space of the exposure light, and the second member is configured to trap the liquid that is present on the substrate without there being complete recovery by the first liquid recovery port.
Claim 3
Dependent Claim
37 words
An exposure apparatus according to claim 1 , further comprising: a second liquid recovery port, which is arranged in the vicinity of the second member and recovers the liquid that has been trapped by the second member.
Claim 4
Dependent Claim
28 words
An exposure apparatus according to claim 2 , wherein the second member is arranged so as to guide a flow of fluid toward the second liquid recovery port.
Claim 5
Dependent Claim
32 words
An exposure apparatus according to claim 3 , wherein the second member is arranged so as to increase a flow rate of the fluid that flows toward the second liquid recovery port.
Claim 6
Dependent Claim
102 words
An exposure apparatus according to claim 1 , wherein the first member has a flat part, which is provided so as to oppose the surface of the substrate and so as to surround the optical path space of the exposure light and between which and the surface of the substrate the liquid is held, the first liquid recovery port is arranged at the outer side of the flat part with respect to the optical path space of the exposure light, and the distance between the second member and the substrate is smaller than a distance between the flat part and the substrate.
Claim 7
Dependent Claim
57 words
An exposure apparatus according to claim 1 , wherein scanning exposure of the substrate is performed while moving the substrate in a prescribed direction, and the first liquid recovery port is arranged at the outer side of an extension area that extends in the prescribed direction with respect to the optical path space of the exposure light.
Claim 8
Dependent Claim
29 words
An exposure apparatus according to claim 6 , wherein the first liquid recovery port is arranged at both sides of the extension area in relation to the prescribed direction.
Claim 9
Dependent Claim
26 words
An exposure apparatus according to claim 1 , wherein the second member is arranged so as to surround an optical path space of the exposure light.
Claim 10
Dependent Claim
16 words
An exposure apparatus according to claim 1 , wherein the second member includes a flexible member.
Claim 11
Dependent Claim
18 words
An exposure apparatus according to claim 1 , wherein the second member includes a plurality of plate-shaped members.
Claim 12
Dependent Claim
33 words
An exposure apparatus according to claim 10 , wherein at least a portion of the plurality of plate-shaped members is arranged radially with respect to an optical path space of the exposure light.
Claim 13
Dependent Claim
53 words
An exposure apparatus according to claim 1 , further comprising: an optical member, which is arranged so as to oppose the substrate and emits the exposure light, and wherein the second member includes a plurality of members arranged along a direction that intersects a plane including an optical axis of the optical member.
Claim 14
Dependent Claim
26 words
An exposure apparatus according to claim 1 , wherein the support apparatus that movably supports the second member with respect to the surface of the substrate.
Claim 15
Dependent Claim
16 words
An exposure apparatus according to claim 13 , wherein the support apparatus includes an elastic body.
Claim 16
Dependent Claim
40 words
An exposure apparatus according to claim 14 , wherein the elastic body has an internal space, and the support apparatus adjusts the distance between the second member and the substrate by adjusting a pressure of gas of the internal space.
Claim 17
Dependent Claim
21 words
An exposure apparatus according to claim 13 , wherein the support apparatus includes a drive apparatus that drives the second member.
Claim 18
Dependent Claim
58 words
An exposure apparatus according to claim 16 , further comprising: a detection apparatus that detects the distance between the second member and the surface of the substrate; and a control apparatus that controls the drive apparatus based on a detection result of the detection apparatus so that the second member and the substrate do not come into contact.
Claim 19
Dependent Claim
47 words
An exposure apparatus according to claim 13 , further comprising: a gas blow out port that is provided at the outer side of the second member with respect to an optical path space of the exposure light and blows out gas toward the surface of the substrate.
Claim 20
Dependent Claim
48 words
An exposure apparatus according to claim 18 , wherein the support apparatus has a support member, which has a lower surface opposing the surface of the substrate and supports the second member, and the gas blow out port is provided at a lower surface of the support member.
Claim 21
Dependent Claim
38 words
An exposure apparatus according to claim 19 , wherein a gas bearing is formed between the surface of the substrate and the lower surface of the support member by blowing out gas from the gas blow out port.
Claim 22
Dependent Claim
22 words
A method for manufacturing a device by irradiating exposure light onto the substrate with the exposure apparatus according to claim 1 .
Claim 23
Dependent Claim
166 words
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising: a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed; a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate; and a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein the support apparatus movably supports the second member with respect to the surface of the substrate, the first member has a first liquid recovery sort arranged so as to oppose the surface of the substrate, and the second member is configured to trap the liquid that is present on the substrate without there being complete recover by the first liquid recovery port.
Claim 24
Dependent Claim
166 words
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising: a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed; a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate; and a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein the support apparatus movably supports the second member with respect to the surface of the substrate, the first member has a first liquid recovery sort arranged so as to oppose the surface of the substrate, and the second member is configured to trap the liquid that is present on the substrate without there being complete recover by the first liquid recovery port.
Claim 25
Dependent Claim
35 words
An exposure apparatus according to claim 22 , wherein the second member is positioned at an outer side of the first liquid recovery port with respect to an optical path space of the exposure light.
Claim 26
Dependent Claim
37 words
An exposure apparatus according to claim 23 , further comprising: a second liquid recovery port, which is arranged in the vicinity of the second member and recovers the liquid that has been trapped by the second member.
Claim 27
Dependent Claim
28 words
An exposure apparatus according to claim 24 , wherein the second member is arranged so as to guide a flow of fluid toward the second liquid recovery port.
Claim 28
Dependent Claim
32 words
An exposure apparatus according to claim 25 , wherein the second member is arranged so as to increase a flow rate of the fluid that flows toward the second liquid recovery port.
Claim 29
Dependent Claim
102 words
An exposure apparatus according to claim 23 , wherein the first member has a flat part, which is provided so as to oppose the surface of the substrate and so as to surround the optical path space of the exposure light and between which and the surface of the substrate the liquid is held, the first liquid recovery port is arranged at the outer side of the flat part with respect to the optical path space of the exposure light, and the distance between the second member and the substrate is smaller than a distance between the flat part and the substrate.
Claim 30
Dependent Claim
57 words
An exposure apparatus according to claim 23 , wherein scanning exposure of the substrate is performed while moving the substrate in a prescribed direction, and the first liquid recovery port is arranged at the outer side of an extension area that extends in the prescribed direction with respect to the optical path space of the exposure light.
Claim 31
Dependent Claim
29 words
An exposure apparatus according to claim 28 , wherein the first liquid recovery port is arranged at both sides of the extension area in relation to the prescribed direction.
Claim 32
Dependent Claim
26 words
An exposure apparatus to according claim 22 , wherein the second member is arranged so as to surround an optical path space of the exposure light.
Claim 33
Dependent Claim
16 words
An exposure apparatus according to claim 22 , wherein the second member includes a flexible member.
Claim 34
Dependent Claim
18 words
An exposure apparatus according to claim 22 , wherein the second member includes a plurality of plate-shaped members.
Claim 35
Dependent Claim
33 words
An exposure apparatus according to claim 32 , wherein at least a portion of the plurality of plate-shaped members is arranged radially with respect to an optical path space of the exposure light.
Claim 36
Dependent Claim
53 words
An exposure apparatus according to claim 22 , further comprising: an optical member, which is arranged so as to oppose the substrate and emits the exposure light, and wherein the second member includes a plurality of members arranged along a direction that intersects a plane including an optical axis of the optical member.
Claim 37
Dependent Claim
16 words
An exposure apparatus according to claim 22 , wherein the support apparatus includes an elastic body.
Claim 38
Dependent Claim
40 words
An exposure apparatus according to claim 35 , wherein the elastic body has an internal space, and the support apparatus adjusts the distance between the second member and the substrate by adjusting a pressure of gas of the internal space.
Claim 39
Dependent Claim
21 words
An exposure apparatus according to claim 22 , wherein the support apparatus includes a drive apparatus that drives the second member.
Claim 40
Dependent Claim
58 words
An exposure apparatus according to claim 37 , further comprising: a detection apparatus that detects the distance between the second member and the surface of the substrate; and a control apparatus that controls the drive apparatus based on a detection result of the detection apparatus so that the second member and the substrate do not come into contact.
Claim 41
Dependent Claim
47 words
An exposure apparatus according to claim 22 , further comprising: a gas blow out port that is provided at the outer side of the second member with respect to an optical path space of the exposure light and blows out gas toward the surface of the substrate.
Claim 42
Dependent Claim
48 words
An exposure apparatus according to claim 39 , wherein the support apparatus has a support member, which has a lower surface opposing the surface of the substrate and supports the second member, and the gas blow out port is provided at a lower surface of the support member.
Claim 43
Dependent Claim
38 words
An exposure apparatus according to claim 40 , wherein a gas bearing is formed between the surface of the substrate and the lower surface of the support member by blowing out gas from the gas blow out port.
Claim 44
Dependent Claim
22 words
A method for manufacturing a device by irradiating exposure light onto the substrate with the exposure apparatus according to claim 22 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2016-07-01 | 2016-12-31 | 2017-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2020-07-01 | 2020-12-31 | 2021-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2024-07-01 | 2024-12-31 | 2025-07-02 | $7700.00 | Window Closed / Lapsed |