US7003758B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
System and method for lithography simulation
Assignee: ASML Netherlands BV
•
Filing: 2004-04-01
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Granted: 2006-02-21
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Expires: 2024-04-01
Abstract
Abstract There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of, and system for simulating, verifying, inspecting, characterizing, determining and/or evaluating the lithographic designs, techniques and/or systems, and/or individual functions performed thereby or components used therein. In one embodiment, the present invention is a system and method that accelerates lithography simulation, inspection, characterization and/or evaluation of the optical characteristics and/or properties, as well as the effects and/or interactions of lithographic systems and processing techniques. In this regard, in one embodiment, the present invention employs a lithography simulation system architecture, including application-specific hardware accelerators, and a processing technique to accelerate and facilitate verification, characterization and/or inspection of a mask design, for example, RET design, including detailed simulation and characterization of the entire lithography process to verify that the design achieves and/or provides the desired results on final wafer pattern. The system includes: (1) general purpose-type computing device(s) to perform the case-based logic having branches and inter-dependency in the data handling and (2) accelerator subsystems to perform a majority of the computation intensive tasks.
Inventors
- 👤 Jun Ye
- 👤 Yen-Wen Lu
- 👤 Yu Cao
- 👤 Luoqi Chen
- 👤 Xun Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 00:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G03F7/004; G03F7/70605; G03F7/70653; G03F7/70666; G06; G06F; G06F30/00; G06F30/20; G06F30/30; G06F30/39; G06F30/398; G06T; G06T7/00; G06T7/0002; G06T7/0004; G03F1/00; G06F2119/00; G06F2119/18; G06F30/32; G06F30/333; G06T2207/00; G06T2207/30; G06T2207/30108; G06T2207/30148; G16; G16Z; G16Z99/00; G21; G21K; G21K5/00
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
107 words
A system for simulating a lithographic design comprised of a plurality of polygons arranged in a predetermined configuration, the system comprising: a microprocessor subsystem to convert the plurality of polygons to a pixel-based bitmap representation thereof, wherein the pixel-based bitmap includes pixel data, and wherein each pixel datum represents a pixel having a predetermined pixel size; and an accelerator subsystem, coupled to the microprocessor subsystem, to calculate at least a portion of an aerial image of the lithographic design using the pixel-based bitmap representation of the lithographic design, wherein the accelerator subsystem includes a plurality of programmable gate arrays configured to process the pixel data in parallel.
Claim 2
Independent Claim
107 words
A system for simulating a lithographic design comprised of a plurality of polygons arranged in a predetermined configuration, the system comprising: a microprocessor subsystem to convert the plurality of polygons to a pixel-based bitmap representation thereof, wherein the pixel-based bitmap includes pixel data, and wherein each pixel datum represents a pixel having a predetermined pixel size; and an accelerator subsystem, coupled to the microprocessor subsystem, to calculate at least a portion of an aerial image of the lithographic design using the pixel-based bitmap representation of the lithographic design, wherein the accelerator subsystem includes a plurality of programmable gate arrays configured to process the pixel data in parallel.
Claim 3
Dependent Claim
22 words
The system of claim 1 , wherein the pixel-based bitmap is a gray-level image which is representative of the plurality of polygons.
Claim 4
Dependent Claim
25 words
The system of claim 1 , wherein the predetermined pixel size is greater than a Nyquist frequency in the aerial image of the lithographic design.
Claim 5
Dependent Claim
27 words
The system of claim 1 , wherein the predetermined pixel size is determined using a numerical aperture and wavelength of a projection optics of a lithographic tool.
Claim 6
Dependent Claim
34 words
The system of claim 1 , wherein the lithographic design includes resolution enhancement technology and wherein the microprocessor subsystem converts the plurality of polygons, including resolution enhancement technology, to a pixel-based bitmap representation thereof.
Claim 7
Dependent Claim
53 words
The system of claim 1 , further including a plurality of accelerator subsystems, each accelerator subsystem being coupled to the microprocessor subsystem and provided a portion of the pixel-based bitmap to calculate an aerial image of the lithographic design corresponding to the portion of the pixel-based bitmap using the pixel data associated therewith.
Claim 8
Dependent Claim
28 words
The system of claim 6 , wherein the microprocessor subsystem includes a plurality of microprocessors and wherein each microprocessor is coupled to at least one associated accelerator subsystem.
Claim 9
Dependent Claim
30 words
The system of claim 7 , wherein each of the plurality of accelerator subsystems performs Fast Fourier Transforms, using pixel data, to generate the corresponding portion of the aerial image.
Claim 10
Dependent Claim
57 words
The system of claim 1 , wherein the accelerator subsystem calculates an aerial image in resist formed on a wafer by the lithographic design and wherein the accelerator subsystem calculates the aerial image in resist using the pixel-based bitmap representation of the lithographic design and a coefficient matrix representing projection and illumination optics of a lithographic tool.
Claim 11
Dependent Claim
54 words
The system of claim 9 , wherein the accelerator subsystem calculates a pattern formed on the wafer by the lithographic design and wherein the accelerator subsystem calculates the pattern on the wafer using the pixel-based bitmap representation of the lithographic design and the coefficient matrix representing projection and illumination optics of a lithographic tool.
Claim 12
Dependent Claim
33 words
The system of claim 10 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystem, to compare the calculated pattern on the wafer to a desired, predetermined pattern.
Claim 13
Dependent Claim
37 words
The system of claim 10 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystem, to determine a critical dimension (CD) of the lithographic design using the calculated pattern on the wafer.
Claim 14
Dependent Claim
36 words
The system of claim 10 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystem, to determine an edge placement of the lithographic design using the calculated pattern on the wafer.
Claim 15
Dependent Claim
48 words
The system of claim 10 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystem, to determine a printing sensitivity using patterns on the wafer calculated in response to varying coefficients of the matrix representing projection and illumination optics of a lithographic tool.
Claim 16
Dependent Claim
37 words
The system of claim 14 , wherein the coefficients of the matrix representing projection and illumination optics of a lithographic tool are representative of one or more of a focus, dose, numerical aperture, illumination aperture, and aberration.
Claim 17
Dependent Claim
29 words
The system of claim 15 , wherein the processing system determines a set of parameters of the projection and illumination optics of the lithographic tool using the printing sensitivity.
Claim 18
Dependent Claim
45 words
The system of claim 10 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystem, to detect an error in the lithographic design in response to a comparison between the calculated pattern on the wafer and a desired, predetermined pattern.
Claim 19
Dependent Claim
31 words
The system of claim 17 , wherein, in response to detecting the error, the processing system determines a modification to the lithographic design to correct the error in the lithographic design.
Claim 20
Independent Claim
108 words
A system for simulating a lithographic design, the system comprising: a microprocessor subsystem, including a plurality of microprocessors, to convert the lithographic design to a pixel-based bitmap representation thereof, wherein the pixel-based bitmap includes pixel data, and wherein each pixel datum represents a pixel having a predetermined pixel size; and a plurality of accelerator subsystems, each accelerator subsystem includes a plurality of programmable integrated circuits configured to process the pixel data in parallel and each accelerator subsystem is connected to an associated microprocessor to calculate a portion of an aerial image of the lithographic design using a corresponding portion of the pixel-based bitmap representation of the lithographic design.
Claim 21
Independent Claim
108 words
A system for simulating a lithographic design, the system comprising: a microprocessor subsystem, including a plurality of microprocessors, to convert the lithographic design to a pixel-based bitmap representation thereof, wherein the pixel-based bitmap includes pixel data, and wherein each pixel datum represents a pixel having a predetermined pixel size; and a plurality of accelerator subsystems, each accelerator subsystem includes a plurality of programmable integrated circuits configured to process the pixel data in parallel and each accelerator subsystem is connected to an associated microprocessor to calculate a portion of an aerial image of the lithographic design using a corresponding portion of the pixel-based bitmap representation of the lithographic design.
Claim 22
Dependent Claim
22 words
The system of claim 19 , wherein the lithographic design is comprised of a plurality of polygons arranged in a predetermined configuration.
Claim 23
Dependent Claim
22 words
The system of claim 20 , wherein the pixel-based bitmap is a gray-level image which is representative of the plurality of polygons.
Claim 24
Dependent Claim
25 words
The system of claim 19 , wherein the predetermined pixel size is greater than a Nyquist frequency in the aerial image of the lithographic design.
Claim 25
Dependent Claim
27 words
The system of claim 19 , wherein the predetermined pixel size is determined using a numerical aperture and wavelength of a projection optics of a lithographic tool.
Claim 26
Dependent Claim
34 words
The system of claim 19 , wherein the lithographic design includes resolution enhancement technology and wherein the microprocessor subsystem converts a plurality of polygons, including resolution enhancement technology, to a pixel-based bitmap representation thereof.
Claim 27
Dependent Claim
30 words
The system of claim 19 , wherein each of the plurality of accelerator subsystems performs Fast Fourier Transforms, using pixel data, to generate a corresponding portion of the aerial image.
Claim 28
Dependent Claim
59 words
The system of claim 19 , wherein the plurality of accelerator subsystems calculate an aerial image in resist formed on a wafer by the lithographic design, and wherein the accelerator subsystems calculate the aerial image in resist using the pixel-based bitmap representation of the lithographic design and a coefficient matrix representing projection and illumination optics of a lithographic tool.
Claim 29
Dependent Claim
54 words
The system of claim 26 , wherein the accelerator subsystems calculate a pattern formed on the wafer by the lithographic design and wherein the accelerator subsystems calculate the pattern on the wafer using the pixel-based bitmap representation of the lithographic design and the coefficient matrix representing projection and illumination optics of a lithographic tool.
Claim 30
Dependent Claim
33 words
The system of claim 27 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystems, to compare the calculated pattern on the wafer to a desired, predetermined pattern.
Claim 31
Dependent Claim
37 words
The system of claim 27 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystems, to determine a critical dimension (CD) of the lithographic design using the calculated pattern on the wafer.
Claim 32
Dependent Claim
36 words
The system of claim 27 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystems, to determine an edge placement of the lithographic design using the calculated pattern on the wafer.
Claim 33
Dependent Claim
48 words
The system of claim 27 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystems, to determine a printing sensitivity using patterns on the wafer calculated in response to varying coefficients of the matrix representing projection and illumination optics of a lithographic tool.
Claim 34
Dependent Claim
37 words
The system of claim 31 , wherein the coefficients of the matrix representing projection and illumination optics of a lithographic tool are representative of one or more of a focus, dose, numerical aperture, illumination aperture, and aberration.
Claim 35
Dependent Claim
29 words
The system of claim 32 , wherein the processing system determines a set of parameters of the projection and illumination optics of the lithographic tool using the printing sensitivity.
Claim 36
Dependent Claim
45 words
The system of claim 27 , further including a processing system, coupled to the microprocessor subsystem and the accelerator subsystems, to detect an error in the lithographic design in response to a comparison between the calculated pattern on the wafer and a desired, predetermined pattern.
Claim 37
Dependent Claim
31 words
The system of claim 34 , wherein, in response to detecting the error, the processing system determines a modification to the lithographic design to correct the error in the lithographic design.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-02-20 | 2009-08-22 | 2010-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-02-20 | 2013-08-22 | 2014-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-02-20 | 2017-08-22 | 2018-02-21 | $7700.00 | Window Closed / Lapsed |