US6734107B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pitch reduction in semiconductor fabrication
Assignee: Macronix International Co Ltd
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Filing: 2002-06-12
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Granted: 2004-05-11
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Expires: 2022-06-12
Abstract
Abstract A method for forming transistor devices having a reduced pitch. The pitch of the formed devices can be reduced to, e.g., half that of conventional devices by using current photolithography conditions. Since the pitch of the devices can be reduced, the device integration can be increased, resulting in smaller and faster integrated circuits. In a preferred embodiment, a conductive layer, a stop layer, and a polysilicon layer are formed on a substrate. A patterned photoresist layer is formed on the polysilicon layer, and a first polymer layer is formed on surfaces of the photoresist layer. The first polymer layer is used as an etching mask to define the polysilicon layer, the stop layer, and the conductive layer. An oxide layer is formed on the substrate, and then the oxide layer is etched back until the polysilicon layer is exposed. The polysilicon layer is removed, and a second polymer layer is formed on surfaces of the oxide layer. The second polymer layer is used as an etching mask to define the conductive layer. Then, the second polymer layer is removed.
Inventors
- 👤 Jiun-Ren Lai
- 👤 Chien-Wei Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:29
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01326; H10P50/00; H10P50/71; H10P76/4088; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
147 words
A method for forming transistors having a reduced pitch, comprising: providing a substrate having a first conductive layer, a stop layer, and a second conductive layer formed thereon; forming a patterned photoresist layer on the second conductive layer; forming a first dielectric layer on surfaces of the photoresist layer; defining the first conductive layer, the stop layer, and the second conductive layer using the first dielectric layer as an etching mask; removing the photoresist layer and the first dielectric layer; forming an insulating layer over the substrate; removing the insulating layer down to an upper surface of the second conductive layer, thereby exposing the second conductive layer; removing the second conductive layer; forming a second dielectric layer on surfaces of the insulating layer; defining the stop layer and the first conductive layer using the second dielectric layer as an etching mask; and removing the second dielectric layer.
Claim 2
Independent Claim
147 words
A method for forming transistors having a reduced pitch, comprising: providing a substrate having a first conductive layer, a stop layer, and a second conductive layer formed thereon; forming a patterned photoresist layer on the second conductive layer; forming a first dielectric layer on surfaces of the photoresist layer; defining the first conductive layer, the stop layer, and the second conductive layer using the first dielectric layer as an etching mask; removing the photoresist layer and the first dielectric layer; forming an insulating layer over the substrate; removing the insulating layer down to an upper surface of the second conductive layer, thereby exposing the second conductive layer; removing the second conductive layer; forming a second dielectric layer on surfaces of the insulating layer; defining the stop layer and the first conductive layer using the second dielectric layer as an etching mask; and removing the second dielectric layer.
Claim 3
Dependent Claim
39 words
The method of claim 1 , wherein the removing of the second conductive layer comprises etching the second conductive layer, wherein an etch rate of the insulating layer is less than an etch rate of the second conductive layer.
Claim 4
Dependent Claim
23 words
The method of claim 2 , wherein the stop layer is selected from the group comprising silicon oxide, silicon nitride and silicon oxy-nitride.
Claim 5
Dependent Claim
15 words
The method of claim 1 , wherein the first and second conductive layers comprise polysilicon.
Claim 6
Dependent Claim
20 words
The method of claim 1 , wherein the first and second dielectric layers comprise a polymer formed in an etcher.
Claim 7
Dependent Claim
12 words
The method of claim 5 , wherein the insulating layer comprises oxide.
Claim 8
Dependent Claim
20 words
The method of claim 1 , wherein the removing of the second conductive layer comprises using a dry etching process.
Claim 9
Dependent Claim
19 words
The method of claim 1 , wherein the removing of the insulating layer comprises using a dry etching process.
Claim 10
Dependent Claim
18 words
The method of claim 1 , wherein the removing the insulating layer comprises chemical-mechanical polishing the insulating layer.
Claim 11
Independent Claim
106 words
A method for forming transistors having a reduced pitch, comprising: providing a substrate having a defined first conductive layer capped with a defined stop layer, and further having a defined insulating layer interdispersed with the first conductive layer and the stop layer so that at least a portion of the interdispersed defined insulating layer has a height greater than a combined height of both the first conductive layer and the stop layer; forming a polymer layer on exposed surfaces of the defined insulating layer; defining the stop layer and the first conductive layer using the polymer layer as an etching mask; and removing the polymer layer.
Claim 12
Independent Claim
106 words
A method for forming transistors having a reduced pitch, comprising: providing a substrate having a defined first conductive layer capped with a defined stop layer, and further having a defined insulating layer interdispersed with the first conductive layer and the stop layer so that at least a portion of the interdispersed defined insulating layer has a height greater than a combined height of both the first conductive layer and the stop layer; forming a polymer layer on exposed surfaces of the defined insulating layer; defining the stop layer and the first conductive layer using the polymer layer as an etching mask; and removing the polymer layer.
Claim 13
Dependent Claim
126 words
The method of claim 10 , wherein the providing of a substrate comprises: forming the first conductive layer, the stop layer, and a second conductive layer on a substrate; forming a patterned photoresist layer on the second conductive layer; forming a polymer layer on surfaces of the photoresist layer; defining the first conductive layer, the stop layer, and the second conductive layer using the polymer layer on the photoresist layer as an etching mask; removing the polymer layer from the photoresist layer and removing the photoresist layer; forming an insulating layer on the substrate; removing the insulating layer down to an upper surface of the second conductive layer, thereby forming the defined insulating layer and exposing the second conductive layer; and removing the second conductive layer.
Claim 14
Dependent Claim
39 words
The method of claim 11 , wherein the removing of the second conductive layer comprises etching the second conductive layer, wherein an etch rate of the insulating layer is less than an etch rate of the second conductive layer.
Claim 15
Dependent Claim
29 words
The method of claim 11 , wherein: the stop layer is selected from the group comprising silicon oxide, silicon nitride and silicon oxy-nitride; and the insulating layer comprises oxide.
Claim 16
Dependent Claim
37 words
The method of claim 11 , wherein: the forming a patterned photoresist layer comprises forming photoresist features using a photolithographic process; and a pitch of the photoresist features is as small as the photolithography process will allow.
Claim 17
Dependent Claim
10 words
A structure formed using the method of claim 14 .
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2007-05-11 | 2007-11-10 | 2008-05-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-05-11 | 2011-11-10 | 2012-05-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-05-11 | 2015-11-10 | 2016-05-11 | $7700.00 | Window Closed / Lapsed |