US5296410A
Expired / Lapsed
US
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Method for separating fine patterns of a semiconductor device
Assignee: Samsung Electronics Co Ltd
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Filing: 1992-12-16
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Granted: 1994-03-22
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Expires: 2012-12-16
Abstract
Abstract A method for forming a fine pattern of a semiconductor device, in which a first-to-be-patterned layer is formed on a semiconductor substrate, a photoresist film is coated on the first-to-be-patterned layer, and the photoresist film is patterned and cured to obtain a thermally stable photoresist film pattern. Thereafter, a second material layer is formed on the entire surface of the semiconductor substrate on which the photoresist film pattern is formed, by a low temperature plasma method, and the second material layer is anisotropically etched to thereby form a spacer made of the second material layer on the sidewalls of the photoresist film pattern. A first pattern is formed by anisotropically etching the first-to-be-patterned layer, using the spacer and the photoresist film pattern as an etching mask. The spacer and the photoresist film pattern are then removed. Using the first pattern thus obtained, a fine pattern which is the inverse of the first pattern can be formed. The separation interval between the individual elements can be reduced so as to be less than or equal to the minimum design rule, and a fine pattern below optical resolution can be attained.
Inventors
- 👤 Won-suk Yang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 10:08
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/40; H10P76/408; H10P76/4088; H10P76/4085; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
129 words
A method for separating patterns of a semiconductor device, comprising the steps of: forming a first-to-be-patterned layer on a substrate; coating a photoresist film on said first-to-be-patterned layer; forming a thermally stable photoresist film pattern by patterning and curing said photoresist film; forming a second layer on the entire surface of said semiconductor substrate on which said photoresist film pattern is formed, by a low temperature plasma method; forming a spacer made of said second layer on the sidewalls of said photoresist film pattern, by anisotropically etching said second material layer; forming a first pattern by etching said first-to-be-patterned layer using an anisotropic etching method in which said spacer and said photoresist film pattern are used as an etching mask; and, removing said spacer and said photoresist film pattern.
Claim 2
Independent Claim
129 words
A method for separating patterns of a semiconductor device, comprising the steps of: forming a first-to-be-patterned layer on a substrate; coating a photoresist film on said first-to-be-patterned layer; forming a thermally stable photoresist film pattern by patterning and curing said photoresist film; forming a second layer on the entire surface of said semiconductor substrate on which said photoresist film pattern is formed, by a low temperature plasma method; forming a spacer made of said second layer on the sidewalls of said photoresist film pattern, by anisotropically etching said second material layer; forming a first pattern by etching said first-to-be-patterned layer using an anisotropic etching method in which said spacer and said photoresist film pattern are used as an etching mask; and, removing said spacer and said photoresist film pattern.
Claim 3
Dependent Claim
40 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein said step of curing said photoresist film is carried out by heat-treating said photoresist film for about 30 minutes at a temperature of 120° C.
Claim 4
Dependent Claim
27 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein said photoresist film pattern is cured by an ultraviolet ray baking method.
Claim 5
Dependent Claim
34 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein said second layer is comprised of a material selected from the group comprised of PE-oxide, PE-TEOS oxide and PE-SiN.
Claim 6
Dependent Claim
25 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein said photoresist film has a thickness of about 1.0-1.4 μm.
Claim 7
Dependent Claim
38 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein etching selectivity ratios of said spacer to said first-to-be-patterned layer and said first-to-be-patterned layer to said semiconductor substrate, are each at least 10:1.
Claim 8
Dependent Claim
31 words
A method for separating patterns of a semiconductor device as claimed in claim 1, wherein said second layer is an oxide layer and said first-to-be-patterned layer is a polycrystalline silicon layer.
Claim 9
Independent Claim
158 words
A method for forming a fine pattern comprising the steps of: forming a second-to-be-patterned layer on a substrate; coating a photoresist film on said second-to-be-patterned layer; forming a thermally stable photoresist film pattern by patterning and curing said photoresist film; forming a second layer on the entire surface of said semiconductor substrate on which said photoresist film pattern is formed, by a low temperature plasma method; forming a spacer made of said second layer on the sidewalls of said photoresist film pattern, by anisotropically etching said second material layer; forming a second pattern by anisotropically etching said second-to-be-patterned layer using said spacer and said photoresist film pattern as an etching mask; removing said spacer and said photoresist film pattern; forming a planarized first-to-be-patterned layer, over the entire surface of said semiconductor substrate on which said second pattern is formed; and forming a first pattern by etching-back said first-to-be-patterned layer until the surface of said second pattern is exposed.
Claim 10
Independent Claim
158 words
A method for forming a fine pattern comprising the steps of: forming a second-to-be-patterned layer on a substrate; coating a photoresist film on said second-to-be-patterned layer; forming a thermally stable photoresist film pattern by patterning and curing said photoresist film; forming a second layer on the entire surface of said semiconductor substrate on which said photoresist film pattern is formed, by a low temperature plasma method; forming a spacer made of said second layer on the sidewalls of said photoresist film pattern, by anisotropically etching said second material layer; forming a second pattern by anisotropically etching said second-to-be-patterned layer using said spacer and said photoresist film pattern as an etching mask; removing said spacer and said photoresist film pattern; forming a planarized first-to-be-patterned layer, over the entire surface of said semiconductor substrate on which said second pattern is formed; and forming a first pattern by etching-back said first-to-be-patterned layer until the surface of said second pattern is exposed.
Claim 11
Dependent Claim
31 words
A method for forming a fine pattern as claimed in claim 8, wherein an etching selectivity ratio of said first-to-be-patterned layer with respect to said second-to-be-patterned layer is at least 10:1.
Claim 12
Dependent Claim
37 words
A method for forming a fine pattern as claimed in claim 8, wherein the etching selectivity ratios of said spacer to said second-to-be-patterned layer and said second-to-be-patterned layer to said semiconductor substrate, are each at least 10:1.
Claim 13
Dependent Claim
37 words
A method for forming a fine pattern as claimed in claim 8, wherein said second material layer is an oxide layer, said second-to-be-patterned layer is an insulation layer, and said first-to-be-patterned layer is a polycrystalline silicon layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-21 | 1997-09-20 | 1998-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-21 | 2001-09-20 | 2002-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-21 | 2005-09-20 | 2006-03-22 | $7700.00 | Window Closed / Lapsed |