Patent US6579372B2 successfully refreshed from Google Patents.
US6579372B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for depositing thin film on wafer using atomic layer deposition
Assignee: Wonik IPS Co Ltd
•
Filing: 2001-05-03
•
Granted: 2003-06-17
•
Expires: 2021-05-03
Abstract
Abstract An atomic layer deposition (ALD) thin film deposition apparatus including a reactor in which a wafer is mounted and a thin film is deposited on the wafer, a first reaction gas supply portion for supplying a first reaction gas to the reactor, a second reaction gas supply portion for supplying a second reaction gas to the reactor, a first reaction gas supply line for connecting the first reaction gas supply portion to the reactor, a second reaction gas supply line for connecting the second reaction gas supply portion to the reactor, a first inert gas supply line for supplying an inert gas from an inert gas supply source to the first reaction gas supply line, a second inert gas supply line for supplying the inert gas from the inert gas supply source to the second reaction gas supply line, and an exhaust line for exhausting the gas from the reactor.
Inventors
- 👤 Young-hoon Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:24
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45544; C23C16/45548; C23C16/45561; C23C16/45563; C23C16/45565; C23C16/45574; Y; Y10; Y10S; Y10S438/00; Y10S438/935; Y10T; Y10T137/00; Y10T137/4673
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
224 words
An atomic layer deposition (ALD) thin film deposition apparatus comprising: a reactor in which a wafer is mounted and a thin film is deposited on the wafer; a first reaction gas supply portion for supplying a first reaction gas to the reactor; a second reaction gas supply portion for supplying a second reaction gas to the reactor; a first reaction gas supply line for connecting the first reaction gas supply portion to the reactor; a second reaction gas supply line for connecting the second reaction gas supply portion to the reactor; a first inert gas supply line for supplying an inert gas from an inert gas supply source to the first reaction gas supply line; a second inert gas supply line for supplying the inert gas from the inert gas supply source to the second reaction gas supply line; and an exhaust line for exhausting the gas from the reactor; wherein the reactor comprises a first connection line for supplying the first reaction gas and/or the inert gas to the wafer through a plurality of spray holes, and a second connection line for supplying the second reaction gas and/or the inert gas to the wafer through a plurality of nozzles such that the first and second reaction gases are alternatively supplied to the reactor, while the inert gas is continuously supplied to the reactor.
Claim 2
Dependent Claim
224 words
An atomic layer deposition (ALD) thin film deposition apparatus comprising: a reactor in which a wafer is mounted and a thin film is deposited on the wafer; a first reaction gas supply portion for supplying a first reaction gas to the reactor; a second reaction gas supply portion for supplying a second reaction gas to the reactor; a first reaction gas supply line for connecting the first reaction gas supply portion to the reactor; a second reaction gas supply line for connecting the second reaction gas supply portion to the reactor; a first inert gas supply line for supplying an inert gas from an inert gas supply source to the first reaction gas supply line; a second inert gas supply line for supplying the inert gas from the inert gas supply source to the second reaction gas supply line; and an exhaust line for exhausting the gas from the reactor; wherein the reactor comprises a first connection line for supplying the first reaction gas and/or the inert gas to the wafer through a plurality of spray holes, and a second connection line for supplying the second reaction gas and/or the inert gas to the wafer through a plurality of nozzles such that the first and second reaction gases are alternatively supplied to the reactor, while the inert gas is continuously supplied to the reactor.
Claim 3
Dependent Claim
85 words
The ALD thin film deposition apparatus of claim 1 , wherein the first reaction gas supply portion comprises: a first bubbler for gasifying a first reaction material to form the first reaction gas; a first reaction gas mass flow controller for controlling the flow of the first reaction gas supplied from the first bubbler; and a first valve installed on a line between the first bubbler and the first reaction gas mass flow controller for allowing or blocking the flow of the first reaction gas.
Claim 4
Dependent Claim
43 words
The ALD thin film deposition apparatus of claim 2 , further comprising a second valve installed on the first reaction gas supply line for allowing or blocking the flow of the first reaction gas controlled by the first reaction gas mass flow controller.
Claim 5
Dependent Claim
56 words
The ALD thin film deposition apparatus of claim 1 , wherein the second reaction gas supply portion comprises: a third valve for allowing or blocking the flow of the second reaction gas; and a second reaction gas mass flow controller for controlling the flow of the second reaction gas which has passed through the third valve.
Claim 6
Dependent Claim
43 words
The ALD thin film deposition apparatus of claim 4 , further comprising a fourth valve installed on the second reaction gas supply line for allowing or blocking the flow of the second reaction gas controlled by the second reaction gas mass flow controller.
Claim 7
Dependent Claim
80 words
The ALD thin film deposition apparatus of claim 1 , wherein the first inert gas supply line comprises a fifth valve for allowing or blocking the flow of a supplied inert gas, a first inert gas mass flow controller for controlling the flow of the inert gas which has passed through the fifth valve, and a sixth valve for allowing or blocking the flow of the inert gas which has been controlled by the first inert gas mass flow controller.
Claim 8
Dependent Claim
80 words
The ALD thin film deposition apparatus of claim 1 , wherein the second inert gas supply line comprises an seventh valve for allowing or blocking the flow of a supplied inert gas, a second inert gas mass flow controller for controlling the flow of the inert gas which has passed through the seventh valve, and a eighth valve for allowing or blocking the flow of the inert gas which has been controlled by the second inert gas mass flow controller.
Claim 9
Dependent Claim
145 words
The ALD thin film deposition apparatus of claim 1 , further comprising: a first bypass line for allowing the first reaction gas and/or inert gas to flow directly to the exhaust line without passing through the reactor, the first bypass line having a ninth valve for allowing or blocking the flow of the first reaction gas to the exhaust line and an tenth valve for allowing or blocking the flow of the inert gas to the exhaust line; and a second bypass line for allowing the second reaction gas and/or inert gas to flow directly to the exhaust line without passing through the reactor, the second bypass line having a eleventh valve for allowing or blocking the flow of the second reaction gas to the exhaust line and a twelfth valve for allowing or blocking the flow of the inert gas to the exhaust line.
Claim 10
Dependent Claim
67 words
The ALD thin film deposition apparatus of claim 8 , further comprising a separate inert gas supply line for purging and exhausting the gas and/or contaminating sources existing within lines, wherein the separate inert gas supply line is organically connected to the first and second reaction gas supply portions, the first and second inert gas supply lines, the first and second bypass lines, and the exhaust line.
Claim 11
Dependent Claim
35 words
The ALD thin film deposition apparatus of claim 1 , wherein the first reaction gas is a TiCl 4 gas or a compound gas containing Ta, and the second reaction gas is NH 3 .
Claim 12
Dependent Claim
56 words
The ALD thin film deposition apparatus of claim 1 , wherein the first reaction gas supply portion comprises: a thirteenth valve for allowing or blocking the flow of the first reaction gas; and a third reaction gas mass flow controller for controlling the flow of the first reaction gas which has passed through the thirteenth valve.
Claim 13
Dependent Claim
28 words
The ALD thin film deposition apparatus of claim 11 , wherein the first reaction gas is WF 6 , and the second reaction gas is NH 3 .
Claim 14
Dependent Claim
119 words
The ALD thin film deposition apparatus of claim 1 , further comprising: a third reaction supply portion for supplying a third reaction gas to the second reaction gas supply line; and a fourth reaction supply portion for supplying a fourth reaction gas to the second reaction gas supply line, wherein the fourth reaction gas supply portion has a fourteenth valve for allowing or blocking the flow of a fourth reaction gas, a fourth reaction gas mass flow controller for controlling the flow of a fourth gas which has passed through the fourteenth valve, and a fifteenth valve for allowing or blocking the flow of the fourth gas which has been controlled by the fourth reaction gas mass flow controller.
Claim 15
Dependent Claim
118 words
The ALD thin film deposition apparatus of claim 13 , wherein the third reaction gas supply portion comprises: a second bubbler for gasifying a third reaction material to form the third reaction gas; a fourth reaction gas mass flow controller for controlling the flow of the third reaction gas supplied from the second bubbler; a sixteenth valve installed on a line between the second bubbler and the fourth reaction gas mass flow controller for allowing or blocking the flow of the third reaction gas; and a seventeenth valve for allowing or blocking the flow of the third reaction gas, which has been controlled by the fourth reaction gas mass flow controller, to the second reaction gas supply line.
Claim 16
Dependent Claim
43 words
The ALD thin film deposition apparatus of claim 14 , wherein the first reaction gas is a compound gas containing a transfer metal element selected from the group consisting of Ti, Ta and W, and the second reaction gas is NH 3 .
Claim 17
Dependent Claim
27 words
The ALD thin film deposition apparatus of claim 14 , wherein the third reaction gas is TriMethylAluminum (TMA), and the fourth reaction gas is H 2 .
Claim 18
Dependent Claim
108 words
The ALD thin film deposition apparatus of claim 1 , wherein the reactor further comprises: a reactor block for receiving the wafer; a shower head plate covering the reactor block to maintain a predetermined pressure within the reactor block; and a diffusion plate installed on the shower head plate, and including the plurality of spray holes which face an upper surface of the wafer to spray the first reaction gas and/or the inert gas onto the wafer, and the plurality of nozzles which extend toward an inner side surface of the reactor block to spray the second reaction gas and/or the inert gas toward edges of the wafer.
Claim 19
Dependent Claim
55 words
The ALD thin film deposition apparatus of claim 17 , wherein the reactor further comprises: a wafer block installed in the reactor block, on which the wafer is to be seated; and an exhausting portion connected to the reactor block for exhausting the first and second gases and/or the inert gas from the rector block.
Claim 20
Dependent Claim
97 words
The ALD thin film deposition apparatus of claim 17 , wherein the reactor further comprises first and second connection pipes connected to the first and the second connection lines, respectively; and wherein the first reaction gas and/or the inert gas is sprayed to the wafer through the spray holes along a first route from the first connection pipe to the first connection line, and the second reaction gas and/or the inert gas is sprayed to the edges of the wafer through the nozzles along a second route from the second connection pipe to the second connection line.
References Cited (Backward Citations)
US5769950A
Cited
US4798809A
Cited
US4980204A
Cited
US5002793A
Cited
JPH02230722A
Cited
US5091207A
Cited
US5250323A
Cited
US5637153A
Cited
US5616208A
Cited
US6004618A
Cited
US5853936A
Cited
US5653807A
Cited
US5993555A
Cited
US5849092A
Cited
JPH11172438A
Cited
US6197683B1
Cited
JPH11269652A
Cited
US6328043B1
Cited
US6042652A
Cited
US20010045187A1
Cited
US20020007790A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-16 | 2006-12-16 | 2007-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-16 | 2010-12-16 | 2011-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-16 | 2014-12-16 | 2015-06-17 | $7700.00 | Window Closed / Lapsed |