Patent US6541393B2 successfully refreshed from Google Patents.
US6541393B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabricating semiconductor device
Assignee: Toshiba Corp
•
Filing: 2001-02-09
•
Granted: 2003-04-01
•
Expires: 2021-02-09
Abstract
Abstract A semiconductor device is fabricated by a method comprising the steps of: selectively introducing a halogen element or argon into a device region 14 of a silicon substrate 10 ; and wet oxidizing the silicon substrate 10 in an ambient atmosphere which an H 2 O partial pressure is less than 1 atm to thereby form a silicon oxide film 22 in the device region 14 of the silicon substrate 10 , and a silicon oxide film 24 thinner than the silicon oxide film 22 in a device region 16 of the silicon substrate 10 . Whereby the silicon oxide film in a device region 14 with the halogen element or argon introduced can be selectively formed thick. The silicon oxide films are formed by the wet oxidation, whereby the gate insulation films can be more reliable than those formed by the dry oxidation.
Inventors
- 👤 Taro Sugizaki
- 👤 Toshiro Nakanishi
- 👤 Kyoichi Suguro
- 👤 Atsushi Murakoshi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:15
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6927; H10D; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0144; H10D84/02; H10D84/03; H10D84/038; H10P14/65; H10P14/6502; H10P14/6516; H10P14/6518; H10P14/6524; H10P14/6526; H10P14/6529; H10D84/0151; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6322
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
91 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or argon into a first region of a silicon substrate; and wet oxidizing the silicon substrate in an ambient atmosphere which an H 2 O partial pressure is less than 1 atm to thereby simultaneously form a first silicon oxide film in the first region of the silicon substrate, and a second silicon oxide film thinner than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 2
Independent Claim
91 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or argon into a first region of a silicon substrate; and wet oxidizing the silicon substrate in an ambient atmosphere which an H 2 O partial pressure is less than 1 atm to thereby simultaneously form a first silicon oxide film in the first region of the silicon substrate, and a second silicon oxide film thinner than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 3
Dependent Claim
42 words
A method for fabricating the semiconductor device according to claim 1 , wherein in the step of wet oxidizing the silicon substrate, the silicon substrate is oxidized under a low pressure, or in a nitrogen atmosphere or a rare gas diluted atmosphere.
Claim 4
Independent Claim
69 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing iodine, krypton or xenon into a first region of a silicon substrate; and oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, and a second silicon oxide film thinner than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 5
Independent Claim
69 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing iodine, krypton or xenon into a first region of a silicon substrate; and oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, and a second silicon oxide film thinner than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 6
Independent Claim
70 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing nitrogen into a first region of a silicon substrate; and wet oxidizing the silicon substrate after dry oxidation to thereby simultaneously form a first silicon oxide film in the first region, and a second silicon oxide film thicker than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 7
Independent Claim
70 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing nitrogen into a first region of a silicon substrate; and wet oxidizing the silicon substrate after dry oxidation to thereby simultaneously form a first silicon oxide film in the first region, and a second silicon oxide film thicker than the first silicon oxide film in a second region of the silicon substrate different from the first region.
Claim 8
Independent Claim
127 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or a rare gas at a first concentration into a first region of a silicon substrate; selectively introducing a halogen element or a rare gas at a second concentration higher than the first concentration into a second region of the silicon substrate different from the first region; and wet-oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thicker than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
Claim 9
Independent Claim
127 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or a rare gas at a first concentration into a first region of a silicon substrate; selectively introducing a halogen element or a rare gas at a second concentration higher than the first concentration into a second region of the silicon substrate different from the first region; and wet-oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thicker than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
Claim 10
Independent Claim
119 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or a rare gas into a first region of a silicon substrate; selectively introducing nitrogen in a second region of the silicon substrate different from the first region; and wet-oxidizing the silicon substrate after dry oxidation to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thinner than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film and thicker than the second silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
Claim 11
Independent Claim
119 words
A method for fabricating the semiconductor device comprising the steps of: selectively introducing a halogen element or a rare gas into a first region of a silicon substrate; selectively introducing nitrogen in a second region of the silicon substrate different from the first region; and wet-oxidizing the silicon substrate after dry oxidation to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thinner than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film and thicker than the second silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
Claim 12
Dependent Claim
29 words
A method for fabricating the semiconductor device according to claim 1 , wherein a halogen element or argon is introduced through an insulation film formed on the silicon substrate.
Claim 13
Dependent Claim
28 words
A method for fabricating the semiconductor device according to claim 3 , wherein iodine, krypton or xenon is introduced through an insulation film formed on the silicon substrate.
Claim 14
Dependent Claim
25 words
A method for fabricating the semiconductor device according to claim 4 , wherein nitrogen is introduced through an insulation film formed on the silicon substrate.
Claim 15
Dependent Claim
31 words
A method for fabricating the semiconductor device according to claim 5 , wherein a halogen element or a rare gas is introduced through an insulation film formed on the silicon substrate.
Claim 16
Dependent Claim
32 words
A method for fabricating the semiconductor device according to claim 6 , wherein a halogen element, a rare gas or nitrogen is introduced through an insulation film formed on the silicon substrate.
Claim 17
Dependent Claim
78 words
A method for fabricating the semiconductor device according to claim 1 , further comprising the steps of: forming a first gate electrode on the first silicon oxide film and a second gate electrode on the second silicon oxide film; and forming a first pair of diffused regions in the silicon substrate on both sides of the first gate electrode and a second pair of diffused regions in the silicon substrate on both sides of the second gate electrode.
Claim 18
Dependent Claim
78 words
A method for fabricating the semiconductor device according to claim 3 , further comprising the steps of: forming a first gate electrode on the first silicon oxide film and a second gate electrode on the second silicon oxide film; and forming a first pair of diffused regions in the silicon substrate on both sides of the first gate electrode and a second pair of diffused regions in the silicon substrate on both sides of the second gate electrode.
Claim 19
Dependent Claim
78 words
A method for fabricating the semiconductor device according to claim 4 , further comprising the steps of: forming a first gate electrode on the first silicon oxide film and a second gate electrode on the second silicon oxide film; and forming a first pair of diffused regions in the silicon substrate on both sides of the first gate electrode and a second pair of diffused regions in the silicon substrate on both sides of the second gate electrode.
Claim 20
Dependent Claim
106 words
A method for fabricating the semiconductor device according to claim 5 , further comprising the steps of: forming a first gate electrode on the first silicon oxide film, a second gate electrode on the second silicon oxide film, and a third gate electrode on the third silicon oxide film; and forming a first pair of diffused regions in the silicon substrate on both sides of the first gate electrode, a second pair of diffused regions in the silicon substrate on both sides of the second gate electrode, and a third pair of diffused regions in the silicon substrate on both sides of the third gate electrode.
Claim 21
Dependent Claim
106 words
A method for fabricating the semiconductor device according to claim 6 , further comprising the steps of: forming a first gate electrode on the first silicon oxide film, a second gate electrode on the second silicon oxide film, and a third gate electrode on the third silicon oxide film; and forming a first pair of diffused regions in the silicon substrate on both sides of the first gate electrode, a second pair of diffused regions in the silicon substrate on both sides of the second gate electrode, and a third pair of diffused regions in the silicon substrate on both sides of the third gate electrode.
Claim 22
Independent Claim
139 words
A method for fabricating a semiconductor device comprising the steps of: selectively introducing a first element selected from the group consisting of halogen elements and rare gas elements into a first region of a silicon substrate; selectively introducing a second element selected from the group consisting of halogen elements and rare gas elements into a second region of the silicon substrate different from the first region, the second element being different than the first element; and wet-oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thicker than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
Claim 23
Independent Claim
139 words
A method for fabricating a semiconductor device comprising the steps of: selectively introducing a first element selected from the group consisting of halogen elements and rare gas elements into a first region of a silicon substrate; selectively introducing a second element selected from the group consisting of halogen elements and rare gas elements into a second region of the silicon substrate different from the first region, the second element being different than the first element; and wet-oxidizing the silicon substrate to thereby simultaneously form a first silicon oxide film in the first region, a second silicon oxide film thicker than the first silicon oxide film in the second region, and a third silicon oxide film thinner than the first silicon oxide film in a third region of the silicon substrate different from the first region and the second region.
References Cited (Backward Citations)
JPH06350079A
Cited
US5739580A
Cited
TW324839B
Cited
JPH11102970A
Cited
JPH11233642A
Cited
US6143669A
Cited
JPH11260813A
Cited
US6191049B1
Cited
JPH11289090A
Cited
US6150220A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-03-31 | 2006-09-30 | 2007-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-03-31 | 2010-09-30 | 2011-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-03-31 | 2014-09-30 | 2015-04-01 | $7700.00 | Window Closed / Lapsed |