US6503780B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer scale image sensor package fabrication method
Assignee: Amkor Technology Singapore Holding Pte Ltd
•
Filing: 2000-07-05
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Granted: 2003-01-07
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Expires: 2020-07-05
Abstract
Abstract To form an image sensor package, a series of shallow cuts are made in an interior surface of a window sheet having a plurality of windows. A window support layer is formed on an upper surface of a wafer having a plurality of image sensors. The interior surface of the window sheet is pressed into the window support layer such that the windows are above active areas of the image sensors. The shallow cuts in combination with the window support layer define cavities above bond pads of the image sensors. The window sheet is cut from an exterior surface directly opposite of the cavities above the bond pads to singulating the windows from one another. The wafer is then singulated to form a plurality of image sensor packages.
Inventors
- 👤 Thomas P. Glenn
- 👤 Steven Webster
- 👤 Tony Arellano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:04
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/804; H10W; H10W72/00; H10W72/851; H10W72/874; H10W72/884; H10W90/00; H10W90/701; H10W90/731; H10W90/734; H10W90/736; H10W90/751; H10W90/754; H10W90/756
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
63 words
A method comprising: forming a window support layer on a first surface of an image sensor substrate comprising a first image sensor, said window support layer covering an active area of said first image sensor; and pressing a first surface of a window sheet into said window support layer such that a first window of said window sheet is above said active area.
Claim 2
Independent Claim
63 words
A method comprising: forming a window support layer on a first surface of an image sensor substrate comprising a first image sensor, said window support layer covering an active area of said first image sensor; and pressing a first surface of a window sheet into said window support layer such that a first window of said window sheet is above said active area.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said forming comprises spin coating a bonding material on said first surface of said image sensor substrate.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein said first surface of said window sheet is pressed into said window support layer while said window support layer is wet.
Claim 5
Dependent Claim
13 words
The method of claim 3 further comprising setting up said window support layer.
Claim 6
Dependent Claim
19 words
The method of claim 4 wherein said setting up comprises curing, gelling, or making tacky said window support layer.
Claim 7
Dependent Claim
18 words
The method of claim 1 further comprising scoring said first surface of said window sheet with a cut.
Claim 8
Dependent Claim
12 words
The method of claim 6 wherein said cut is a rectangular groove.
Claim 9
Dependent Claim
16 words
The method of claim 6 wherein said cut and said window support layer define a cavity.
Claim 10
Dependent Claim
18 words
The method of claim 8 wherein said cavity is above a bond pad of said first image sensor.
Claim 11
Dependent Claim
29 words
The method of claim 8 further comprising cutting said window sheet from a second surface of said window sheet, said window sheet being cut directly opposite of said cavity.
Claim 12
Dependent Claim
17 words
The method of claim 10 wherein said cutting comprises cutting through said window sheet to said cavity.
Claim 13
Dependent Claim
13 words
The method of claim 11 wherein said cutting is performed with a sawbdade.
Claim 14
Dependent Claim
19 words
The method of claim 12 wherein said cut has a first width and said sawblade has a second width.
Claim 15
Dependent Claim
15 words
The method of claim 13 wherein said first width is equal to said second width.
Claim 16
Dependent Claim
15 words
The method of claim 13 wherein said second width is greater than said first width.
Claim 17
Dependent Claim
15 words
The method of claim 1 further comprising singulating said first window from said window sheet.
Claim 18
Dependent Claim
21 words
The method of claim 16 further comprising selectively removing said window support layer using said first window as an etch mask.
Claim 19
Dependent Claim
28 words
The method of claim 17 wherein said window support layer covers a first bond pad of said first image sensor, said selectively removing exposing said first bond pad.
Claim 20
Independent Claim
49 words
A method comprising: entirely coating a first surface comprising an active area and a bond pad of an image sensor with a bonding material to form a window support layer; supporting a window above said active area with said window support layer; and setting up said window support layer.
Claim 21
Independent Claim
49 words
A method comprising: entirely coating a first surface comprising an active area and a bond pad of an image sensor with a bonding material to form a window support layer; supporting a window above said active area with said window support layer; and setting up said window support layer.
Claim 22
Independent Claim
15 words
The method of claims 19 wherein said entirely coating comprises spin coating said bonding material.
Claim 23
Dependent Claim
21 words
The method of claim 19 wherein said supporting comprises pressing a first surface of said window into said window support layer.
Claim 24
Dependent Claim
17 words
The method of claim 21 wherein said pressing is performed while said window support layer is wet.
Claim 25
Dependent Claim
16 words
The method of claim 19 further comprising removing said window support layer above said bond pad.
Claim 26
Dependent Claim
21 words
The method of claim 23 wherein said removing comprises using said window as an etch mask for said window support layer.
Claim 27
Dependent Claim
18 words
The method of claim 23 wherein a remaining portion of said window support layer comprises a window support.
Claim 28
Independent Claim
174 words
A method comprising: forming a window support layer on a first surface of an image sensor substrate comprising a first image sensor and a second image sensor, said window support layer covering an active area of said first image sensor and an active area of said second image sensor; defining a first window and a second window of a window sheet by a first cut in a first surface of said window sheet; pressing said first surface of said window sheet into said window support layer such that said first window is above said active area of said first image sensor and said second window is above said active area of said second image sensor, wherein said window support layer and said first cut define a cavity above a bond pad of said first image sensor and above a bond pad of said second image sensor; setting up said window support layer; and cutting from a second surface of said window sheet to said cavity to singulate said first window from said second window.
Claim 29
Independent Claim
174 words
A method comprising: forming a window support layer on a first surface of an image sensor substrate comprising a first image sensor and a second image sensor, said window support layer covering an active area of said first image sensor and an active area of said second image sensor; defining a first window and a second window of a window sheet by a first cut in a first surface of said window sheet; pressing said first surface of said window sheet into said window support layer such that said first window is above said active area of said first image sensor and said second window is above said active area of said second image sensor, wherein said window support layer and said first cut define a cavity above a bond pad of said first image sensor and above a bond pad of said second image sensor; setting up said window support layer; and cutting from a second surface of said window sheet to said cavity to singulate said first window from said second window.
Claim 30
Dependent Claim
29 words
The method of claim 26 wherein said cavity prevents damage to said bond pad of said first image sensor and to said bond pad of said second image sensor.
Claim 31
Dependent Claim
13 words
The method of claim 26 wherein said cutting is performed with a sawblade.
Claim 32
Dependent Claim
20 words
The method of claim 28 wherein a width of said first cut is equal to a width of said sawblade.
Claim 33
Dependent Claim
20 words
The method of claim 28 wherein a width of said first cut is less than a width of said sawblade.
Claim 34
Dependent Claim
31 words
The method of claim 26 further comprising removing said window support layer above said bond pad of said first image sensor and above said bond pad of said second image senosor.
Claim 35
Dependent Claim
25 words
The method of claim 31 wherein said removing comprises using said first window and said second window as etch masks for said window support layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-01-06 | 2006-07-08 | 2007-01-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-01-06 | 2010-07-08 | 2011-01-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-01-06 | 2014-07-08 | 2015-01-07 | $7700.00 | Window Closed / Lapsed |