Patent US6486047B2 successfully refreshed from Google Patents.
US6486047B2
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Apparatus for forming strontium-tantalum-oxide thin film
Assignee: Electronics and Telecommunications Research Institute
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Filing: 2001-05-31
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Granted: 2002-11-26
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Expires: 2021-05-31
Abstract
Abstract An apparatus for forming Strontium-Tantalum-Oxide films and a method thereof using an atomic layer deposition tool are provided. In the Strontium-Tantalum-Oxide films deposited by using plasma and the atomic layer deposition, its leakage-current is very low, and its dielectric constant has a range of 30 to 100 depending on the there heating conditions. Therefore, the method provides structures for i) an insulating film of an NDRO-type ferroelectric memory device that has a structure of Metal-film/Ferroelectric-film/Insulating-film/Silicon, ii) a gate oxide film substituting for silicon oxide film, and iii) an insulating film of Electro Luminescent Display (ELD) device.
Inventors
- 👤 Won-jae Lee
- 👤 In-Kyu You
- 👤 Yil-suk Yang
- 👤 Byoung-Gon Yu
- 👤 Kyoung-Ik Cho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:09
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6339; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/409; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45527; C23C16/45536; C23C16/45542; C23C16/45544; C23C16/50; H10P14/6336; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69397; H10P14/69398; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
89 words
A method for forming Strontium-Tantalum-Oxide thin film on a patterned substrate, comprising the steps of: a) arranging said substrate in a reaction chamber; b) introducing a source material into the reaction chamber using a carrier gas, said source material being vaporized in said carrier gas and containing Strontium Tantalum Ethoxide; c) blowing said source material out of said reaction chamber using purge gas; d) introducing oxygen gas into the reaction chamber and generating oxygen plasma; and e) blowing the oxygen plasma out of the reaction chamber using purge gas.
Claim 2
Independent Claim
89 words
A method for forming Strontium-Tantalum-Oxide thin film on a patterned substrate, comprising the steps of: a) arranging said substrate in a reaction chamber; b) introducing a source material into the reaction chamber using a carrier gas, said source material being vaporized in said carrier gas and containing Strontium Tantalum Ethoxide; c) blowing said source material out of said reaction chamber using purge gas; d) introducing oxygen gas into the reaction chamber and generating oxygen plasma; and e) blowing the oxygen plasma out of the reaction chamber using purge gas.
Claim 3
Dependent Claim
27 words
The method according to claim 1 , wherein the substrate of step a) is heated at a temperature within a range of 200° C. to 300° C.
Claim 4
Dependent Claim
28 words
The method according to claim 1 , wherein the source material of step b) is vaporized at a temperature within a range of 155° C. to 165° C.
Claim 5
Dependent Claim
25 words
The method according to claim 1 , wherein the composition ratio of Sr/Ta of the source material is within a range of 0.45 to 0.60.
Claim 6
Dependent Claim
24 words
The method according to claim 1 , wherein the pressure in the reaction chamber is within a range of 0.5 Torr to 1.5 Torr.
Claim 7
Dependent Claim
25 words
The method according to claim 1 , the steps of a) to e) are reiterated in order to form a plurality of the Strontium-Tantalum-Oxide films.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-11-25 | 2006-05-27 | 2006-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-11-25 | 2010-05-27 | 2010-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-11-25 | 2014-05-27 | 2014-11-26 | $7700.00 | Window Closed / Lapsed |