Patent US6468599B1 successfully refreshed from Google Patents.
US6468599B1
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US
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Method for removing organic compound by ultraviolet radiation
Assignee: AUO Corp
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Filing: 1999-12-17
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Granted: 2002-10-22
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Expires: 2019-12-17
Abstract
Abstract An organic polymer film can be completely decomposed and removed from a substrate surface by exposing the film to ultraviolet radiation having a wavelength of 180 nm or less. Also, ultraviolet radiation not longer than 180 nm in wavelength is scarcely transmitted through a transparent conductive oxide such as ITO and, thus, can be used for eliminating a defective polyimide alignment film formed on a color filter substrate and an array substrate having a transparent electrode pattern of ITO formed on the surface of a pigment portion and a TFT structure, respectively. According to the present invention, the defective alignment film on the substrates can be removed completely without any damage such as discoloring of the pigment portion and/or changing the TFT characteristics.
Inventors
- 👤 Kazuo Terada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:31
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1337; G02F1/133711; G02B; G02B5/00; G02B5/20; G02B5/201
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
56 words
A method of removing an organic polymer film on a substrate which comprises exposing the organic polymer film to ultraviolet radiation having a wavelength of 180 nm or less, said organic polymer film being exposed to said ultraviolet radiation with a sufficient output power for a sufficient period to decompose substantially completely the organic polymer film.
Claim 2
Independent Claim
56 words
A method of removing an organic polymer film on a substrate which comprises exposing the organic polymer film to ultraviolet radiation having a wavelength of 180 nm or less, said organic polymer film being exposed to said ultraviolet radiation with a sufficient output power for a sufficient period to decompose substantially completely the organic polymer film.
Claim 3
Dependent Claim
27 words
The method according to claim 1 , wherein said organic polymer is decomposed to a volatile compound to be removed upon the exposure to said ultraviolet radiation.
Claim 4
Dependent Claim
32 words
The method according to claim 1 or 2 , wherein said organic polymer is oxidized by an exited oxygen generated by exposing an oxygen atom in an atmosphere to said ultraviolet radiation.
Claim 5
Dependent Claim
16 words
The method according to claim 1 , wherein said organic polymer film has a C═C bond.
Claim 6
Dependent Claim
14 words
The method according to claim 4 , wherein said organic polymer film comprises polyimide.
Claim 7
Dependent Claim
24 words
The method according to claim 1 , further comprising heating the substrate concurrently with exposure of the organic polymer film to said ultraviolet radiation.
Claim 8
Dependent Claim
17 words
The method according to claim 6 , wherein the temperature of said substrate is 100-120 degrees C.
Claim 9
Dependent Claim
26 words
The method according to claim 1 , wherein said substrate is a color filter substrate having a pigment portion having a transparent electrode pattern formed thereon.
Claim 10
Dependent Claim
24 words
The method according to claim 8 , wherein said transparent electrode pattern comprises a material selected from the group consisting of ITO and IZO.
Claim 11
Dependent Claim
18 words
The method according to claim 8 or 9 , wherein said organic polymer film is an alignment film.
Claim 12
Independent Claim
36 words
A method of removing an organic compound on an array substrate with a transparent electrically conductive film formed thereon, which comprises exposing the organic compound to ultraviolet radiation having a wavelength of 180 nm or less.
Claim 13
Independent Claim
36 words
A method of removing an organic compound on an array substrate with a transparent electrically conductive film formed thereon, which comprises exposing the organic compound to ultraviolet radiation having a wavelength of 180 nm or less.
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