US6329663B1
Expired / Lapsed
US
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Method and apparatus for cleaning a glass substrate for a color filter
Assignee: Videocon Global Ltd
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Filing: 1999-04-05
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Granted: 2001-12-11
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Expires: 2019-04-05
Abstract
Abstract According to the invention, a cleaning method and a cleaning apparatus are disclosed for removing organic contaminants on a surface of a color filter without damaging pigment portions of the color filter. The cleaning is performed by using a source of ultraviolet radiation having a wavelength equal to or less than 180 nm (most preferably a wavelength of 172 nm), which does not transmit through the transparent electrodes (e.g., ITO film, IZO film or the like), thereby protecting the pigment portions of the color filter. As a result, the glass substrate can be cleaned by the ultraviolet radiation without discoloring the pigment portions of the color filter and the cleaning effect is increased because the exposure time to the ultraviolet radiation is not limited.
Inventors
- 👤 Kazuo Terada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:07
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/0006; B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0057; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1335; G02F1/133509; G02F1/133514; G02F1/133516
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
54 words
A method for cleaning a glass substrate with a color filter including a pattern of transparent electrode formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said transparent electrode.
Claim 2
Independent Claim
54 words
A method for cleaning a glass substrate with a color filter including a pattern of transparent electrode formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said transparent electrode.
Claim 3
Dependent Claim
16 words
The method according to claim 1 wherein, said ultraviolet radiation has a wavelength of 172 nm.
Claim 4
Dependent Claim
19 words
The method according to claim 1 , wherein said ultraviolet radiation has a wavelength of 180 nm or less.
Claim 5
Independent Claim
63 words
A method for cleaning a glass substrate with a color filter including a pattern of an alloy of indium tin oxide film formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said alloy of indium tin oxide film.
Claim 6
Independent Claim
63 words
A method for cleaning a glass substrate with a color filter including a pattern of an alloy of indium tin oxide film formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said alloy of indium tin oxide film.
Claim 7
Dependent Claim
17 words
The method according to claim 4 , wherein said ultraviolet radiation has a wavelength of 172 nm.
Claim 8
Dependent Claim
19 words
The method according to claim 4 , wherein said ultraviolet radiation has a wavelength of 180 nm or less.
Claim 9
Independent Claim
63 words
A method for cleaning a glass substrate with a color filter including a pattern of an alloy of indium zinc oxide film formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said alloy of indium zinc oxide film.
Claim 10
Independent Claim
63 words
A method for cleaning a glass substrate with a color filter including a pattern of an alloy of indium zinc oxide film formed on a pigment pattern, which comprises exposing said glass substrate to ultraviolet radiation so as to remove an organic contaminant on said glass substrate, said ultraviolet radiation having a wavelength not transmitting through said alloy of indium zinc oxide film.
Claim 11
Dependent Claim
17 words
The method according to claim 7 , wherein said ultraviolet radiation has a wavelength of 172 nm.
Claim 12
Dependent Claim
19 words
The method according to claim 7 , wherein said ultraviole radiation has a wavelength of 180 nm or less.
Claim 13
Independent Claim
77 words
An apparatus for cleaning a glass substrate with a color filter including a pattern of transparent electrode formed on a pigment pattern, comprising: a chamber for maintaining a predetermined atmosphere; a supporting structure for holding said glass substrate thereon; a light source for emitting ultraviolet radiation having a wavelength not transmitting through said transparent electrode; and an ozone filter and an ozone sensor for disposing of ozone which is generated during the emission of said ultraviolet radiation.
Claim 14
Independent Claim
77 words
An apparatus for cleaning a glass substrate with a color filter including a pattern of transparent electrode formed on a pigment pattern, comprising: a chamber for maintaining a predetermined atmosphere; a supporting structure for holding said glass substrate thereon; a light source for emitting ultraviolet radiation having a wavelength not transmitting through said transparent electrode; and an ozone filter and an ozone sensor for disposing of ozone which is generated during the emission of said ultraviolet radiation.
Claim 15
Dependent Claim
20 words
The apparatus according to claim 10 , wherein said light source emits ultraviolet radiation having a wavelength of 172 nm.
Claim 16
Dependent Claim
22 words
The apparatus according to claim 10 , wherein said light source emits ultraviolet radiation having a wavelength of 180 nm or less.
Claim 17
Dependent Claim
40 words
The apparatus according to claim 10 , wherein said supporting structure includes a horizontal movement mechanism for positioning said glass substrate in a horizontal direction and an up/down mechanism for alligning to expose said glass substrate to said ultraviolet radiation.
Claim 18
Dependent Claim
38 words
The apparatus according to claim 10 , wherein said apparatus further includes a carry in conveyer for carrying said glass substrate into said chamber and a carry out conveyer for carrying said glass substrate out of said chamber.
Claim 19
Independent Claim
59 words
An apparatus for cleaning a substrate, comprising; a chamber for maintaining a predetermined atmosphere; a supporting structure for holding said substrate thereon; a light source for emitting ultraviolet radiation having a wavelength of 180 nm or less; and an ozone filter and an ozone sensor for disposing of ozone which is generated during the emission of said ultraviolet radiation.
Claim 20
Independent Claim
59 words
An apparatus for cleaning a substrate, comprising; a chamber for maintaining a predetermined atmosphere; a supporting structure for holding said substrate thereon; a light source for emitting ultraviolet radiation having a wavelength of 180 nm or less; and an ozone filter and an ozone sensor for disposing of ozone which is generated during the emission of said ultraviolet radiation.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2004-12-10 | 2005-06-11 | 2005-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-12-10 | 2009-06-11 | 2009-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-12-10 | 2013-06-11 | 2013-12-11 | $7700.00 | Window Closed / Lapsed |