Patent US6416577B1 successfully refreshed from Google Patents.
US6416577B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for coating inner surfaces of equipment
Assignee: ASM International NV
•
Filing: 1998-12-09
•
Granted: 2002-07-09
•
Expires: 2018-12-09
Abstract
Abstract This invention concerns a method for coating the inner surfaces of equipment with a layer of material. According to the invention, of the inner space of the equipment limited by the surfaces to be coated is at least partly closed, to said inner space pulses of at least two different reagents in gaseous phase are fed alternately and repeatedly and a layer of material is grown on the surfaces of the inner space according to ALE-technique by exposing the surfaces to the alternating surface reactions of the reagents. With the aid of the invention it is possible to coat pipes and tanks of desired size without using a separate growing equipment.
Inventors
- 👤 Tuomo Suntoloa
- 👤 Markku Leskelä
- 👤 Mikko Ritala
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:00
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/04; C23C16/045; C23C16/46; C30; C30B; C30B35/00; Y; Y10; Y10T; Y10T117/00; Y10T117/10
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
83 words
A method for coating the inner surfaces of equipment with a layer of material using atomic layer deposition, said method comprising: closing at least a part of an inner space limited by the inner surfaces of the equipment; alternately and repeatedly feeding vapor phase pulses of at least two different reagents into said inner space; and growing a layer of material on the inner surfaces of the equipment by exposing the inner surfaces of the equipment to alternating surface reactions of the reagents.
Claim 2
Independent Claim
83 words
A method for coating the inner surfaces of equipment with a layer of material using atomic layer deposition, said method comprising: closing at least a part of an inner space limited by the inner surfaces of the equipment; alternately and repeatedly feeding vapor phase pulses of at least two different reagents into said inner space; and growing a layer of material on the inner surfaces of the equipment by exposing the inner surfaces of the equipment to alternating surface reactions of the reagents.
Claim 3
Dependent Claim
163 words
The method according to claim 1 , further comprising the following steps in sequence: a. emptying the space limited by the inner surfaces from gases with a pump, wherein said inner surfaces have surface bond sites; b. bringing said inner surfaces to a temperature required for the surface reactions used in the coating process; c. feeding a first reagent (A) to the space limited by the inner surfaces in at least an amount that is sufficient for occupying the surface bond sites on said inner surfaces; d. removing any excess first reagent (A) from said space; e. feeding a second reagent (B) to the space limited by the inner surfaces in at least an amount that is sufficient for occupying the surface bond sites created by the first reagent (A) on said inner surfaces; f. removing any excess second reagent (B) from said inner space; and g. repeating steps c. to f. in sequence in cycles until the layer reaches a desired thickness.
Claim 4
Dependent Claim
36 words
The method according to claim 2 , wherein the inner surfaces to be coated are brought to the temperature required for the surface reactions used in the coating process with space limited by the inner surfaces.
Claim 5
Dependent Claim
51 words
The method according to claim 2 , wherein the inner surfaces to be coated are brought to the temperature required for the surface reactions used in the coating process by feeding heat-transfer liquid or gas into the space limited by the inner surfaces to be coated before steps a. to f.
Claim 6
Dependent Claim
35 words
The method according to claim 4 , wherein said heat-transfer liquid or gas is fed more than once to the space limited by the inner surfaces to be coated after the cycle c. to f.
Claim 7
Dependent Claim
38 words
The method according to claim 2 , further comprising flowing protective gas into the space limited by the inner surfaces in steps d and f, whereby the removal of excess amounts of reagents (A,B) is made more efficient.
Claim 8
Dependent Claim
48 words
The method according to claim 2 , further comprising feeding at least one other reagent in addition to said first reagent and said second reagent to the space limited by the surfaces to be coated to facilitate the surface reactions caused by the first and the second reagent.
Claim 9
Dependent Claim
30 words
The method according to claim 1 , wherein said at least a part of the inner space limited by the inner surfaces is closed with the aid of valve gears.
Claim 10
Dependent Claim
21 words
The method according to claim 8 , wherein at least one of the valve gears is used in feeding the reagents.
Claim 11
Dependent Claim
19 words
The method according to claim 8 , wherein at least one valve gear is used for removing excess gas.
Claim 12
Dependent Claim
16 words
The method according to claim 1 , wherein the inner surface of process equipment is coated.
Claim 13
Dependent Claim
29 words
The method according to claim 1 , wherein coating improves at least one of the stress, corrosion endurance optical, electrical and friction properties of the inner surface of equipment.
Claim 14
Dependent Claim
35 words
The method according to claim 1 , wherein at least one layer is selected from the group consisting of an oxide layer, a nitride layer, and a chalcogenide layer is grown on the inner surface.
Claim 15
Dependent Claim
37 words
The method according to claim 1 , wherein said reagents are selected from the group consisting of the inorganic compounds of metals, metalorganic compounds, pure metals, water, hydrogen peroxide, oxygen, ozone, alcohols, ammonia, and organic nitrogen compounds.
Claim 16
Dependent Claim
20 words
The method according to claim 9 , wherein at least two sources of reagent are connected to said valve gear.
Claim 17
Dependent Claim
16 words
The method according to claim 11 , wherein said process equipment is piping or a tank.
Claim 18
Independent Claim
127 words
A method for coating inner surfaces of a workpiece using atomic layer deposition, comprising a plurality of cycles, wherein each cycle comprises: providing a workpiece defining an enclosed space having an inlet and an outlet therein; providing a first reagent to the enclosed space via the inlet; forming no more than a monolayer by providing the first reagent on the workpiece; removing any excess amount of the first reagent from the enclosed space via the outlet; providing a second reagent to the enclosed space via the inlet after removing any excess amount of the first reagent; allowing the second reagent to react or absorb with the monolayer from the first reagent; and removing any excess amount of the second reagent from the enclosed space via the outlet.
Claim 19
Independent Claim
127 words
A method for coating inner surfaces of a workpiece using atomic layer deposition, comprising a plurality of cycles, wherein each cycle comprises: providing a workpiece defining an enclosed space having an inlet and an outlet therein; providing a first reagent to the enclosed space via the inlet; forming no more than a monolayer by providing the first reagent on the workpiece; removing any excess amount of the first reagent from the enclosed space via the outlet; providing a second reagent to the enclosed space via the inlet after removing any excess amount of the first reagent; allowing the second reagent to react or absorb with the monolayer from the first reagent; and removing any excess amount of the second reagent from the enclosed space via the outlet.
Claim 20
Dependent Claim
12 words
The method of claim 17 , wherein the workpiece comprises a conduit.
Claim 21
Dependent Claim
12 words
The method of claim 17 , wherein the workpiece comprises a container.
Claim 22
Dependent Claim
19 words
The method of claim 17 , further comprising closing off flow through the outlet while providing the first reagent.
Claim 23
Dependent Claim
30 words
The method of claim 17 , wherein the inlet and outlet define an open flow path through the enclosed space during provision of the first reagent and the second reagent.
Claim 24
Dependent Claim
40 words
The method of claim 17 , wherein at least a portion of the first reagent adsorbs upon the inner surface of the workpiece, and the second reagent reacts with the portion of the first reagent adsorbed upon the inner surface.
Claim 25
Dependent Claim
12 words
The method of claim 17 , further comprising externally heating the workpiece.
Claim 26
Dependent Claim
104 words
A deposition apparatus for coating only interior surfaces of a workpiece using atomic layer deposition, comprising: a first collar configured to seal one opening of the workpiece; a feed line communicating through the first collar, the feed line communicating with a gaseous source of deposition reagents, a second feed line communicating with a second gaseous source of deposition reagents, the first and second feed lines configured such that the first and second gaseous sources can be alternately and exclusively fed into the work piece; a second collar configured to seal another opening of the workpiece; and an exhaust line communicating through the second collar.
Claim 27
Dependent Claim
104 words
A deposition apparatus for coating only interior surfaces of a workpiece using atomic layer deposition, comprising: a first collar configured to seal one opening of the workpiece; a feed line communicating through the first collar, the feed line communicating with a gaseous source of deposition reagents, a second feed line communicating with a second gaseous source of deposition reagents, the first and second feed lines configured such that the first and second gaseous sources can be alternately and exclusively fed into the work piece; a second collar configured to seal another opening of the workpiece; and an exhaust line communicating through the second collar.
Claim 28
Dependent Claim
16 words
The apparatus of claim 24 , further comprising a heat source for externally heating the workpiece.
Claim 29
Dependent Claim
19 words
The apparatus of claim 24 , further comprising a valve along the exhaust line for selectively closing exhaust flow.
Claim 30
Dependent Claim
20 words
The apparatus of claim 24 , further comprising a second feed line communicating a second gaseous source of deposition reactants.
Claim 31
Dependent Claim
18 words
The apparatus of claim 24 , wherein the exhaust line extends from the second collar to a pump.
References Cited (Backward Citations)
US4145456A
Cited
US4058430A
Cited
EP0015390A1
Cited
US4389973A
Cited
US4975252A
Cited
US4636402A
Cited
US4879140A
Cited
US5690745A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-07-08 | 2006-01-07 | 2006-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-08 | 2010-01-07 | 2010-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-08 | 2014-01-07 | 2014-07-09 | $7700.00 | Window Closed / Lapsed |