Enhancement of photoresist plasma etch resistance via electron beam surface cure

Claim 2

A process for producing a photographic image which comprises: (a) imagewise exposing a photographic composition layer on a substrate to sufficient activating energy to produce a latent pattern on the photographic composition layer; which photographic composition layer has a full depth extending from a top surface of the layer to the substrate; (b) developing the photographic composition layer to thereby remove the nonimage areas thereof and leaving the image areas thereof in the form of a pattern on the substrate; (c) overall irradiating the image areas of the layer to electron beam radiation for substantially the full depth of the layer; (d) overall irradiating the image areas of the layer to electron beam radiation one or more additional times at a depth extending from the top surface of the layer to a depth less than the full depth of the layer; and (e) etching a surface of the substrate under the removed nonimage areas of the photographic composition layer in the absence of any additional development of the photographic composition layer after step (d) but before etching.

Claim 3

The process of claim 1 wherein each additional overall irradiating (d) is conducted at a depth of from about 10% to about 50% of the full depth of the layer extending from the top surface of the layer.

Claim 4

The process of claim 1 wherein each additional overall irradiating (d) is conducted at a depth of from about 25% to about 50% of the full depth of the layer extending from the top surface of the layer.

Claim 5

The process of claim 1 wherein each additional overall irradiating (d) is conducted at a depth of from about 25% to about 35% of the full depth of the layer extending from the top surface of the layer.

Claim 6

The process of claim 1 wherein three additional overall irradiating steps (d) are conducted at a depth of about 10%, about 25% and about 50% of the full depth of the layer extending from the top surface of the layer.

Claim 7

The process of claim 1 wherein the photographic composition comprises a photoresist composition.

Claim 8

The process of claim 1 wherein the imagewise exposing is conducted with activating energy at a wavelength of about 157 nm, about 193 nm, about 248 nm, about 365 nm or about 435 nm.

Claim 9

The process of claim 1 wherein the photosensitive composition comprises (i) at least one water insoluble, acid decomposable polymer, wherein said polymer is present in the photosensitive composition in an amount sufficient to form a uniform film of the composition components when it is coated on a substrate and dried; (ii) at least one photosensitive compound capable of generating an acid upon exposure to sufficient activating energy, said photosensitive compound being present in an amount sufficient to substantially uniformly photosensitive the photosensitive composition.

Claim 10

The process of claim 8 wherein the polymer is substantially transparent to ultraviolet radiation at a wavelength of about 193 nm; the photosensitive compound is capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 193 nm and the imagewise exposing is conducted at a wavelength of about 193 nm.

Claim 11

The process of claim 8 wherein the polymer is substantially transparent to ultraviolet radiation at a wavelength of about 157 nm, about 248 nm, about 365 nm or about 435 nm; the photosensitive compound is capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 157 nm, about 248 nm, about 365 nm or about 435 nm and the imagewise exposing is conducted at a wavelength of about 157 nm, about 248 nm, about 365 nm or about 435 nm.

Claim 12

The process of claim 8 wherein the polymer comprises a cyclic olefin, an acrylate, a methacrylate, an acrylate with a pendant alicyclic group, a norbornene containing polymer, an alicyclic polymer or combinations thereof.

Claim 13

The process of claim 8 wherein the polymer comprises a polyalkylacrylate or a polyalkylmethacrylate.

Claim 14

The process of claim 8 wherein the photosensitive compound comprises a sulfonium, iodonium or diazonium compound.

Claim 15

The process of claim 1 wherein the photosensitive composition comprises a combination of an o-quinone diazide and at least one water insoluble, aqueous alkaline soluble or swellable binder resin.

Claim 16

The process of claim 1 wherein the photosensitive composition comprises a combination of an o-quinone diazide and at least one novolak, polyhydroxystyrene or polyvinylphenol containing binder resin.

Claim 17

The process of claim 1 wherein the substrate is selected from the group consisting of silicon, aluminum, lithium niobate, polymeric resins, silicon dioxide, doped silicon dioxide, gallium arsenide, Group III/V compounds, oxides, silicon nitride, titanium, titanium nitride, tantalum, tantalum nitride, copper, polysilicon, ceramics, aluminum/copper mixtures and combinations thereof.

Claim 18

The process of claim 1 wherein each electron beam irradiating is conducted with a uniform, large-area, overall electron beam exposure source which simultaneously exposes substantially all of the image areas of the photosensitive composition simultaneously.

Claim 19

The process of claim 1 wherein each electron beam irradiating is conducted with a uniform large-area electron beam source which covers an exposure area of from about 4 square inches to about 256 square inches simultaneously.

Claim 20

The process of claim 1 wherein each electron beam irradiating is conducted with a source which generates an electron beam energy level ranging from about 0.5 to about 30 KeV.

Claim 21

The process of claim 1 wherein each electron beam irradiating is from a source which generates an electron dose ranging from about 1 to about 500,000 μC/cm 2 .

Claim 22

The process of claim 1 wherein each electron beam irradiating is conducted from a source which generates an electron beam current of from about 1 to about 150 mA.

Claim 23

The process of claim 1 wherein each electron beam irradiating is conducted while heating the substrate to a temperature of from about 20° C. to about 450° C.

Claim 24

The process of claim 1 wherein each electron beam irradiating is conducted in a gas selected from the group consisting of nitrogen, oxygen, hydrogen, argon, xenon, helium, ammonia, silane, a blend of hydrogen and nitrogen, ammonia and mixtures thereof.

Claim 25

The process of claim 1 wherein each electron beam irradiating is conducted while the substrate is under a vacuum maintained in the range of from about 10 −5 to about 10 2 torr.

Claim 26

The process of claim 1 further comprising the step of heating the imagewise exposed photosensitive composition prior to developing.

Claim 27

The process of claim 1 wherein the developing is conducted with an aqueous alkaline solution.

Claim 28

A process for producing a microelectronic device which comprises (a) coating and drying a photoresist composition layer onto a substrate; (b) imagewise exposing the photoresist composition layer to sufficient activating energy to produce a latent pattern on the photoresist composition layer, which photoresist composition layer has a full depth extending from a top surface of the layer to the substrate; (c) developing the photoresist composition layer to thereby remove the nonimage areas thereof and leaving the image areas thereof in the form of a pattern; (d) overall irradiating the image areas of the layer to electron beam radiation for substantially the full depth of the layer; and (e) overall irradiating the image areas of the layer to electron beam radiation one or more additional times at a depth extending from the top surface of the layer to a depth less than the full depth of the layer; and (e) etching a surface of the substrate under the removed nonimage areas of the photographic composition layer in the absence of any additional development of the photographic composition layer after step (d) but before etching.

Claim 29

A process for producing a microelectronic device which comprises (a) coating and drying a photoresist composition layer onto a substrate; (b) imagewise exposing the photoresist composition layer to sufficient activating energy to produce a latent pattern on the photoresist composition layer, which photoresist composition layer has a full depth extending from a top surface of the layer to the substrate; (c) developing the photoresist composition layer to thereby remove the nonimage areas thereof and leaving the image areas thereof in the form of a pattern; (d) overall irradiating the image areas of the layer to electron beam radiation for substantially the full depth of the layer; and (e) overall irradiating the image areas of the layer to electron beam radiation one or more additional times at a depth extending from the top surface of the layer to a depth less than the full depth of the layer; and (e) etching a surface of the substrate under the removed nonimage areas of the photographic composition layer in the absence of any additional development of the photographic composition layer after step (d) but before etching.

Claim 30

A process for producing a photographic image which comprises: (a) imagewise exposing a photographic composition layer on a substrate to sufficient activating energy to produce a latent pattern on the photographic composition layer; which photographic composition layer has a full depth extending from a top surface of the layer to the substrate; (b) developing the photographic composition layer to thereby remove the nonimage areas thereof and leaving the image areas thereof in the form of a pattern on the substrate; (c) overall irradiating the image areas of the layer to electron beam radiation for substantially the full depth of the layer; (d) overall irradiating the image areas of the layer to electron beam radiation through the surface of the layer to the depth of an intermediate plane which is less than the full thickness of the layer; (e) overall irradiating the image areas of the layer to electron beam radiation one or more additional times through the surface of the layer to the depth of another plane whose depth is less than that of the prior plane; and (f) etching a surface of the substrate under the removed nonimage areas of the photographic composition layer in the absence of any additional development of the photographic composition layer after step (e) but before etching.

Claim 31

A process for producing a photographic image which comprises: (a) imagewise exposing a photographic composition layer on a substrate to sufficient activating energy to produce a latent pattern on the photographic composition layer; which photographic composition layer has a full depth extending from a top surface of the layer to the substrate; (b) developing the photographic composition layer to thereby remove the nonimage areas thereof and leaving the image areas thereof in the form of a pattern on the substrate; (c) overall irradiating the image areas of the layer to electron beam radiation for substantially the full depth of the layer; (d) overall irradiating the image areas of the layer to electron beam radiation through the surface of the layer to the depth of an intermediate plane which is less than the full thickness of the layer; (e) overall irradiating the image areas of the layer to electron beam radiation one or more additional times through the surface of the layer to the depth of another plane whose depth is less than that of the prior plane; and (f) etching a surface of the substrate under the removed nonimage areas of the photographic composition layer in the absence of any additional development of the photographic composition layer after step (e) but before etching.