Photomask and exposure method using a photomask

Claim 2

A photomask comprising a desired main pattern to be transferred, and a plurality of auxiliary patterns configured to produce an interference effect with said main pattern by diffraction, wherein said plurality of auxiliary patterns are constituted by two or more patterns groups which have mutually different pattern sizes and which cause light that passes through respective ones of said auxiliary patterns to have mutually different phases mutually interfering to weaken light passing one of the pattern groups on an image plane.

Claim 3

The photomask according to claim 1 , wherein the photomask is used in exposure to which the four-point illumination method is applied.

Claim 4

The photomask according to claim 1 , wherein the photomask is used in exposure to which a ring illumination method is applied.

Claim 5

The photomask according to claim 1 , wherein the photomask is a phase-shift photomask.

Claim 6

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern configured to enhance contrast of light, which passes through said main pattern, on an image plane by diffraction; and a second auxiliary pattern, which has a size not larger than that of said first auxiliary pattern, configured to weaken contrast of light, which passes through said first auxiliary pattern, on the image plane by diffraction.

Claim 7

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern configured to enhance contrast of light, which passes through said main pattern, on an image plane by diffraction; and a second auxiliary pattern, which has a size not larger than that of said first auxiliary pattern, configured to weaken contrast of light, which passes through said first auxiliary pattern, on the image plane by diffraction.

Claim 8

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern, which has a phase on an image plane that is substantially opposite that of said main pattern, configured to enhance contrast of said main pattern on the image plane by diffraction; and a second auxiliary pattern, which has a size not larger than that of said first auxiliary pattern and substantially the same phase on the image plane as that of said first auxiliary pattern, configured to weaken contrast of said first auxiliary pattern on the image plane.

Claim 9

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern, which has a phase on an image plane that is substantially opposite that of said main pattern, configured to enhance contrast of said main pattern on the image plane by diffraction; and a second auxiliary pattern, which has a size not larger than that of said first auxiliary pattern and substantially the same phase on the image plane as that of said first auxiliary pattern, configured to weaken contrast of said first auxiliary pattern on the image plane.

Claim 10

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern disposed on at least one side of said main pattern at such a spacing that contrast of light, which passes through said main pattern, is enhanced on an image plane; and a second auxiliary pattern disposed on at least one side of said first auxiliary pattern at such a spacing that contrast of light, which passes through said first auxiliary pattern, is weakened on the image plane by diffraction.

Claim 11

A photomask comprising: a desired main pattern to be transferred; a first auxiliary pattern disposed on at least one side of said main pattern at such a spacing that contrast of light, which passes through said main pattern, is enhanced on an image plane; and a second auxiliary pattern disposed on at least one side of said first auxiliary pattern at such a spacing that contrast of light, which passes through said first auxiliary pattern, is weakened on the image plane by diffraction.

Claim 12

The photomask according to claim 7 , wherein said main pattern, said first auxiliary pattern(s) and said second auxiliary pattern(s) are arrayed in such a positional relationship that centers of the respective patterns are connected by a straight line.

Claim 13

The photomask according to claim 7 , wherein said main pattern, said first auxiliary pattern(s) and said second auxiliary pattern(s) are arrayed in such a manner that a group of straight lines composed of one or a plurality of straight lines connecting centers of respective ones of said main pattern and said first auxiliary pattern(s) and one or a plurality of straight lines connecting centers of respective ones of said first auxiliary pattern(s) and said second auxiliary pattern(s) will include at least mutually perpendicularly intersecting straight lines.

Claim 14

A photomask used in exposure to which is applied a oblique incidence illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: a desired main pattern to be transferred; a first auxiliary pattern which provides the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and a second auxiliary pattern which provides the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 15

A photomask used in exposure to which is applied a oblique incidence illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: a desired main pattern to be transferred; a first auxiliary pattern which provides the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and a second auxiliary pattern which provides the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 16

The photomask according to claim 10 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said main pattern.

Claim 17

The photomask according to claim 10 , wherein said first auxiliary pattern and said second auxiliary pattern are shaped such that the sizes thereof are no less than approximately ⅘ the size of said main pattern.

Claim 18

The photomask according to claim 10 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said pattern to be transferred, and the size of said second auxiliary pattern is smaller than that of said first auxiliary pattern.

Claim 19

The photomask according to claim 10 , wherein the photomask is used in exposure to which a four-point illumination method is applied.

Claim 20

The photomask according to claim 10 , wherein said optical path difference is produced by a difference in level formed by etching said transparent substrate.

Claim 21

The photomask according to claim 10 , wherein said optical path difference is produced by a transparent film formed on said transparent substrate.

Claim 22

A multiple-stage focusing exposure method for performing exposure a plurality of times by achieving focusing on at least upper and lower levels of a difference in level when an image of exposing light is formed on a resist film that has been applied to a semiconductor substrate having the difference in level, wherein exposure is performed using the photomask described in claim 10 .

Claim 23

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: four first auxiliary patterns disposed on a mask plane above and below and to the left and right of and a predetermined distance away from a desired main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and four second auxiliary patterns disposed at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said desired main pattern on the mask plane, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 24

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: four first auxiliary patterns disposed on a mask plane above and below and to the left and right of and a predetermined distance away from a desired main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and four second auxiliary patterns disposed at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said desired main pattern on the mask plane, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 25

The photomask according to claim 18 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said main pattern.

Claim 26

The photomask according to claim 18 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said pattern to be transferred, and the size of said second auxiliary pattern is smaller than that of said first auxiliary pattern.

Claim 27

The photomask according to claim 18 , wherein the photomask is used in exposure to which a four-point illumination method is applied.

Claim 28

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals; (b) four first auxiliary patterns are disposed on a mask plane above and below and to the left and right of and a predetermined distance away from one main pattern among said plurality of main patterns, thereby providing the transparent substrate with a surface flush with said one main pattern or with an optical path difference corresponding to a phase difference, with respect to said one main pattern, that is K times 360° where K is an integer that does not include zero; four second auxiliary patterns being disposed on the mask plane at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said one main pattern, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; said one main pattern, said four first auxiliary patterns and said four second auxiliary patterns constructing a first group; (c) another main pattern neighboring said one main pattern has a phase that is opposite that of said one main pattern; four second auxiliary patterns being disposed above and below and to the left and right of and a predetermined distance away from said other main pattern, thereby providing the transparent substrate with a surface flush with said other main pattern or with an optical path difference corresponding to a phase difference, with respect to said other main pattern, that is K times 360° where K is an integer that does not include zero; four first auxiliary patterns being disposed on the mask plane at positions corresponding to any of the sides above and below and to the left and right of said second auxiliary patterns at angles of 45° with respect to said other main pattern, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said second auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; said other main pattern, said four first auxiliary patterns and said four second auxiliary patterns constructing a second group; and (d) said first group and said second group are arrayed repeatedly so as to establish a relationship in which the auxiliary patterns constituting said first group are opposite in phase to the corresponding auxiliary patterns constituting said second group.

Claim 29

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals; (b) four first auxiliary patterns are disposed on a mask plane above and below and to the left and right of and a predetermined distance away from one main pattern among said plurality of main patterns, thereby providing the transparent substrate with a surface flush with said one main pattern or with an optical path difference corresponding to a phase difference, with respect to said one main pattern, that is K times 360° where K is an integer that does not include zero; four second auxiliary patterns being disposed on the mask plane at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said one main pattern, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; said one main pattern, said four first auxiliary patterns and said four second auxiliary patterns constructing a first group; (c) another main pattern neighboring said one main pattern has a phase that is opposite that of said one main pattern; four second auxiliary patterns being disposed above and below and to the left and right of and a predetermined distance away from said other main pattern, thereby providing the transparent substrate with a surface flush with said other main pattern or with an optical path difference corresponding to a phase difference, with respect to said other main pattern, that is K times 360° where K is an integer that does not include zero; four first auxiliary patterns being disposed on the mask plane at positions corresponding to any of the sides above and below and to the left and right of said second auxiliary patterns at angles of 45° with respect to said other main pattern, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said second auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; said other main pattern, said four first auxiliary patterns and said four second auxiliary patterns constructing a second group; and (d) said first group and said second group are arrayed repeatedly so as to establish a relationship in which the auxiliary patterns constituting said first group are opposite in phase to the corresponding auxiliary patterns constituting said second group.

Claim 30

The photomask according to claim 22 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said main pattern.

Claim 31

The photomask according to claim 22 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said pattern to be transferred, and the size of said second auxiliary pattern is smaller than that of said first auxiliary pattern.

Claim 32

The photomask according to claim 22 , wherein the photomask is used in exposure to which a four-point illumination method is applied.

Claim 33

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals in checkerboard fashion; (b) a first auxiliary pattern is disposed on a mask plane between main patterns among said plurality of main patterns that are mutually adjacent above, below and to the left and right, thereby providing the transparent substrate with a surface flush with said main patterns or with an optical path difference corresponding to a phase difference, with respect to said main patterns, that is K times 360° where K is an integer that does not include zero; and (c) second auxiliary patterns are disposed on the mask plane between main patterns among said plurality of main patterns that are mutually adjacent at angles of 45°, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said main patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 34

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals in checkerboard fashion; (b) a first auxiliary pattern is disposed on a mask plane between main patterns among said plurality of main patterns that are mutually adjacent above, below and to the left and right, thereby providing the transparent substrate with a surface flush with said main patterns or with an optical path difference corresponding to a phase difference, with respect to said main patterns, that is K times 360° where K is an integer that does not include zero; and (c) second auxiliary patterns are disposed on the mask plane between main patterns among said plurality of main patterns that are mutually adjacent at angles of 45°, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said main patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 35

The photomask according to claim 24 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said main pattern.

Claim 36

The photomask according to claim 26 , wherein said first auxiliary pattern is shaped such that the size thereof is no less than approximately ⅘ the size of said pattern to be transferred, and the size of said second auxiliary pattern is smaller than that of said first auxiliary pattern.

Claim 37

The photomask according to claim 26 , wherein the photomask is used in exposure to which a four-point illumination method is applied.

Claim 38

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals; (b) four first auxiliary patterns are disposed on a mask plane above and below and to the left and right of and a predetermined distance away from one main pattern among said plurality of main patterns, thereby providing the transparent substrate with a surface flush with said one main pattern or with an optical path difference corresponding to a phase difference, with respect to said one main pattern, that is K times 360° where K is an integer that does not include zero; said one main pattern and said four first auxiliary patterns constructing a first group; (c) another main pattern neighboring said one main pattern has a phase that is opposite that of said one main pattern; four second auxiliary patterns being disposed above and below and to the left and right of and a predetermined distance away from said other main pattern, thereby providing the transparent substrate with a surface flush with said other main pattern or with an optical path difference corresponding to a phase difference, with respect to said other main pattern, that is K times 360° where K is an integer that does not include zero; said other main pattern and said four second auxiliary patterns constructing a second group; and (d) said first group and said second group are arrayed repeatedly in such a manner that said first auxiliary patterns constructing said first group and said second auxiliary patterns constructing said second group neighbor each other above, below and to the left and right and such that auxiliary patterns constructing the same group overlap each other.

Claim 39

A photomask used in exposure to which is applied a modified illumination method for inverting phase of light that passes through mutually adjacent patterns formed on a transparent substrate, wherein: (a) the photomask has a plurality of main patterns to be transferred, said main patterns repeating at prescribed intervals; (b) four first auxiliary patterns are disposed on a mask plane above and below and to the left and right of and a predetermined distance away from one main pattern among said plurality of main patterns, thereby providing the transparent substrate with a surface flush with said one main pattern or with an optical path difference corresponding to a phase difference, with respect to said one main pattern, that is K times 360° where K is an integer that does not include zero; said one main pattern and said four first auxiliary patterns constructing a first group; (c) another main pattern neighboring said one main pattern has a phase that is opposite that of said one main pattern; four second auxiliary patterns being disposed above and below and to the left and right of and a predetermined distance away from said other main pattern, thereby providing the transparent substrate with a surface flush with said other main pattern or with an optical path difference corresponding to a phase difference, with respect to said other main pattern, that is K times 360° where K is an integer that does not include zero; said other main pattern and said four second auxiliary patterns constructing a second group; and (d) said first group and said second group are arrayed repeatedly in such a manner that said first auxiliary patterns constructing said first group and said second auxiliary patterns constructing said second group neighbor each other above, below and to the left and right and such that auxiliary patterns constructing the same group overlap each other.

Claim 40

The photomask according to claim 30 , wherein said four first auxiliary patterns are configured such that upper and lower patterns have a different size from left and right patterns; and said four second auxiliary patterns are configured such that upper and lower patterns have a different size from left and right patterns.

Claim 41

The photomask according to claim 31 , wherein among said first auxiliary patterns, the patterns situated on the mask plane above and below said main pattern have a shape that is smaller than that of the patterns situated on the mask plane to the left and right of said main pattern; and among said second auxiliary patterns, the patterns situated on the mask plane above and below said main pattern have a shape that is smaller than that of the patterns situated on the mask plane to the left and right of said main pattern.

Claim 42

The photomask according to claim 30 , wherein said first auxiliary pattern and said second auxiliary pattern are shaped such that the sizes thereof are no less than approximately ⅘ the size of said main pattern.

Claim 43

A photomask used in exposure to which is applied a modified illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: (a) four first auxiliary patterns disposed on a mask plane above and below and to the left and right of a desired main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; (b) four second auxiliary patterns disposed at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said desired main pattern on the mask plane, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; and (c) auxiliary pattern repeatedly placed outwardly of said first and second auxiliary patterns in such a manner that neighboring auxiliary patterns have phases that are the opposite of each other.

Claim 44

A photomask used in exposure to which is applied a modified illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: (a) four first auxiliary patterns disposed on a mask plane above and below and to the left and right of a desired main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; (b) four second auxiliary patterns disposed at positions corresponding to any of the sides above and below and to the left and right of said first auxiliary patterns at angles of 45° with respect to said desired main pattern on the mask plane, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero; and (c) auxiliary pattern repeatedly placed outwardly of said first and second auxiliary patterns in such a manner that neighboring auxiliary patterns have phases that are the opposite of each other.

Claim 45

A photomask used in exposure to which is applied a modified illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: (a) first linear auxiliary patterns disposed on a mask plane on both sides of and a predetermined distance away from a desired linear main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and second linear auxiliary patterns disposed on the mask plane outwardly of and a predetermined distance away from said first linear auxiliary patterns, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first linear auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 46

A photomask used in exposure to which is applied a modified illumination method for inverting the phase of light that passes through mutually adjacent patterns formed on a transparent substrate, comprising: (a) first linear auxiliary patterns disposed on a mask plane on both sides of and a predetermined distance away from a desired linear main pattern to be transferred, thereby providing the transparent substrate with a surface flush with said main pattern or with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is K times 360° where K is an integer that does not include zero; and second linear auxiliary patterns disposed on the mask plane outwardly of and a predetermined distance away from said first linear auxiliary patterns, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said first linear auxiliary patterns, that is (2L+1) times 180° where L is an integer inclusive of zero.

Claim 47

The photomask according to claim 35 , wherein said first linear auxiliary patterns have a width that is no less than approximately ⅘ the width of said pattern to be transferred.

Claim 48

The photomask according to claim 35 , wherein said first linear auxiliary patterns have a width that is no less than approximately ⅘ the width of said pattern to be transferred, and said second linear auxiliary patterns have a width that is smaller than the width of said first linearly arrayed auxiliary patterns.

Claim 49

The photomask according to claim 35 , wherein the photomask is used in exposure to which a two-point illumination method is applied.

Claim 50

A phase-shift photomask used in exposure that employs light perpendicularly incident on a transparent substrate, comprising: (a) first linear auxiliary pattern disposed on a mask plane on both sides of and a predetermined distance away from a desired linear main pattern to be transferred, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is (2L+1) times 180° where L is an integer inclusive of zero; and (b) second linear auxiliary patterns disposed on the mask plane outwardly of and a predetermined distance away from said first linear auxiliary patterns, thereby providing the transparent substrate with a surface flush with said first linear auxiliary patterns or with an optical path difference corresponding to a phase difference, with respect to said first linear auxiliary pattern, that is K times 360° where K is an integer that does not include zero.

Claim 51

A phase-shift photomask used in exposure that employs light perpendicularly incident on a transparent substrate, comprising: (a) first linear auxiliary pattern disposed on a mask plane on both sides of and a predetermined distance away from a desired linear main pattern to be transferred, thereby providing the transparent substrate with an optical path difference corresponding to a phase difference, with respect to said main pattern, that is (2L+1) times 180° where L is an integer inclusive of zero; and (b) second linear auxiliary patterns disposed on the mask plane outwardly of and a predetermined distance away from said first linear auxiliary patterns, thereby providing the transparent substrate with a surface flush with said first linear auxiliary patterns or with an optical path difference corresponding to a phase difference, with respect to said first linear auxiliary pattern, that is K times 360° where K is an integer that does not include zero.