US6355181B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for manufacturing a micromechanical device
Assignee: Surface Technology Systems Ltd
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Filing: 1999-03-16
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Granted: 2002-03-12
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Expires: 2019-03-16
Abstract
Abstract In the manufacture of a micromechanical device, a substrate, having a mask thereon, is etched using a flourine-containing etchant gas or vapour in the absence of a plasma through an opening in the mask to a desired depth to form a trench having a side wall and a base in the substrate. A layer of protecting substance is deposited on the exposed surfaces of the substrate and mask, and the protecting substance is then selectively removed from the base. The base is then etched using the fluorine-containing etchant.
Inventors
- 👤 Andrew Duncan McQuarrie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:36
CPC Classifications
B; B01; B01J; B01J19/00; B01J19/08; B01J19/087; B01J19/088; B01J12/00; B01J12/002; B01J12/007; B01J19/24; B01J19/2445; B01J19/245; B01J7/00; B81; B81C; B81C1/00; B81C1/00436; B81C1/005; B81C1/00515; C; C01; C01B; C01B7/00; C01B7/24; C07; C07C; C07C17/00; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P15/125; H; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P50/244; H10P50/60; H10P50/64; H10P50/642; H10P50/69; H10P50/691; H10P50/692; B01J2219/00; B01J2219/00002; B01J2219/00027; B01J2219/00038; B01J2219/0004; B01J2219/00049; B01J2219/00051; B01J2219/00054; B01J2219/00056; B01J2219/00058; B01J2219/00162; B01J2219/08; B01J2219/0803; B01J2219/0805; B01J2219/0807; B01J2219/0809; B01J2219/0837; B01J2219/0841; B01J2219/0869; B01J2219/0871; B01J2219/0873; B01J2219/0881; B01J2219/0883; B01J2219/0894; B81C2201/00; B81C2201/01; B81C2201/0101; B81C2201/0111; B81C2201/0112; B81C2201/0128; B81C2201/013; B81C2201/0132
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
88 words
A method of manufacturing a micromechanical device, comprising: (a) etching a substrate, having a mask thereon, using a flourine-containing etchant gas or vapour in the absence of a plasma through an opening in the mask to a desired depth to form a trench having a side wall and a base in the substrate; (b) depositing a layer of a protecting substance on the exposed surfaces of the substrate and mask; (c) selectively removing the protecting substance from the base; and (d) etching the base using a fluorine-containing etchant.
Claim 2
Independent Claim
88 words
A method of manufacturing a micromechanical device, comprising: (a) etching a substrate, having a mask thereon, using a flourine-containing etchant gas or vapour in the absence of a plasma through an opening in the mask to a desired depth to form a trench having a side wall and a base in the substrate; (b) depositing a layer of a protecting substance on the exposed surfaces of the substrate and mask; (c) selectively removing the protecting substance from the base; and (d) etching the base using a fluorine-containing etchant.
Claim 3
Dependent Claim
25 words
A method according to claim 1 , wherein the fluorine-containing etchant is selected from XeF 2 , F 2 , ClF 3 or mixtures thereof.
Claim 4
Dependent Claim
15 words
A method according to claim 1 , wherein the fluorine-containing etchant is XeF 2 .
Claim 5
Dependent Claim
19 words
A method according to claim 1 , further comprising the step of removing the mask and remaining protecting substance.
Claim 6
Dependent Claim
31 words
A method according to claim 1 , wherein the protecting substance is a fluorocarbon polymer of the general formula C Y F X , where X and Y are positive integers.
Claim 7
Dependent Claim
25 words
A method according to claim 5 , wherein the protecting substance is of the general formula n(CF 2 ), where n is a positive integer.
Claim 8
Dependent Claim
31 words
A method according to any one of the claim 1 , wherein the protecting substance is of the form C Y H X , where X and Y are positive integers.
Claim 9
Dependent Claim
25 words
A method according to claim 7 , wherein the protecting substance is of the general formula n(CH 2 ), wherein n is a positive integer.
Claim 10
Dependent Claim
11 words
A micromechanical device formed by the method of claim 1 .
Claim 11
Dependent Claim
17 words
A micromechanical device according to claim 9 , comprising a series of adjacent fingers separated by trenches.
Claim 12
Dependent Claim
14 words
A micromechanical device according to claim 10 , wherein the trenches are in communication.
Claim 13
Independent Claim
75 words
An apparatus for manufacturing a micromechanical device comprising: (a) means providing a flourine-containing etchant gas or vapour in the absence of a plasma for etching a substrate, having a mask thereon, to a desired depth; (b) means for depositing a layer of a protecting substance on the exposed surfaces of the substrate and mask; (c) means for selectively removing the protecting substance; and (d) means for providing the fluorine-containing etchant for etching the unprotected areas.
Claim 14
Independent Claim
75 words
An apparatus for manufacturing a micromechanical device comprising: (a) means providing a flourine-containing etchant gas or vapour in the absence of a plasma for etching a substrate, having a mask thereon, to a desired depth; (b) means for depositing a layer of a protecting substance on the exposed surfaces of the substrate and mask; (c) means for selectively removing the protecting substance; and (d) means for providing the fluorine-containing etchant for etching the unprotected areas.
Claim 15
Dependent Claim
19 words
An apparatus according to claim 12 , further comprising means for removing the mask and the remaining protecting substance.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-03-11 | 2005-09-10 | 2006-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-03-11 | 2009-09-10 | 2010-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-03-11 | 2013-09-10 | 2014-03-12 | $7700.00 | Window Closed / Lapsed |