Process and apparatus for etching semiconductor wafers

Claim 2

A process for etching a semiconductor wafer comprising the steps of: rotating the wafer, and contacting the rotating wafer with a flowing froth, the froth comprising bubbles formed by the effervescence of an etchant containing a dissolved gas.

Claim 3

A process as set forth in claim 1 wherein the etchant comprises a surface-active agent.

Claim 4

A process as set forth in claim 1 wherein the etchant comprises phosphoric acid and is at a pressure of at least 35 psig before it effervesces.

Claim 5

A process as set forth in claim 1 wherein the wafers are rotated at a rate not in excess of about 5 revolutions per minute.

Claim 6

A process as set forth in claim 1 wherein the stock removal from the wafers does not exceed 25 micrometers.

Claim 7

A process as set forth in claim 1 wherein the froth is formed from a pressurized etchant which experiences a pressure drop of at least about 30 psi, the pressurized etchant comprising nitric acid, hydrofluoric acid, phosphoric and, prior to the pressure drop, compressed bubbles and a dissolved gas.

Claim 8

A process as set forth in claim 1 wherein the dissolved gas is selected from the group consisting of helium, hydrogen, nitrogen, oxygen, argon and carbon dioxide.

Claim 9

The process of claim 1 wherein the semiconductor wafer is simultaneously etched with at least one other semiconductor wafer, the semiconductor wafers being fixtured in an etch rack having parallel, horizontal rollers which cause the wafers to rotate about an axis which is parallel to the axis of the rollers, the etch rack defining a fluid chamber having open opposite ends, the froth flowing in one and out of the other open opposite ends, the direction of the flow of the froth being generally transverse to the axis of rotation of the wafers.

Claim 10

A process as set forth in claim 1 wherein the semiconductor wafer is simultaneously etched with at least one other semiconductor wafer, the semiconductor wafers being fixtured in an etch rack having no more than four parallel, horizontal rollers which support the wafers, each roller having a plurality of endless circumferential grooves cut in the surface thereof at regular intervals, the grooves being aligned such that a wafer placed in one of the grooves of each of the rollers will stand normal to the axes of the rollers and parallel to other wafers held by the etch rack, the rollers being rotative about their axes and driven by a drive mechanism so that each of the wafers is caused to rotate about an axis which is parallel to the axis of the rollers.

Claim 11

Apparatus for treating semiconductor wafers comprising: a rack for holding at least two generally disc-shaped semiconductor wafer, said rack defining a fluid chamber having an inlet end and an outlet end; and a circulatory system for moving a semiconductor wafer processing fluid through the fluid chamber from the inlet end to the outlet end and between said semiconductor wafers.

Claim 12

Apparatus for treating semiconductor wafers comprising: a rack for holding at least two generally disc-shaped semiconductor wafer, said rack defining a fluid chamber having an inlet end and an outlet end; and a circulatory system for moving a semiconductor wafer processing fluid through the fluid chamber from the inlet end to the outlet end and between said semiconductor wafers.

Claim 13

Apparatus as set forth in claim 10 wherein said circulatory system comprises a plenum in communication with the inlet end of the fluid chandler.

Claim 14

Apparatus as set forth in claim 10 wherein said fluid chamber and circulatory system are configured so that essentially all fluid moved by the circulatory system passes through the fluid chamber.

Claim 15

Apparatus as set forth in claim 10 further comprising a drive mechanism for rotating the wafers.

Claim 16

Apparatus as set forth in claim 13 wherein said drive mechanism comprises a plurality of rollers adapted to engage the peripheries of said wafers for rotating said wafers.

Claim 17

Apparatus as set forth in claim 14 wherein no more than four rollers engage the peripheries of said wafers.

Claim 18

Apparatus as set forth in claim 15 wherein said rollers rotate about four parallel, horizontal axes, wherein two of the four rollers, constituting upper rollers, engage the peripheries of the wafers generally above a horizontal plane passing through the centers of the wafers, and wherein the other two rollers, constituting lower rollers, engage the peripheries of the wafers generally below the horizontal plane, said wafers being generally normal to the roller axes.

Claim 19

Apparatus as set forth in claim 16 wherein an angle δ, being defined as the acute degree of arc of the wafer between the horizontal plane and a plane including either of the axes of the upper rollers and the wafer centers, is less than an angle γ, being defined as the acute degree of arc of the wafer between the horizontal plane and a plane including either of the axes of the lower rollers and the wafer centers.

Claim 20

Apparatus as set forth in claim 17 wherein the drive rollers are spaced sufficiently to accommodate wafers having orientation flats such that the degree of arc of the wafers occupied by the flats is less than the smaller of the two angles defined by two planes, one of which contains the wafer centers and any one roller axis and the other of which contains the wafer centers and a roller axis adjacent to said one roller axis.

Claim 21

Apparatus as set forth in claim 14 further comprising at least two generally disc shaped dummy wafers of a non-semiconductor material in engagement with and rotated by said rollers, the semiconductor wafers being disposed between and generally parallel to said dummy wafers, the dummy wafers being rotated by the rollers at substantially the same rotational speed as the semiconductor wafers.

Claim 22

Apparatus as set forth in claim 19 wherein the diameter and thickness of each dummy wafer is substantially the same as the diameter and thickness of each semiconductor wafer.

Claim 23

Apparatus as set forth in claim 14 wherein each roller includes at least two circumferential grooves for receiving the peripheries of the wafers, and a plurality of longitudinal grooves, said circumferential grooves maintaining axial alignment of the wafers, each roller further comprising elastomeric bands positioned within and extending along the longitudinal grooves, said elastomeric bands being engageable with the peripheries of the wafers.