US6339276B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Incremental tuning process for electrical resonators based on mechanical motion
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1999-11-01
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Granted: 2002-01-15
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Expires: 2019-11-01
Abstract
Abstract The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.
Inventors
- 👤 Bradley Paul Barber
- 👤 Yiu-Huen Wong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:41
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/125; H03H9/13; H03H9/131; G; G04; G04F; G04F5/00; G04F5/04; G04F5/06; G04F5/063; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/175; H04; H04R; H04R17/00; H04R17/10; H04R31/00; H03H2003/0414; H03H2003/0421; H03H2003/0428; H04R15/00; H04R15/02; Y; Y10; Y10S; Y10S29/00; Y10S29/016; Y10T; Y10T29/00; Y10T29/42; Y10T29/43; Y10T29/435; Y10T29/49; Y10T29/49002; Y10T29/49004; Y10T29/49005
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
43 words
A mechanical resonator comprising a first electrode a transducer and a second electrode wherein the second electrode comprises a conductive layer and a plurality of distinct stacked adjustment layers, each of said adjustment layers having distinct etching properties from any adjacent adjustment layers.
Claim 2
Dependent Claim
43 words
A mechanical resonator comprising a first electrode a transducer and a second electrode wherein the second electrode comprises a conductive layer and a plurality of distinct stacked adjustment layers, each of said adjustment layers having distinct etching properties from any adjacent adjustment layers.
Claim 3
Dependent Claim
47 words
A mechanical resonator according to claim 1 wherein said resonator has a resonant frequency that is a function of said resonator thickness and wherein the stacked adjustment layers each have a thickness such that removal of an adjustment layer increases the resonant frequency by a known increment.
Claim 4
Dependent Claim
20 words
A mechanical resonator according to claim 2 wherein said adjustment layer thickness is a same thickness for all adjustment layers.
Claim 5
Dependent Claim
35 words
A mechanical resonator according to claim 2 wherein said adjustment layer thickness is different for different adjustment layers such different being a function of the material and process used for depositing and etching such material.
Claim 6
Dependent Claim
19 words
A mechanical resonator according to claim 2 wherein said first electrode is a bottom electrode over a supporting substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-01-14 | 2005-07-16 | 2006-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-01-14 | 2009-07-16 | 2010-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-01-14 | 2013-07-16 | 2014-01-15 | $7700.00 | Window Closed / Lapsed |