US4445066A
Expired / Lapsed
US
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Electrode structure for a zinc oxide thin film transducer
Assignee: Murata Manufacturing Co Ltd
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Filing: 1983-06-29
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Granted: 1984-04-24
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Expires: 2003-06-29
Abstract
Abstract An Al electrode structure for a zinc oxide thin film in which an intermediate layer of V 2 O 3 , Ta, V, Cu, Ni or Ti is provided between the surface of the zinc oxide thin film and the Al electrode. A tuning fork vibrator equipped with such an electrode structure has high reliability in that changes in resonance frequency and series resonance resistance (Ro) with time are small.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Takeshi Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:15
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/15; H03H9/21; H03H9/02; H03H9/125; H03H9/13; H03H9/131; H10; H10N; H10N30/00; H10N30/80; H10N30/87; H10N30/877; H10N30/878
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
52 words
An electrode structure for a zinc oxide thin film comprising an Al electrode and an intermediate layer between the surface of the zinc oxide thin film and the Al electrode, wherein said intermediate layer is selected from the group consisting of V 2 O 3 , Ta, V, Cu, Ni and Ti.
Claim 2
Dependent Claim
52 words
An electrode structure for a zinc oxide thin film comprising an Al electrode and an intermediate layer between the surface of the zinc oxide thin film and the Al electrode, wherein said intermediate layer is selected from the group consisting of V 2 O 3 , Ta, V, Cu, Ni and Ti.
Claim 3
Dependent Claim
20 words
The electrode structure of claim 1, wherein the Al electrode has a thickness of from 3,000 Å to 10,000 Å.
Claim 4
Dependent Claim
19 words
The electrode structure of claim 1, wherein the intermediate layer has a thickness of from 50 to 3000 Å.
Claim 5
Dependent Claim
16 words
The electrode structure of claim 1, wherein the intermediate layer is V 2 O 3 .
Claim 6
Dependent Claim
12 words
The electrode structure of claim 1, wherein the intermediate layer is V.
Claim 7
Dependent Claim
59 words
In a tuning fork vibrator having a zinc oxide thin film layer and an Al electrode layer, the improvement comprising an intermediate layer between the surface of the zinc oxide thin film layer and the Al electrode layer, said intermediate layer being selected from the group consisting of V 2 O 3 , Ta, V, Cu, Ni and Ti.
Claim 8
Dependent Claim
59 words
In a tuning fork vibrator having a zinc oxide thin film layer and an Al electrode layer, the improvement comprising an intermediate layer between the surface of the zinc oxide thin film layer and the Al electrode layer, said intermediate layer being selected from the group consisting of V 2 O 3 , Ta, V, Cu, Ni and Ti.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-04-24 | 1987-10-24 | 1988-04-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-24 | 1991-10-24 | 1992-04-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-24 | 1995-10-24 | 1996-04-24 | $7700.00 | Window Closed / Lapsed |