US6307447B1 — Tuning mechanical resonators for electrical filter

Claim 1

Independent Claim 72 words

A method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, wherein the resonant frequencies of said resonators are a function of each resonator thickness, the method comprising forming said resonators with an etchable layer comprising a material having different etching properties for each of said resonators having different resonant frequencies and selectively etching said etchable layers to adjust the resonant frequencies of said resonators.

Claim 2

Independent Claim 72 words

A method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, wherein the resonant frequencies of said resonators are a function of each resonator thickness, the method comprising forming said resonators with an etchable layer comprising a material having different etching properties for each of said resonators having different resonant frequencies and selectively etching said etchable layers to adjust the resonant frequencies of said resonators.

Claim 3

Independent Claim 166 words

A method for adjusting a resonant frequency of at least a first and a second mechanical resonator comprising elements of an electrical filter, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, wherein the resonant frequency of each resonator is a function of an overall resonator thickness, the method comprising: a) forming the top electrode for each resonator having a top electrode thickness selected such that the resonator thickness is in excess of the required total thickness for each resonator to resonate at a desired frequency, wherein the top electrode of the first resonator comprises a first material and the top electrode for the second resonator comprises a second material, and wherein said first and said second materials have different etching properties; b) selectively etching said top electrodes of said first and second resonators; and c) stopping the etching process for each of said first and second resonators when the resonator thickness produces the desired frequency for said resonator.

Claim 4

Independent Claim 166 words

A method for adjusting a resonant frequency of at least a first and a second mechanical resonator comprising elements of an electrical filter, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, wherein the resonant frequency of each resonator is a function of an overall resonator thickness, the method comprising: a) forming the top electrode for each resonator having a top electrode thickness selected such that the resonator thickness is in excess of the required total thickness for each resonator to resonate at a desired frequency, wherein the top electrode of the first resonator comprises a first material and the top electrode for the second resonator comprises a second material, and wherein said first and said second materials have different etching properties; b) selectively etching said top electrodes of said first and second resonators; and c) stopping the etching process for each of said first and second resonators when the resonator thickness produces the desired frequency for said resonator.

Claim 5

Dependent Claim 67 words

The method according to claim 2 wherein the step of forming said top electrodes further comprises forming the top electrode of the first resonator by first forming a first conductive layer over said transducer and forming a topmost adjustment layer over said first conductive layer, the topmost adjustment layer selected to have different etching properties than a topmost layer of the top electrode of the second resonator.

Claim 6

Dependent Claim 30 words

The method according to claim 3 wherein said topmost layer of said first top electrode is SiO 2 and the top electrode of the second resonator is an aluminum layer.

Claim 7

Dependent Claim 22 words

The method according to claim 2 wherein one of said top electrodes comprises a gold layer and the other a aluminum layer.

Claim 8

Dependent Claim 24 words

The method according to claim 2 wherein the selective etching is done while applying an electrical signal and monitoring each of said resonator frequencies.

Claim 9

Dependent Claim 14 words

The method according to claim 6 wherein the etching process comprises reactive ion etching.

Claim 10

Dependent Claim 14 words

The method according to claim 6 wherein the etching process comprises vapor phase etching.

Claim 11

Dependent Claim 72 words

The method according to claim 6 wherein at least one diagnostic resonator having a resonant frequency same as the resonant frequency of one of said first and second resonators, is built adjacent one of said first and second mechanical resonators comprising the elements of the electrical filter, and wherein the selective etching is done in the presence of said diagnostic resonator while applying an electrical signal and monitoring said diagnostic resonator frequency.

Claim 12

Dependent Claim 23 words

The method according to claim 2 wherein the transducer material is selected from the group consisting of piezoelectric, piezomagnetic, electrostrictive and magnetostrictive materials.

Claim 13

Dependent Claim 24 words

The method according to claim 2 wherein the bottom electrode is formed as a common electrode to both the first and the second resonators.

Claim 14

Dependent Claim 48 words

The method according to claim 2 wherein the selective etching comprises dipping the resonators in an etching solution for a period of time calculated to remove a sufficient amount of top electrode material of at least one of said resonators' top electrode to produce a desired resonant frequency.

Claim 15

Dependent Claim 92 words

An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, each of said resonators having been etched to its respective thickness.

Claim 16

Dependent Claim 92 words

An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, each of said resonators having been etched to its respective thickness.

Claim 17

Dependent Claim 132 words

An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, wherein the resonant frequency of said resonators of said filter have been adjusted by a process comprising: selectively etching said top electrodes of said first and second resonators; and stopping the etching process for each of said first and second resonators when the frequency is the desired frequency for said resonator.

Claim 18

Dependent Claim 132 words

An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, wherein the resonant frequency of said resonators of said filter have been adjusted by a process comprising: selectively etching said top electrodes of said first and second resonators; and stopping the etching process for each of said first and second resonators when the frequency is the desired frequency for said resonator.

Claim 19

Dependent Claim 52 words

The electrical filter according to claim 14 wherein the top electrode of the first resonator comprises a first conductive electrode layer formed over said transducer and a topmost adjustment layer formed over said first conductive electrode, the topmost adjustment layer having different etching properties than a topmost layer of the second resonator.

Claim 20

Dependent Claim 31 words

The electrical filter according to claim 15 wherein said topmost layer of said first top electrode comprises SiO 2 and the top electrode of the second resonator comprises an aluminum layer.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2004-10-22	2005-04-23	2005-10-23	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2008-10-22	2009-04-23	2009-10-23	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2012-10-22	2013-04-23	2013-10-23	$7700.00	Window Closed / Lapsed

Tuning mechanical resonators for electrical filter

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