US5407525A
Expired / Lapsed
US
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Method of frequency tuning a piezoelectric device and apparatus for the implementation of the method
Assignee: Compagnie Electronique et de Piezoelectricite CEPE
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Filing: 1993-12-21
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Granted: 1995-04-18
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Expires: 2013-12-21
Abstract
Abstract A method of frequency tuning a piezoelectric device and apparatus for the implementation thereof. A piezoelectric device having at least one resonating function is formed by two metallized electrodes facing each other, on a face of a plate made of a piezoelectric material. An arranging step arranges the plate, fitted with the electrodes, in a tuning position in proximity to an ion source. Then, an exposing step exposes the plate to an ion flux produced by the source and the ions etch the metal. A measuring step measures the resonant frequency of the resonating function while the plate is in a tuning position. Finally, a raising step raises at least one electrode exposed to the ions to an adjustable bias voltage to control the rate at which the metal on the electrode is etched.
Inventors
- 👤 Jean-Philippe Michel
- 👤 Michael Zafrany
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:02
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
124 words
A method of frequency tuning a piezoelectric device comprising at least one resonating function formed by two metallized electrodes placed facing each other, each on a different face of a plate made of piezoelectric material, comprising the steps of: arranging the plate made of piezoelectric material, fitted with metallized electrodes, in a tuning position in proximity to at least one ion source; exposing the plate to an ion flux produced by the ion source, the ion flux etching the metal; measuring resonant frequency of the resonating function while the plate is in a tuning position; and raising at least one electrode exposed to the ion flux to an adjustable bias voltage to control the rate at which the metal on the electrode is etched.
Claim 2
Independent Claim
124 words
A method of frequency tuning a piezoelectric device comprising at least one resonating function formed by two metallized electrodes placed facing each other, each on a different face of a plate made of piezoelectric material, comprising the steps of: arranging the plate made of piezoelectric material, fitted with metallized electrodes, in a tuning position in proximity to at least one ion source; exposing the plate to an ion flux produced by the ion source, the ion flux etching the metal; measuring resonant frequency of the resonating function while the plate is in a tuning position; and raising at least one electrode exposed to the ion flux to an adjustable bias voltage to control the rate at which the metal on the electrode is etched.
Claim 3
Dependent Claim
74 words
The tuning method as claimed in claim 1, further comprising the steps of: when the plate made of piezoelectric material comprises a plurality of resonating functions, adjusting the bias voltage applied to one or more electrodes exposed to the ion flux to a value reducing the rate at which the metal on said electrodes is etched to zero as soon as the resonating functions corresponding to these electrodes have reached a frequency target value.
Claim 4
Dependent Claim
62 words
The tuning method as claimed in claim 1, further comprising the steps of: when the plate made of piezoelectric material comprises a plurality of resonating functions, adjusting the bias voltage applied to one or more electrodes exposed to the ion flux to a value chosen in order that the resonating functions reach a frequency target value in the same ion-flux exposure time.
Claim 5
Dependent Claim
71 words
A frequency tuning apparatus for the implementation of the method as claimed in claim 1, wherein it comprises, in a sealed chamber, at least one ion gun producing an ion beam directed along an axis toward one face of the plate made of piezoelectric material, means for measuring the resonant frequency of the resonating function, and means for applying the adjustable bias voltage to the electrode exposed to the ion flux.
Claim 6
Dependent Claim
18 words
The frequency tuning apparatus as claimed in claim 4, wherein the ion beam is limited by a diaphragm.
Claim 7
Dependent Claim
19 words
The frequency tuning apparatus as claimed in claim 4, wherein the ion beam is focused by a focusing lens.
Claim 8
Dependent Claim
39 words
The frequency tuning apparatus as claimed in claim 4, wherein the means for measuring the frequency comprise a measuring device connected to a measuring head coming into electrical contact with the electrodes of the plate made of piezoelectric material.
Claim 9
Dependent Claim
19 words
The frequency tuning apparatus as claimed in claim 7, wherein the measuring device comprises one or more measuring instruments.
Claim 10
Dependent Claim
40 words
The frequency tuning apparatus as claimed in claim 4, wherein the means for applying the voltage comprise an adjustable voltage source connected to a biasing head coming into electrical contact with the electrodes of the plate made of piezoelectric material.
Claim 11
Dependent Claim
23 words
The frequency tuning apparatus as claimed in claim 9, wherein the voltage source is formed by one or more adjustable electric power supplies.
Claim 12
Dependent Claim
19 words
The frequency tuning apparatus as claimed in claim 4, wherein the measuring head and the biasing head are coincident.
Claim 13
Dependent Claim
50 words
The frequency tuning apparatus as claimed in claim 4, wherein the piezoelectric device is supported, together with one or more other piezoelectric devices to be tuned, by a carriage device which can move along two substantially perpendicular axes, one of which is directed along the axis of the ion beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-17 | 1998-10-17 | 1999-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-17 | 2002-10-17 | 2003-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-17 | 2006-10-17 | 2007-04-18 | $7700.00 | Window Closed / Lapsed |