US4638536A
Expired / Lapsed
US
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Method of making a resonator having a desired frequency from a quartz crystal resonator plate
Assignee: United States, ARMNY THE, Secretary of
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Filing: 1986-01-17
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Granted: 1987-01-27
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Expires: 2006-01-17
Abstract
Abstract A resonator having a desired frequency is made from a quartz crystal resonator plate by a method including the steps of: (A) etching the quartz crystal resonator plate to a frequency slightly higher than the desired frequency, (B) vacuum desposting metallic electrodes onto the active area of the resonator plate to lower the frequency to a frequency that very closely approaches the desired frequency, and (C) treating the plate with the deposited electrodes with UV-ozone to oxidize the electrodes in a slow, precisely controlled manner to the desired frequency.
Inventors
- 👤 John R. Vig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:23
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
88 words
Method of making a resonator having a desired frequency from a quartz crystal resonator plate, said method including the steps of: (A) etching the quartz crystal resonator plate to a frequency slightly higher than the desired frequency, (B) depositing metallic electrodes onto the active area of the resonator plate to lower the frequency to a frequency that very closely approaches the desired frequency, and (C) treating the plate with the deposited electrodes with UV-ozone to oxidize the electrodes in a slow, precisely controlled manner to the desired frequency.
Claim 2
Dependent Claim
88 words
Method of making a resonator having a desired frequency from a quartz crystal resonator plate, said method including the steps of: (A) etching the quartz crystal resonator plate to a frequency slightly higher than the desired frequency, (B) depositing metallic electrodes onto the active area of the resonator plate to lower the frequency to a frequency that very closely approaches the desired frequency, and (C) treating the plate with the deposited electrodes with UV-ozone to oxidize the electrodes in a slow, precisely controlled manner to the desired frequency.
Claim 3
Dependent Claim
23 words
Method according to claim 1 wherein the resonator plate is selected from the group consisting of an AT-cut plate and an SC-cut plate.
Claim 4
Dependent Claim
13 words
Method according to claim 2 wherein the resonator plate is an AT-cut plate.
Claim 5
Dependent Claim
13 words
Method according to claim 2 wherein the resonator plate is an SC-cut plate.
Claim 6
Dependent Claim
15 words
Method according to claim 1 wherein the metallic electrodes are constituted of oxide forming metals.
Claim 7
Dependent Claim
23 words
Method according to claim 5 wherein the oxide forming metals are selected from the group consisting of aluminum, copper, silver, nickel and molybdenum.
Claim 8
Dependent Claim
13 words
Method according to claim 6 wherein the metallic electrode is constituted of aluminum.
Claim 9
Dependent Claim
13 words
Method according to claim 6 wherein the metallic electrode is constituted of copper.
Claim 10
Dependent Claim
13 words
Method according to claim 6 wherein the metallic electrode is constituted of silver.
Claim 11
Dependent Claim
13 words
Method according to claim 6 wherein the metallic electrode is constituted of molybdenum.
Claim 12
Dependent Claim
13 words
Method according to claim 6 wherein the metallic electrode is constituted of nickel.
Claim 13
Dependent Claim
21 words
Method according to claim 1 wherein the treatment in step (C) is monitored by monitoring the resonator frequency during the treatment.
Claim 14
Dependent Claim
22 words
Method according to claim 1 wherein during the treatment in step (C) ozone from an ozone generator is directed to the electrodes.
Claim 15
Dependent Claim
27 words
Method according to claim 1 wherein during the treatment in step (C) the temperature of the electrodes is increased to between room temperature and about 400° C.
Claim 16
Dependent Claim
84 words
Method of making a resonator having a frequency of 100.000 MHz from an inverted mesa type SC-cut quartz crystal resonator plate, said method including the steps of: (A) etching the resonator plate in a chemical polishing etching solution to a frequency of MHz, (B) vacuum depositing aluminum electrodes onto the active area of the resonator plate until a frequency of 100.060 MHz is reached, and (C) treating the plate with the deposited aluminum electrodes with UV-ozone until the desired 100.000 MHz frequency is reached.
Claim 17
Dependent Claim
84 words
Method of making a resonator having a frequency of 100.000 MHz from an inverted mesa type SC-cut quartz crystal resonator plate, said method including the steps of: (A) etching the resonator plate in a chemical polishing etching solution to a frequency of MHz, (B) vacuum depositing aluminum electrodes onto the active area of the resonator plate until a frequency of 100.060 MHz is reached, and (C) treating the plate with the deposited aluminum electrodes with UV-ozone until the desired 100.000 MHz frequency is reached.
Claim 18
Dependent Claim
84 words
Method of making a resonator having a frequency of 20.000 MHz from a fundamental mode AT-cut quartz crystal resonator plate, said method including the steps of: (A) etching the resonator plate in a chemical polishing etching solution to a frequency of 20.060 MHz, (B) vacuum depositing aluminum electrodes onto the active area of the resonator plate until a frequency of 20.003 MHz is reached, and (C) treating the plate with the deposited aluminum electrodes with UV-ozone until the desired 20.000 MHz frequency is reached.
Claim 19
Dependent Claim
84 words
Method of making a resonator having a frequency of 20.000 MHz from a fundamental mode AT-cut quartz crystal resonator plate, said method including the steps of: (A) etching the resonator plate in a chemical polishing etching solution to a frequency of 20.060 MHz, (B) vacuum depositing aluminum electrodes onto the active area of the resonator plate until a frequency of 20.003 MHz is reached, and (C) treating the plate with the deposited aluminum electrodes with UV-ozone until the desired 20.000 MHz frequency is reached.
References Cited (Backward Citations)
US4130771A
Cited
US4472652A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-26 | 1990-07-28 | 1991-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-26 | 1994-07-28 | 1995-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-26 | 1998-07-28 | 1999-01-27 | $7700.00 | Window Closed / Lapsed |