Patent US6281144B1 successfully refreshed from Google Patents.
US6281144B1
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Exclusion of polymer film from semiconductor wafer edge and backside during film (CVD) deposition
Assignee: Novellus Systems Inc
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Filing: 1999-07-15
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Granted: 2001-08-28
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Expires: 2019-07-15
Abstract
Abstract A structure and method are provided to exclude polymer film deposition from the backside and edge of a wafer during CVD processing. An electrostatic chuck (ESC), with radial and circular channels and grooves on its surface, secures a wafer to be processed. An inert gas, preferably argon, flows outward from these channels and grooves along the backside of the wafer. A uniform flow of the gas from underneath the wafer into the process chamber prevents monomer molecules from depositing on the wafer backside. For edge exclusion, a showerhead is placed slightly above the outer diameter of the wafer to keep most of the monomer molecules within the process chamber and redirect the remaining monomer molecules across the surface of the wafer below the outer edge of the showerhead. As a result, monomer molecules are prevented from depositing on the wafer edge because the redirected and limited flow across the wafer surface flows upward in the process chamber to be pumped out and because a cloud of gas formed about the edge of the wafer from the gas exiting the backside of the wafer prevents any additional monomer molecules from depositing on the wafer edge.
Inventors
- 👤 Thomas J. Cleary
- 👤 James C. Wing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:10
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/45519; C23C16/45521; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
181 words
A method of backside and edge exclusion of polymer film on a wafer during CVD, comprising the steps of: securing said wafer to a wafer clamp, said wafer clamp comprising a peripheral raised region and a plurality of raised seals, wherein outer edges of said plurality of raised seals and an inner edge of said peripheral raised region form a first channel therebetween, and wherein adjacent raised seals form grooves therebetween said wafer clamp further comprising a raised central region co-planar with said plurality of raised seals, wherein an outer edge of said central region and inner edges of said plurality of raised seals form a second channel therebetween, and wherein a plurality of gas supply grooves extend through said raised central region from a central area of said wafer clamp to said second channel; and injecting a gas through said gas supply grooves in said wafer clamp, wherein said gas flows outward from said central area, into said second channel, through said grooves and into said first channel, thereby to prevent monomer molecule deposition on the backside of said wafer.
Claim 2
Independent Claim
181 words
A method of backside and edge exclusion of polymer film on a wafer during CVD, comprising the steps of: securing said wafer to a wafer clamp, said wafer clamp comprising a peripheral raised region and a plurality of raised seals, wherein outer edges of said plurality of raised seals and an inner edge of said peripheral raised region form a first channel therebetween, and wherein adjacent raised seals form grooves therebetween said wafer clamp further comprising a raised central region co-planar with said plurality of raised seals, wherein an outer edge of said central region and inner edges of said plurality of raised seals form a second channel therebetween, and wherein a plurality of gas supply grooves extend through said raised central region from a central area of said wafer clamp to said second channel; and injecting a gas through said gas supply grooves in said wafer clamp, wherein said gas flows outward from said central area, into said second channel, through said grooves and into said first channel, thereby to prevent monomer molecule deposition on the backside of said wafer.
Claim 3
Dependent Claim
22 words
The method of claim 1 , wherein the portions of said wafer secured to said wafer clamp exclude monomer molecule deposition therebetween.
Claim 4
Dependent Claim
19 words
The method of claim 1 , wherein the flow rate of said gas is between 2 and 7 sccm.
Claim 5
Dependent Claim
13 words
The method of claim 1 , wherein said gas is an inert gas.
Claim 6
Dependent Claim
23 words
The method of claim 1 , wherein said gas is selected from the group consisting of Helium, Neon, Nitrogen, Argon, Krypton, and Xenon.
Claim 7
Dependent Claim
11 words
The method of claim 5 , wherein said gas is Argon.
Claim 8
Dependent Claim
18 words
The method of claim 1 , wherein said wafer is secured to said wafer clamp by electrostatic force.
Claim 9
Dependent Claim
28 words
The method of claim 1 , wherein said gas flows across the edge of said wafer to prevent polymer film from forming on the edge of said wafer.
Claim 10
Dependent Claim
31 words
The method of claim 1 , further comprising the step of placing a showerhead above the outer diameter of said wafer to redirect process gases across the surface of said wafer.
Claim 11
Dependent Claim
24 words
The method of claim 9 , wherein said showerhead is positioned between 0.5 and approximately 5 mm above the upper surface of said wafer.
Claim 12
Dependent Claim
23 words
The method of claim 9 , wherein the outer edge of said showerhead is positioned approximately above the outer edge of said wafer.
Claim 13
Dependent Claim
15 words
The method of claim 1 , wherein said showerhead is rounded at its lower edge.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-08-27 | 2005-02-26 | 2005-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-08-27 | 2009-02-26 | 2009-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-08-27 | 2013-02-26 | 2013-08-28 | $7700.00 | Window Closed / Lapsed |