US5884412A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for purging the back side of a substrate during chemical vapor processing
Assignee: Applied Materials Inc
•
Filing: 1996-07-24
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Granted: 1999-03-23
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Expires: 2016-07-24
Abstract
Abstract A method of processing a disk-shaped substrate, or wafer, during a chemical vapor process includes a backside purge of the substrate with a purge gas. The backside purge is obtained by spinning the substrate about a central axis, directing a flow of the purge gas over the backside of the spinning substrate, and causing the purge gas to flow in an outward radial direction with the spinning substrate. An apparatus in a vapor processing system structured for conducting the backside purge includes a support mechanism structured and arranged to support the substrate and spin the substrate about a central axis, and a conduit coupled to a source of purge gas, structured and arranged to direct a flow of the purge gas over a backside of the substrate while the substrate is spinning such that the spinning substrate causes the purge gas to flow radially outward.
Inventors
- 👤 James V. Tietz
- 👤 Benjamin Bierman
- 👤 David S. Ballance
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/45521
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
84 words
An apparatus in a vapor processing system which includes a process chamber, the apparatus comprising: a rotatable support assembly structured and arranged to support a disk-shaped substrate within the process chamber; a motor which during operation spins the support assembly and the substrate about a central axis; and a conduit structured and arranged to direct a flow of purge gas over a backside of the substrate while the substrate is rotating such that the rotating substrate urges the purge gas to flow radially outward.
Claim 2
Independent Claim
84 words
An apparatus in a vapor processing system which includes a process chamber, the apparatus comprising: a rotatable support assembly structured and arranged to support a disk-shaped substrate within the process chamber; a motor which during operation spins the support assembly and the substrate about a central axis; and a conduit structured and arranged to direct a flow of purge gas over a backside of the substrate while the substrate is rotating such that the rotating substrate urges the purge gas to flow radially outward.
Claim 3
Dependent Claim
25 words
The apparatus of claim 1, wherein the support assembly is capable of spinning the substrate at a rotational speed of at least approximately 90 rpm.
Claim 4
Dependent Claim
32 words
The apparatus of claim 1, further comprising a process gas conduit structured and arranged to direct a flow of process gas over a frontside of the substrate while the substrate is spinning.
Claim 5
Dependent Claim
51 words
The apparatus of claim 1, wherein the support assembly includes an edge ring which during use supports the substrate, the edge ring having a surface which confronts the backside of the substrate and which has channels arranged to channel the radially flowing purge gas around a peripheral edge of the substrate.
Claim 6
Independent Claim
87 words
A system to vapor process a disk-shaped substrate, comprising: a process chamber; an edge ring to support the substrate within the process chamber; a rotation assembly structured and arranged to spin the edge ring and the substrate thereby during vapor processing; a process gas conduit structured and arranged to direct a flow of process gas over a frontside of the substrate; and a purge gas conduit structured and arranged to direct a flow of purge gas over a backside of the substrate while the substrate is spinning.
Claim 7
Independent Claim
87 words
A system to vapor process a disk-shaped substrate, comprising: a process chamber; an edge ring to support the substrate within the process chamber; a rotation assembly structured and arranged to spin the edge ring and the substrate thereby during vapor processing; a process gas conduit structured and arranged to direct a flow of process gas over a frontside of the substrate; and a purge gas conduit structured and arranged to direct a flow of purge gas over a backside of the substrate while the substrate is spinning.
Claim 8
Dependent Claim
20 words
The processing system of claim 5, further comprising a heat source positioned above the substrate for thermal processing the substrate.
Claim 9
Dependent Claim
27 words
The processing system of claim 6, wherein the bottom of the process chamber, the rotation assembly, and the backside of the substrate cooperatively form a thermal cavity.
Claim 10
Dependent Claim
53 words
The processing system of claim 5, wherein the rotation assembly includes a cylinder supporting the edge ring, an annular upper bearing race supporting the cylinder, a stationary lower bearing race, and bearings between the upper and lower bearing races and enabling the upper bearing race to rotate relative to the lower bearing race.
Claim 11
Dependent Claim
32 words
The processing system of claim 5, wherein the rotation assembly is structured and arranged to rotate the substrate about a central axis at a rotational speed of at least approximately 90 rpm.
Claim 12
Dependent Claim
50 words
The processing system of claim 5, wherein the edge ring includes an annular ledge having an upper surface to support the backside of the substrate near a peripheral edge of the substrate, the ledge being structured and arranged to allow passage of outwardly flowing purge gas past the peripheral edge.
Claim 13
Dependent Claim
47 words
The processing system of claim 5 wherein the process gas conduit comprises an injector which includes a slit through which the purge gas flows and wherein the slit is disposed parallel to a plane defined by the substrate when said substrate is supported by said edge ring.
Claim 14
Independent Claim
59 words
A method of purging a backside of a disk-shaped substrate with a purge gas, comprising: spinning the substrate about a central axis of the substrate; while the substrate is spinning, flowing the purge gas over the backside of the spinning substrate, whereby the spinning motion of the substrate urges the purge gas to flow in an outward radial direction.
Claim 15
Independent Claim
59 words
A method of purging a backside of a disk-shaped substrate with a purge gas, comprising: spinning the substrate about a central axis of the substrate; while the substrate is spinning, flowing the purge gas over the backside of the spinning substrate, whereby the spinning motion of the substrate urges the purge gas to flow in an outward radial direction.
Claim 16
Dependent Claim
30 words
The method of claim 12, further comprising flowing a process gas over a frontside of the spinning substrate while also flowing the purge gas over the backside of the substrate.
Claim 17
Dependent Claim
18 words
The method of claim 13, wherein the step of flowing the purge gas comprises flowing an inert gas.
Claim 18
Dependent Claim
21 words
The method of claim 13, further comprising channelling the radially flowing purge gas past a peripheral edge of the spinning substrate.
Claim 19
Dependent Claim
28 words
The method of claim 13, wherein flowing the purge gas comprises flowing the purge gas through an aperture in a plate spaced from the backside of the substrate.
Claim 20
Dependent Claim
18 words
The method of claim 13, further comprising the step of heating the substrate while flowing the process gas.
Claim 21
Dependent Claim
23 words
The method of claim 12, wherein the spinning step includes spinning the substrate at a rotational speed of at least approximately 90 rpm.
Claim 22
Dependent Claim
40 words
The method of claim 15, wherein the channelling step includes channelling the radially flowing purge gas through a plurality of flow paths that are defined by confronting surfaces of the disk-shaped substrate and an edge ring supporting the disk-shaped substrate.
Claim 23
Dependent Claim
30 words
The method of claim 19, wherein the step of channelling comprises directing the radially flowing purge gas in a generally axial direction near a peripheral edge of the disk-shaped substrate.
Claim 24
Dependent Claim
43 words
The method of claim 15, wherein the spinning step includes spinning the substrate on a rotating edge ring, an outer annular surface of the edge ring further urging the channeled purge gas and the outwardly flowing process gas to flow radially outward therefrom.
Claim 25
Independent Claim
105 words
A method of vapor processing a disk-shaped substrate in a process chamber, comprising the steps of: supporting the substrate on a rotation assembly, the rotation assembly including an edge ring having an inner annular ledge supporting the substrate near the substrate's peripheral edge; spinning the rotation assembly and the substrate about a rotational axis of the substrate; while spinning the substrate, flowing a purge gas over a backside of the substrate; while flowing a purge gas onto the backside, flowing a process gas over a frontside of the substrate, wherein the spinning of the substrate urges the purge gas radially outward toward the peripheral edge.
Claim 26
Independent Claim
105 words
A method of vapor processing a disk-shaped substrate in a process chamber, comprising the steps of: supporting the substrate on a rotation assembly, the rotation assembly including an edge ring having an inner annular ledge supporting the substrate near the substrate's peripheral edge; spinning the rotation assembly and the substrate about a rotational axis of the substrate; while spinning the substrate, flowing a purge gas over a backside of the substrate; while flowing a purge gas onto the backside, flowing a process gas over a frontside of the substrate, wherein the spinning of the substrate urges the purge gas radially outward toward the peripheral edge.
Claim 27
Dependent Claim
17 words
The method of claim 22, further including the step of heating the substrate while spinning the substrate.
Claim 28
Dependent Claim
23 words
The method of claim 22, wherein the spinning step includes spinning the substrate at a rotational speed of at least approximately 90 rpm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-22 | 2002-09-21 | 2003-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-22 | 2006-09-21 | 2007-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-22 | 2010-09-21 | 2011-03-23 | $7700.00 | Window Closed / Lapsed |