← Back to Patent Explorer
US6274935B2 Expired / Lapsed US ⏱️ 0.0 years remaining

Copper wire-bonding pad

Assignee: International Business Machines Corp
•
Filing: 2000-12-12
•
Granted: 2001-08-14
•
Expires: 2020-12-12
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A copper-containing, wire-bonding pad structure for bonding to gold wires. The structure includes a nickel-containing film to improve metallurgical characteristics. The structure also has a laminated impurity film within the copper pad, which complexes with the nickel-containing pad to prevent a destructive interaction between nickel and copper at elevated temperatures, or during the lifetime of the device or the wirebond.

Inventors

  • 👤 Cyprian E. Uzoh

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 15:50
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W72/00; H10W72/01; H10W72/012; H10W72/071; H10W72/075; H10W72/20; H10W72/251; H10W72/29; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/5525; H10W72/59; H10W72/90; H10W72/921; H10W72/923; H10W72/931; H10W72/934; H10W72/941; H10W72/9415; H10W72/942; H10W72/951; H10W72/952

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 78 words
An improved copper-containing pad for gold wire bonding having an upper copper surface and a nickel-containing film disposed over said upper copper surface including nickel and a component, wherein the improvement comprises: an impurity disposed beneath said upper copper surface; an interface formed between said nickel-containing film and said upper copper surface; and a chemical mixture disposed at said interface and formed from an interaction between said nickel-containing film and an impurity film originally laminated within said pad.
Claim 2
Dependent Claim 78 words
An improved copper-containing pad for gold wire bonding having an upper copper surface and a nickel-containing film disposed over said upper copper surface including nickel and a component, wherein the improvement comprises: an impurity disposed beneath said upper copper surface; an interface formed between said nickel-containing film and said upper copper surface; and a chemical mixture disposed at said interface and formed from an interaction between said nickel-containing film and an impurity film originally laminated within said pad.
Claim 3
Dependent Claim 20 words
The improved copper-containing pad as in claim 1 , wherein said chemical mixture includes nickel, said component, and said impurity.
Claim 4
Dependent Claim 15 words
The improved copper-containing pad as in claim 1 , wherein said nickel-containing film includes phosphorus.
Claim 5
Dependent Claim 15 words
The improved copper-containing pad as in claim 1 , wherein said nickel-containing film includes boron.
Claim 6
Dependent Claim 15 words
The improved copper-containing pad as in claim 1 , wherein said impurity film includes oxygen.
Claim 7
Dependent Claim 22 words
The improved copper-containing pad as in claim 1 , wherein said impurity film includes at least one of nitrogen, sulfur, and carbon.
Claim 8
Dependent Claim 15 words
The improved copper-containing pad as in claim 1 , wherein said chemical mixture comprises NiP(O).
Claim 9
Dependent Claim 18 words
The improved copper-containing pad as in claim 1 , further comprising a gold film covering said nickel-containing film.

References Cited (Backward Citations)

US4814049A Cited
US4661416A Cited
JPS6464338A Cited
US5106461A Cited
US5071518A Cited
US5098860A Cited
US5213638A Cited
US5320689A Cited
US5308796A Cited
US5385661A Cited
JPH11103164A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2004-08-13 2005-02-12 2005-08-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2008-08-13 2009-02-12 2009-08-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2012-08-13 2013-02-12 2013-08-14 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag