US5385661A
Expired / Lapsed
US
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Acid electrolyte solution and process for the electrodeposition of copper-rich alloys exploiting the phenomenon of underpotential deposition
Assignee: International Business Machines Corp
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Filing: 1993-09-17
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Granted: 1995-01-31
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Expires: 2013-09-17
Abstract
Abstract An acidic electrolytic solution for use in the electrodeposition of copper-rich alloys on a substrate, the less noble component being incorporated by underpotential deposition. The solution includes a first salt containing copper cations; a second salt containing cations of a metal less noble than copper; and an acid electrolyte (e.g., methane sulfonic acid) such that at typical current densities the potential is in the range of underpotential deposition of the less noble metal on the copper. Also provided is a process for using the acidic electrolytic solution. The process includes the following steps: (1) selecting a copper-rich alloy having, as the minor component, a metal that is less noble than copper and can form an underpotential deposition layer on copper; (2) selecting an acid electrolyte such that at typical current densities the potential is in the range of underpotential deposition of the metal on the copper; (3) providing in the acid solution simple salts of copper and of the less noble metal; and 4) applying a current between a cathode and an anode placed in the plating solution to plate the alloy on the cathode.
Inventors
- 👤 Panayotis C. Andricacos
- 👤 I-Chia Chang
- 👤 Hariklia Deligianni
- 👤 Wilma J. Horkans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:27
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/56; C25D3/58
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
69 words
An acidic electrolytic solution for use in the electroplating of copper-rich alloys on a substrate using a deposition potential, said solution comprising: a first salt containing copper cations; a second salt containing cations of a metal less noble than copper; and a methane sulfonic acid electrolyte adapted to permit underpotential deposition of said less noble metal on said copper and the electroplating of said copper-rich alloy on the substrate.
Claim 2
Dependent Claim
69 words
An acidic electrolytic solution for use in the electroplating of copper-rich alloys on a substrate using a deposition potential, said solution comprising: a first salt containing copper cations; a second salt containing cations of a metal less noble than copper; and a methane sulfonic acid electrolyte adapted to permit underpotential deposition of said less noble metal on said copper and the electroplating of said copper-rich alloy on the substrate.
Claim 3
Dependent Claim
24 words
An electrolytic solution as recited in claim 1 wherein the concentration of the methane sulfonic acid is in the range from 0.1 to 3N.
Claim 4
Dependent Claim
24 words
An electrolytic solution as recited in claim 2 wherein the concentration of the methane sulfonic acid is in the range from 1 to 2N.
Claim 5
Dependent Claim
15 words
An electrolytic solution as recited in claim 1 wherein said first salt is copper acetate.
Claim 6
Dependent Claim
15 words
An electrolytic solution as recited in claim 4 wherein said second salt is stannous sulfate.
Claim 7
Dependent Claim
26 words
An electrolytic solution as recited in claim 4 wherein said second salt is selected from the group consisting of lead acetate and lead methane sulfonate salts.
Claim 8
Dependent Claim
26 words
An electrolytic solution as recited in claim 1 wherein said metal is selected from the group consisting of tin, lead, thallium, cadmium, bismuth, arsenic, and antimony.
Claim 9
Dependent Claim
23 words
An electrolytic solution as recited in claim 1 wherein said copper cations and said metal cations contained in said second salt are uncomplexed.
Claim 10
Dependent Claim
24 words
An electrolytic solution as recited in claim 1 further comprising a wetting agent that maintains the deposition potential in the range of underpotential deposition.
Claim 11
Dependent Claim
15 words
An electrolytic solution as recited in claim 9 wherein said wetting agent is polyethylene glycol.
Claim 12
Dependent Claim
24 words
An electrolytic solution as recited in claim 1 further comprising a brightening agent that maintains the deposition potential in the range of underpotential deposition.
Claim 13
Dependent Claim
16 words
An electrolytic solution as recited in claim 11 wherein said brightening agent is mercaptopropane sulfonic acid.
Claim 14
Independent Claim
121 words
A method for electrodepositing copper-rich alloys on a substrate using a deposition potential, the method comprising the steps of: selecting a copper-rich alloy having, as the minor component, a metal that is less noble than copper and form an underpotential deposition layer on copper; selecting a methane sulfonic acid electrolyte adapted to permit the underpotential deposition of said less noble metal on said copper and the electrodepositing of said copper-rich alloy on the substrate; dissolving in said acid electrolyte simple salts of said metal and said copper that will be deposited as said copper-rich alloy to form the plating solution; applying a current between a cathode and an anode in said plating solution to electroplate said copper-rich alloy on the cathode.
Claim 15
Independent Claim
121 words
A method for electrodepositing copper-rich alloys on a substrate using a deposition potential, the method comprising the steps of: selecting a copper-rich alloy having, as the minor component, a metal that is less noble than copper and form an underpotential deposition layer on copper; selecting a methane sulfonic acid electrolyte adapted to permit the underpotential deposition of said less noble metal on said copper and the electrodepositing of said copper-rich alloy on the substrate; dissolving in said acid electrolyte simple salts of said metal and said copper that will be deposited as said copper-rich alloy to form the plating solution; applying a current between a cathode and an anode in said plating solution to electroplate said copper-rich alloy on the cathode.
Claim 16
Dependent Claim
23 words
The method as recited in claim 13 wherein the concentration of the methane sulfonic acid is in the range from 0.1 to 3N.
Claim 17
Dependent Claim
23 words
The method as recited in claim 14 wherein the concentration of the methane sulfonic acid is in the range from 1 to 2N.
Claim 18
Dependent Claim
25 words
The method as recited in claim 13 wherein said metal is selected from the group consisting of tin, lead, thallium, cadmium, bismuth, arsenic, and antimony.
Claim 19
Dependent Claim
32 words
The method as recited in claim 13 further comprising, before applying a current, adding to said plating solution a wetting agent that maintains the deposition potential in the range of underpotential deposition.
Claim 20
Dependent Claim
14 words
The method as recited in claim 17 wherein said wetting agent is polyethylene glycol.
Claim 21
Dependent Claim
33 words
The method as recited in claim 13 further comprising, before applying a potential, adding to said acidic electrolytic solution a brightening agent that maintains the deposition potential in the range of underpotential deposition.
Claim 22
Dependent Claim
15 words
The method as recited in claim 19 wherein said brightening agent is mercaptopropane sulfonic acid.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-30 | 1998-08-01 | 1999-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-30 | 2002-08-01 | 2003-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-30 | 2006-08-01 | 2007-01-31 | $7700.00 | Window Closed / Lapsed |