US6258620B1
Expired / Lapsed
US
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Method of manufacturing CIGS photovoltaic devices
Assignee: DEPARTMENT OF ENGERGY UNITED STATES
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Filing: 1998-10-15
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Granted: 2001-07-10
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Expires: 2018-10-15
Abstract
Abstract A method of manufacturing copper-indium-gallium-diselenide (CuInxGa1-xSe2 or just CIGS) photovoltaic devices using elemental selenium and without requiring complex codeposition or requiring the use of toxic H2Se gas. A precursor taking one of several forms is deposited onto a substrate having a back contact. A first precursor includes copper, gallium, and indium, the latter of which is deposited in the presence of a selenium flux, all deposited in that order. The second precursor includes indium deposited in the presence of a selenium flux, copper, and gallium, deposited in that order. Next, the precursor is selenized using one of two techniques: an indium-gallium removal technique and a copper-top technique. In both techniques, the precursor is heated to and held at a first selenization temperature, most preferably 450° C., and then heated to and held at a second selenization temperature, most preferably 550° C. In the indium-gallium removal technique, the heating stages and the first hold are done in a selenium flux that is relatively constant and the selenium flux is decreased to zero during the second hold stage. In the copper-top technique, additional copper is added during the first or second hold stages; both heating stages and both hold stages are done in a selenium flux that is relatively constant and the selenium flux is decreased to zero afterwards during a cooling stage.
Inventors
- 👤 Don Louis Morel
- 👤 Syed Arif Zafar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:02
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/16; H10F10/167; H10F71/00; H10F71/125; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/541; Y02E10/543; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
162 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by depositing at least one Class IB element, at least one Class IIIA element, and at least one Class VIA element on the back contact, with an atomic ratio of deposited Class IB elements to deposited Class IIIA elements in the precursor of not greater than 1.0; (c) heating the precursor in the presence of a flux of at least one Class VIA element thereby creating a partially completed absorber layer; (d) depositing an additional amount of at least one Class IB element onto the partially completed absorber layer, thereby changing the atomic ratio of deposited Class IB elements to deposited Class IIIA elements; and (e) heating the partially completed absorber layer with its additional amount of Class IB element in the presence of a flux of at least one Class VIA element.
Claim 2
Independent Claim
162 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by depositing at least one Class IB element, at least one Class IIIA element, and at least one Class VIA element on the back contact, with an atomic ratio of deposited Class IB elements to deposited Class IIIA elements in the precursor of not greater than 1.0; (c) heating the precursor in the presence of a flux of at least one Class VIA element thereby creating a partially completed absorber layer; (d) depositing an additional amount of at least one Class IB element onto the partially completed absorber layer, thereby changing the atomic ratio of deposited Class IB elements to deposited Class IIIA elements; and (e) heating the partially completed absorber layer with its additional amount of Class IB element in the presence of a flux of at least one Class VIA element.
Claim 3
Dependent Claim
81 words
A method according to claim 1 wherein said step (c) comprises the steps of: (1) heating the precursor at a first temperature in the presence of a flux of at least one Class VIA element; and (2) heating the precursor at a second temperature higher than the first temperature in the presence of a flux of at least one Class VIA element; and wherein said steps (d) and (e) are performed with the partially completed absorber layer at the second temperature.
Claim 4
Dependent Claim
36 words
A method according to claim 1 wherein said step (d) comprises depositing the additional amount of Class IB element until the atomic ratio of deposited Class IB elements to deposited Class IIIA elements is about 1.0.
Claim 5
Dependent Claim
54 words
A method according to claim 1 wherein said step (a) comprises the steps of: (1) depositing a first layer of molybdenum onto the substrate at a first pressure; and (2) depositing a second layer of molybdenum onto the first layer of molybdenum at a second pressure that is substantially lower than the first pressure.
Claim 6
Dependent Claim
22 words
A method according to claim 4 wherein said first pressure is about 5 milliTorr and said second pressure is about 1.5 milliTorr.
Claim 7
Dependent Claim
84 words
A method according to claim 1 wherein said step (b) comprises the steps of: (1) first depositing the at least one Class IB element onto the back contact; (2) then depositing a first Class IIIA element onto the at least one Class IB element; and (3) then depositing a second Class IIIA element in the presence of a flux of the at least one Class VIA element onto the first Class IIIA element that was deposited onto the at least one Class IB element.
Claim 8
Dependent Claim
43 words
A method according to claim 6 wherein said at least one Class IB element comprises copper, wherein said first Class IIIA element comprises gallium, wherein said second Class IIIA element comprises indium, and wherein said at least one Class VIA element comprises selenium.
Claim 9
Dependent Claim
59 words
A method according to claim 6 wherein said step (3) comprises depositing the second Class IIIA element in the presence of the flux of the Class VIA element until the atomic ratio of the deposited Class IB element to the deposited Class IIIA elements in the precursor is from about 0.8 to about 1.0, but not greater than 1.0.
Claim 10
Dependent Claim
59 words
A method according to claim 6 wherein said step (3) comprises depositing the second Class IIIA element in the presence of the flux of the Class VIA element until the atomic ratio of the deposited Class IB element to the deposited Class IIIA elements in the precursor is from about 0.9 to about 1.0, but not greater than 1.0.
Claim 11
Dependent Claim
73 words
A method according to claim 6 wherein said step (3) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude in angstroms per second of the flux of the Class IB element is greater than two times the magnitude in angstroms per second of the flux of the second Class IIIA element.
Claim 12
Dependent Claim
73 words
A method according to claim 6 wherein said step (3) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude in angstroms per second of the flux of the Class IB element is greater than three times the magnitude in angstroms per second of the flux of the second Class IIIA element.
Claim 13
Dependent Claim
64 words
A method according to claim 6 wherein said step (3) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude of the flux of the Class IB element is about five times the magnitude of the flux of the second Class IIIA element.
Claim 14
Dependent Claim
21 words
A method according to claim 6 wherein said steps (1) and (3) are performed with the substrate at about 275° C.
Claim 15
Dependent Claim
81 words
A method according to claim 6 wherein said step (c) comprises the steps of: (1) heating the precursor at a first temperature in the presence of a flux of at least one Class VIA element; and (2) heating the precursor at a second temperature higher than the first temperature in the presence of a flux of at least one Class VIA element; and wherein said steps (d) and (e) are performed with the partially completed absorber layer at the second temperature.
Claim 16
Dependent Claim
10 words
A product made by the process of claim 6 .
Claim 17
Dependent Claim
88 words
A method according to claim 1 wherein said step (b) comprises the steps of: (1) first depositing a first Class IIIA element in the presence of a flux of the at least one Class VIA element onto the back contact; (2) then depositing the at least one Class IB element onto the first Class IIIA element that was deposited in the presence of a flux of at least one Class VIA element; (3) then depositing a second Class IIIA element onto the at least one Class IB element.
Claim 18
Dependent Claim
47 words
A method according to claim 16 wherein said step (2) comprises depositing the Class IB element until the atomic ratio of the deposited Class IB element to the deposited Class IIIA elements in the precursor is from about 0.8 to about 1.0, but not greater than 1.0.
Claim 19
Dependent Claim
47 words
A method according to claim 16 wherein said step (2) comprises depositing the Class IB element until the atomic ratio of the deposited Class IB element to the deposited Class IIIA elements in the precursor is from about 0.9 to about 1.0, but not greater than 1.0.
Claim 20
Dependent Claim
73 words
A method according to claim 16 wherein said step (1) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude in angstroms per second of the flux of the Class IB element is greater than two times the magnitude in angstroms per second of the flux of the first Class IIIA element.
Claim 21
Dependent Claim
73 words
A method according to claim 16 wherein said step (1) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude in angstroms per second of the flux of the Class IB element is greater than three times the magnitude in angstroms per second of the flux of the first Class IIIA element.
Claim 22
Dependent Claim
72 words
A method according to claim 16 wherein said step (1) comprises depositing the second Class IIIA element via a flux of the second Class IIIA element in the presence of the flux of the Class VIA element and wherein the magnitude in angstroms per second of the flux of the Class IB element is about five times the magnitude in angstroms per second of the flux of the first Class IIIA element.
Claim 23
Dependent Claim
21 words
A method according to claim 16 wherein said steps (1) and (2) are performed with the substrate at about 275° C.
Claim 24
Dependent Claim
43 words
A method according to claim 16 wherein said at least one Class IB element comprises copper, wherein said first Class IIIA element comprises indium, wherein said second Class IIIA element comprises gallium, and wherein said at least one Class VIA element comprises selenium.
Claim 25
Dependent Claim
10 words
A product made by the process of claim 16 .
Claim 26
Independent Claim
113 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; and (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C. until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 27
Independent Claim
113 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; and (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C. until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 28
Independent Claim
120 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (3) then depositing gallium onto the deposited copper until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 29
Independent Claim
120 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (3) then depositing gallium onto the deposited copper until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 30
Independent Claim
157 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; and (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C. until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (d) depositing an additional amount copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (e) heating the partially completed absorber layer with its additional amount copper in the presence of a selenium flux.
Claim 31
Independent Claim
157 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; and (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C. until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (d) depositing an additional amount copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (e) heating the partially completed absorber layer with its additional amount copper in the presence of a selenium flux.
Claim 32
Independent Claim
164 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (3) then depositing gallium onto the deposited copper until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (d) depositing an additional amount copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (e) heating the partially completed absorber layer with its additional amount copper in the presence of a selenium flux.
Claim 33
Independent Claim
164 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (3) then depositing gallium onto the deposited copper until the atomic ratio of deposited copper to deposited indium and gallium is less than 1.0; (c) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (d) depositing an additional amount copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (e) heating the partially completed absorber layer with its additional amount copper in the presence of a selenium flux.
Claim 34
Independent Claim
152 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; (4) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; (5) then depositing gallium onto the deposited copper; and (6) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; and (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 35
Independent Claim
152 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing copper onto the back contact while the substrate is at about 275° C.; (2) then depositing gallium onto the deposited copper; (3) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; (4) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; (5) then depositing gallium onto the deposited copper; and (6) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; and (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 36
Dependent Claim
86 words
A method of manufacturing a thin film photovoltaic device according to claim 25 wherein said step (c) comprises the steps of: (1) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (2) depositing an additional amount of copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (3) heating the partially completed absorber layer with its additional amount of copper in the presence of a selenium flux.
Claim 37
Dependent Claim
19 words
A product/according to claim 29 , further characterized by having been made by the process of claim 30 .
Claim 38
Dependent Claim
10 words
A product made by the process of claim 29 .
Claim 39
Independent Claim
158 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; (3) then depositing gallium onto the deposited copper, (4) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; (5) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (6) then depositing gallium onto the deposited copper; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 40
Independent Claim
158 words
A method of manufacturing a thin film photovoltaic device comprising the steps of: (a) providing a substrate carrying a back contact; (b) forming a precursor on the back contact by: (1) first depositing indium in the presence of a selenium flux onto the back contact while the substrate is at about 275° C.; (2) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; (3) then depositing gallium onto the deposited copper, (4) then depositing indium in the presence of a selenium flux onto the deposited gallium while the substrate is at about 275° C.; (5) then depositing copper onto the indium deposited in the presence of a selenium flux while the substrate is at about 275° C.; and (6) then depositing gallium onto the deposited copper; (c) heating the precursor in the presence of a selenium flux to a temperature substantially higher than 275° C.
Claim 41
Dependent Claim
10 words
A product made by the process of claim 33 .
Claim 42
Dependent Claim
86 words
A method of manufacturing a thin film photovoltaic device according to claim 33 wherein said step (c) comprises the steps of: (1) heating the precursor in the presence of a selenium flux thereby creating a partially completed absorber layer; (2) depositing an additional amount of copper onto the partially completed absorber layer, thereby changing the atomic ratio of deposited copper to deposited indium and gallium; and (3) heating the partially completed absorber layer with its additional amount of copper in the presence of a selenium flux.
Claim 43
Dependent Claim
19 words
A product/according to claim 33 , further characterized by having been made by the process of claim 35 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-07-09 | 2005-01-08 | 2005-07-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-07-09 | 2009-01-08 | 2009-07-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-07-09 | 2013-01-08 | 2013-07-10 | $7700.00 | Window Closed / Lapsed |