US6207532B1
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US
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STI process for improving isolation for deep sub-micron application
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-09-30
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Granted: 2001-03-27
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Expires: 2019-09-30
Abstract
Abstract A new method is provided for the creation of a Shallow Trench Isolation region. A layer of pad oxide is deposited on the surface of a substrate; a layer of nitride is deposited over the layer of pad oxide. The layers of pad oxide and nitride are patterned and etched over the region where the STI is to be formed, a trench is etched in the silicon for the STI region. A layer of TEOS, that serves as a buffer spacer oxide, is deposited over the surface of the layer of nitride thereby including the inside of the created trench. The layer of TEOS is etched removing the TEOS from the surface of the nitride and from the bottom of the trench but leaving a layer of TEOS in place along the sidewalls of the trench. The bottom of the trench is next etched after which the TEOS spacer buffer is removed from the sidewalls of the trench. The sidewalls of the trench now have a non-linear profile. A layer of TEOS is deposited and polished leaving the trench filled with TEOS and at the same time removing the nitride from the surface of the pad oxide. N-well and P-well implants are performed after which N+ and P+ implants are performed around the periphery of the STI trench.
Inventors
- 👤 Chrong Jung Lin
- 👤 Shui-Hung Chen
- 👤 Jiaw-Ren Shih
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:05
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/0145; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
335 words
A method of forming a narrow deep trench isolation on a semiconductor substrate, comprising the steps of: providing a semiconductor substrate; forming a pad layer over the surface of said substrate; forming a barrier layer over the surface of said pad layer; patterning said barrier layer and said pad layer forming an opening; etching said substrate through said opening forming a first trench in said substrate said first trench having sidewalls and a bottom, said first trench having sloping sidewalls whereby a surface area of a cross section of said first trench in a plane that is parallel with the surface of said substrate decreases in size the further said cross section is removed from the surface of said substrate; growing a layer of first oxide over the surface of said patterned barrier layer and said patterned pad layer thereby including inside surfaces of said first trench; forming buffer oxide spacers over said sidewalls of said first trench; etching said substrate on said bottom of said first trench forming a second trench, said second trench having sloping sidewalls whereby a surface area of a cross section of said second trench in a plane that is parallel with the surface of said substrate decreases in size the further said cross section is removed from the surface of said substrate; removing said buffer oxide spacers from said sidewalls of said first trench; depositing a second layer of oxide over the surface of said patterned barrier layer thereby including said first trench and said second trench; polishing using CMP said second layer of oxide thereby removing said second layer of oxide from above the surface of said patterned barrier layer thereby furthermore removing said patterned barrier layer from above said pad layer; performing N-well and P-well implants in the surface of said substrate said N-well and P-well implants to be aligned with and adjacent to and on opposite sides of said first and second trench; and performing N+ and P+ implants around the periphery of said first trench.
Claim 2
Independent Claim
335 words
A method of forming a narrow deep trench isolation on a semiconductor substrate, comprising the steps of: providing a semiconductor substrate; forming a pad layer over the surface of said substrate; forming a barrier layer over the surface of said pad layer; patterning said barrier layer and said pad layer forming an opening; etching said substrate through said opening forming a first trench in said substrate said first trench having sidewalls and a bottom, said first trench having sloping sidewalls whereby a surface area of a cross section of said first trench in a plane that is parallel with the surface of said substrate decreases in size the further said cross section is removed from the surface of said substrate; growing a layer of first oxide over the surface of said patterned barrier layer and said patterned pad layer thereby including inside surfaces of said first trench; forming buffer oxide spacers over said sidewalls of said first trench; etching said substrate on said bottom of said first trench forming a second trench, said second trench having sloping sidewalls whereby a surface area of a cross section of said second trench in a plane that is parallel with the surface of said substrate decreases in size the further said cross section is removed from the surface of said substrate; removing said buffer oxide spacers from said sidewalls of said first trench; depositing a second layer of oxide over the surface of said patterned barrier layer thereby including said first trench and said second trench; polishing using CMP said second layer of oxide thereby removing said second layer of oxide from above the surface of said patterned barrier layer thereby furthermore removing said patterned barrier layer from above said pad layer; performing N-well and P-well implants in the surface of said substrate said N-well and P-well implants to be aligned with and adjacent to and on opposite sides of said first and second trench; and performing N+ and P+ implants around the periphery of said first trench.
Claim 3
Dependent Claim
31 words
The method of claim 1 wherein said forming a pad layer is forming a layer of pad oxide using Low Pressure CVD to a thickness of between 20 and 500 Angstrom.
Claim 4
Dependent Claim
68 words
The method of claim 1 wherein said forming a barrier layer over the surface of said pad layer is depositing a layer containing silicon nitride using LPCVD or PECVD procedures, at a temperature between about 200 and 800 degrees C., to a thickness between about 200 and 5000 Angstrom employing SiN or SiO x N y as a silicon source material and ammonia as a nitrogen source material.
Claim 5
Dependent Claim
55 words
The method of claim 1 wherein said patterning said barrier layer and said pad layer forming an opening is performing an anisotropical etched with a plasma gas containing carbon tetrafloride (CF 4 ) containing fluorine ions, in a commercial etcher such as a parallel plate RIE apparatus or an electron cyclotron resonance (ECR) plasma reactor.
Claim 6
Dependent Claim
60 words
The method of claim 1 wherein said patterning said barrier layer and said pad layer forming an opening is using He/NF 3 as an etchant at a temperature of between about 80 and 100 degrees C. and a pressure of about 1.20 and 1.30 Torr for a time of between about 20 and 30 seconds using a dry etch process.
Claim 7
Dependent Claim
69 words
The method of claim 1 wherein said etching said substrate through said opening forming a first trench is using a dry etch wherein the wafer is exposed to a plasma containing one or more of the elements selected for the group comprising halogenated compounds such as CF 4 , CHF 3 , SF 6 or NF 3 or gases such as O 2 , Ar or N 2 .
Claim 8
Dependent Claim
48 words
The method of claim 1 wherein said growing a layer of first oxide over the surface of said patterned barrier layer is depositing a layer of TEOS using PECVD at a temperature between about 300 and 700 degrees C. to a thickness between about 1000 and 3000 Angstrom.
Claim 9
Dependent Claim
77 words
The method of claim 1 wherein said forming buffer oxide spacers over said sidewalls of said first trench is etching said layer of TEOS using reactive ion, plasma or sputter etch technologies or anisotropic RIE thereby applying as etchant either hot phosphoric acid or CHF 3 or CF 4 —O 2 —He thereby removing said TEOS from the surface of said barrier layer thereby furthermore leaving said TEOS in place along the sidewalls of said first trench.
Claim 10
Dependent Claim
69 words
The method of claim 1 wherein said etching said substrate on said bottom of said first trench is using a dry etch wherein the wafer is exposed to a plasma containing one or more of the elements selected for the group comprising halogenated compounds such as CF 4 , CHF 3 , SF 6 or NF 3 or gases such as O 2 , Ar or N 2 .
Claim 11
Dependent Claim
58 words
The method of claim 1 wherein said removing said buffer oxide spacers from said sidewalls of said first trench is removing said TEOS from the sidewalls of said first trench using reactive ion, plasma or sputter etch technologies or anisotropic RIE thereby applying as etchant either hot phosphoric acid or CHF 3 or CF 4 —O 2 —He.
Claim 12
Dependent Claim
47 words
The method of claim 10 wherein said removing of said buffer oxide spacers is monitored by end-point detection using a plasma emission spectra whereby said plasma emission spectrum indicates that virtually all of the buffer oxide spacers has been removed from said sidewalls of said first trench.
Claim 13
Dependent Claim
48 words
The method of claim 1 wherein said depositing a second layer of oxide over the surface of said patterned barrier layer is depositing a layer of TEOS using PECVD at a temperature between about 300 and 700 degrees C. to a thickness between about 1000 and 3000 Angstrom.
Claim 14
Dependent Claim
36 words
The method of claim 1 wherein said Performing N+ implants is implanting arsenic or phosphorous at a dose of between about 2.0E15 and 1.0E16 ions/cm 3 and an energy of between about 20 and 70 KeV.
Claim 15
Dependent Claim
36 words
The method of claim 1 wherein said Performing P+ implants is implanting boron or indium at a dose of between about 1.0E15 and 1.0E16 ions/cm 3 and an energy of between about 50 and 90 KeV.
Claim 16
Dependent Claim
25 words
The method of claim 1 wherein the opening at the top of said first trench has a width of between about 0.25 and 0.5 um.
Claim 17
Dependent Claim
22 words
The method of claim 1 wherein the bottom of said first trench has a width of between about 0.10 and 0.20 um.
Claim 18
Dependent Claim
25 words
The method of claim 1 wherein said first trench has a depth from the surface of said substrate of between about 1.0 and 3.0 um.
Claim 19
Dependent Claim
25 words
The method of claim 1 wherein the opening at the top of said second trench has a width of between about 0.08 and 0.15 um.
Claim 20
Dependent Claim
22 words
The method of claim 1 wherein the bottom of said second trench has a width of between about 0.05 and 0.10 um.
Claim 21
Dependent Claim
25 words
The method of claim 1 wherein said second trench has a depth from the surface of said substrate of between about 4.0 and 10.0 um.
Claim 22
Independent Claim
437 words
A method of forming a narrow deep trench isolation on a semiconductor substrate, comprising the steps of: providing a semiconductor substrate; forming a layer of pad oxide over the surface of said substrate to a thickness of between 20 and 500 Angstrom; forming a silicon nitride layer over the surface of said layer of pad oxide to a thickness between about 200 and 5000 Angstrom; patterning said silicon nitride layer and said pad oxide layer forming an opening said opening to overlay and align with the region on the surface of said substrate where said narrow deep trench isolation is to be formed; etching said substrate through said opening forming a first trench in said substrate said first trench having sidewalls and a bottom said first trench having a depth from the surface of said substrate of between about 1.0 and 3.0 um; depositing a first layer of TEOS to a thickness between about 1000 and 3000 Angstrom over the surface of said patterned silicon nitride layer thereby including the inside surfaces of said first trench; forming TEOS spacers over said sidewalls of said first trench to a thickness of between about 300 and 600 Angstrom said TEOS spacers to be formed by etching said deposited layer of TEOS; etching said substrate on said bottom of said first trench forming a second trench said second trench having a depth from the surface of said substrate of between about 4.0 and 10.0 um; removing said TEOS spacers from said sidewalls of said first trench; depositing a second layer of TEOS oxide over the surface of said patterned silicon nitride layer to a thickness between about 1000 and 3000 Angstrom thereby including said first trench and said second trench; polishing said second layer of TEOS oxide using CMP thereby removing said second layer of TEOS oxide from above the surface of said patterned silicon nitride layer thereby furthermore removing said patterned silicon nitride layer from above said pad oxide layer; performing N-well and P-well implants in the surface of said substrate said N-well and P-well implants to be aligned with and adjacent to and on opposite sides of said first and second trench; and performing N+ and P+ implants around the periphery of said first trench wherein said performing N+ implants is implanting arsenic or phosphorous at a dose of between about 2.0E15 and 1.0E16 ions/cm 3 and an energy of between about 20 and 70 KeV wherein furthermore said performing P+ implants is implanting boron or indium at a dose of between about 1.0E15 and 1.0E16 ions/cm 3 and an energy of between about 50 and 90 KeV.
Claim 23
Independent Claim
437 words
A method of forming a narrow deep trench isolation on a semiconductor substrate, comprising the steps of: providing a semiconductor substrate; forming a layer of pad oxide over the surface of said substrate to a thickness of between 20 and 500 Angstrom; forming a silicon nitride layer over the surface of said layer of pad oxide to a thickness between about 200 and 5000 Angstrom; patterning said silicon nitride layer and said pad oxide layer forming an opening said opening to overlay and align with the region on the surface of said substrate where said narrow deep trench isolation is to be formed; etching said substrate through said opening forming a first trench in said substrate said first trench having sidewalls and a bottom said first trench having a depth from the surface of said substrate of between about 1.0 and 3.0 um; depositing a first layer of TEOS to a thickness between about 1000 and 3000 Angstrom over the surface of said patterned silicon nitride layer thereby including the inside surfaces of said first trench; forming TEOS spacers over said sidewalls of said first trench to a thickness of between about 300 and 600 Angstrom said TEOS spacers to be formed by etching said deposited layer of TEOS; etching said substrate on said bottom of said first trench forming a second trench said second trench having a depth from the surface of said substrate of between about 4.0 and 10.0 um; removing said TEOS spacers from said sidewalls of said first trench; depositing a second layer of TEOS oxide over the surface of said patterned silicon nitride layer to a thickness between about 1000 and 3000 Angstrom thereby including said first trench and said second trench; polishing said second layer of TEOS oxide using CMP thereby removing said second layer of TEOS oxide from above the surface of said patterned silicon nitride layer thereby furthermore removing said patterned silicon nitride layer from above said pad oxide layer; performing N-well and P-well implants in the surface of said substrate said N-well and P-well implants to be aligned with and adjacent to and on opposite sides of said first and second trench; and performing N+ and P+ implants around the periphery of said first trench wherein said performing N+ implants is implanting arsenic or phosphorous at a dose of between about 2.0E15 and 1.0E16 ions/cm 3 and an energy of between about 20 and 70 KeV wherein furthermore said performing P+ implants is implanting boron or indium at a dose of between about 1.0E15 and 1.0E16 ions/cm 3 and an energy of between about 50 and 90 KeV.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-26 | 2004-09-25 | 2005-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-26 | 2008-09-25 | 2009-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-26 | 2012-09-25 | 2013-03-27 | $7700.00 | Window Closed / Lapsed |