US6207302B1
Expired / Lapsed
US
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Electroluminescent device and method of producing the same
Assignee: Denso Corp
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Filing: 1998-03-02
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Granted: 2001-03-27
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Expires: 2018-03-02
Abstract
Abstract First and second insulating layers in an EL device are respectively composed of Al 2 O 3 /TiOx:Ba laminated layers. The Al 2 O 3 /TiOx:Ba laminated layers are formed by alternately laminating Al 2 O 3 layers and TiO 2 layers added with Ba by an ALE method. Adding Ba into the TiO 2 layers mitigates a change in resistivity thereof with respect to a change in temperature. As a result, the EL device provides an excellent voltage withstanding performance which is stable against the changes in the temperature.
Inventors
- 👤 Kazuhiko Sugiura
- 👤 Masayuki Katayama
- 👤 Nobuei Ito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:25
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/403; C23C16/409; Y; Y10; Y10S; Y10S428/00; Y10S428/917; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
90 words
An electroluminescent device comprising: first and second electrodes; a luminescent layer disposed between the first and second electrodes; and an insulating layer disposed between the luminescent layer and the first electrode, and having a laminated structure comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first layers including an insulating material, the second layers including titanium dioxide and an element for mitigating a change in resistivity of the insulating layer relative to a change in temperature.
Claim 2
Dependent Claim
90 words
An electroluminescent device comprising: first and second electrodes; a luminescent layer disposed between the first and second electrodes; and an insulating layer disposed between the luminescent layer and the first electrode, and having a laminated structure comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first layers including an insulating material, the second layers including titanium dioxide and an element for mitigating a change in resistivity of the insulating layer relative to a change in temperature.
Claim 3
Dependent Claim
28 words
An electroluminescent device of claim 1 , wherein an atomic ratio of the element to titanium in the second layers is in a range of 0.01 to 1.
Claim 4
Dependent Claim
24 words
An electroluminescent device of claim 1 , wherein the element is selected from a group consisting of calcium, barium, strontium, aluminum, lead and magnesium.
Claim 5
Dependent Claim
24 words
An electroluminescent device of claim 1 , wherein a resistivity of the insulating material of the first layers is larger than 1×10 10 Ωcm.
Claim 6
Dependent Claim
29 words
An electroluminescent device of claim 4 , wherein the insulating material of the first layers is selected from a group consisting of aluminum oxide, magnesium oxide and silicon oxide.
Claim 7
Dependent Claim
27 words
An electroluminescent device of claim 5 , wherein the insulating material of the first layers is aluminum oxide, and the element of the second layers is aluminum.
Claim 8
Dependent Claim
27 words
An electroluminescent device of claim 1 , wherein one of the first layers contacts the luminescent layer and another of the first layers contacts the first electrode.
Claim 9
Dependent Claim
31 words
An electroluminescent device of claim 1 , wherein each of the first layers and each of the second layers has a thickness in a range of 0.5 nm to 100 nm.
Claim 10
Dependent Claim
27 words
An electroluminescent device of claim 1 , wherein the insulating layer includes 10 to 300 of the first layers and 10 to 300 of the second layers.
Claim 11
Dependent Claim
85 words
An electroluminescent device comprising: first and second electrodes; a luminescent layer disposed between the first and second electrodes; and an insulating layer disposed between the luminescent layer and the first electrode and having al laminated structure comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first layers including an insulating material, the second layers being made of a material including titanium and oxygen and having a positive temperature coefficient of resistivity.
Claim 12
Dependent Claim
85 words
An electroluminescent device comprising: first and second electrodes; a luminescent layer disposed between the first and second electrodes; and an insulating layer disposed between the luminescent layer and the first electrode and having al laminated structure comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first layers including an insulating material, the second layers being made of a material including titanium and oxygen and having a positive temperature coefficient of resistivity.
Claim 13
Dependent Claim
29 words
An electroluminescent device of claim 10 , wherein the second layers include at least one material selected from a group consisting of calcium titanate, barium titanate and strontium titanate.
Claim 14
Dependent Claim
24 words
An electroluminescent device of claim 10 , wherein a resistivity of the insulating material of the first layers is larger than 1×10 10 Ωcm.
Claim 15
Dependent Claim
29 words
An electroluminescent device of claim 12 , wherein the insulating material of the first layers is selected from a group consisting of aluminum oxide, magnesium oxide and silicon oxide.
Claim 16
Dependent Claim
27 words
An electroluminescent device of claim 10 , wherein one of the first layers contacts the luminescent layer and another of the first layers contacts the first electrode.
Claim 17
Dependent Claim
31 words
An electroluminescent device of claim 10 , wherein each of the first layers and each of the second layers has a thickness in a range of 0.5 nm to 100 nm.
Claim 18
Dependent Claim
27 words
An electroluminescent device of claim 10 , wherein the insulating layer includes 10 to 300 of the first layers and 10 to 300 of the second layers.
Claim 19
Independent Claim
126 words
A method of forming an electroluminescent device, the method comprising: providing a first electrode; forming on the first electrode a first insulating layer comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first and second layers each being laminated by an atomic layer epitaxy method, the first layers including an insulating material and the second layers including titanium, oxygen, and an element selected from the group consisting of calcium, barium, strontium, aluminum, lead, and magnesium; forming a luminescent layer on the first insulating layer; optionally forming a second insulating layer on the luminescent layer; and forming a second electrode so that the luminescent layer is interposed between the first and second electrodes.
Claim 20
Independent Claim
126 words
A method of forming an electroluminescent device, the method comprising: providing a first electrode; forming on the first electrode a first insulating layer comprising a plurality of first layers and a plurality of second layers, the first layers being laminated alternately with the second layers, the first and second layers each being laminated by an atomic layer epitaxy method, the first layers including an insulating material and the second layers including titanium, oxygen, and an element selected from the group consisting of calcium, barium, strontium, aluminum, lead, and magnesium; forming a luminescent layer on the first insulating layer; optionally forming a second insulating layer on the luminescent layer; and forming a second electrode so that the luminescent layer is interposed between the first and second electrodes.
Claim 21
Dependent Claim
31 words
A method of claim 17 , wherein the insulating material of the first layers is at least one selected from a group consisting of aluminum oxide, magnesium oxide and silicon oxide.
Claim 22
Dependent Claim
26 words
A method of claim 18 , wherein the insulating material of the first layers is aluminum oxide, and the element of the second layers is aluminum.
Claim 23
Dependent Claim
13 words
A method of claim 17 , wherein the second layers include titanium oxide.
Claim 24
Dependent Claim
50 words
A method of claim 20 , wherein: the second layers are formed in a chamber using a first source gas for titanium and a second source gas for the element; and said forming of the second layers comprises a step of introducing only the second source gas into the chamber.
Claim 25
Dependent Claim
48 words
A method of claim 20 , wherein: the second layers are formed in a chamber using a first source gas for titanium and a second source gas for the element; and said forming of the second layers comprises introducing the first and second gases simultaneously into the chamber.
Claim 26
Dependent Claim
28 words
A method of claim 17 , wherein the second layers include at least one material selected from a group consisting of calcium titanate, barium titanate, and strontium titanate.
Claim 27
Dependent Claim
48 words
A method of claim 23 , wherein said forming of the second layer comprises sequentially introducing a first source gas for titanium, introducing a second source gas for oxygen, introducing a third source gas for the element, and introducing the second source gas for oxygen, in this order.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-26 | 2004-09-25 | 2005-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-26 | 2008-09-25 | 2009-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-26 | 2012-09-25 | 2013-03-27 | $7700.00 | Window Closed / Lapsed |