US6203619B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiple station apparatus for liquid source fabrication of thin films
Assignee: Symetrix Corp
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Filing: 1998-10-26
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Granted: 2001-03-20
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Expires: 2018-10-26
Abstract
Abstract An apparatus and method are disclosed for fabricating thin films for use in an active component of an integrated circuit by the use of an assembly line type process. A plurality of substrate stations are located on a platen which is rotated to move each station sequentially between a misted deposition device, a drying device, and a solidification device. The misted deposition device includes a mist showerhead in a movable housing. The mist showerhead separates a velocity reduction chamber from a deposition chamber.
Inventors
- 👤 Larry D. McMillan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:36
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0462; H10P72/0464
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
117 words
An apparatus for fabricating a thin film, said apparatus comprising a. a predetermined sequence of devices, said predetermined sequence including: a misted deposition device including a mist showerhead, a velocity reduction chamber and a deposition chamber, said mist showerhead separating said velocity reduction chamber from said deposition chamber; a drying device; and a heating device; b) a movable platen; and c) a plurality of substrate stations located on said movable platen; d) said movable platen oriented with respect to said predetermined sequence of said devices and said plurality of stations arranged on said movable platen so that each one of said plurality of stations simultaneously comes into the operational vicinity of a different one of said devices.
Claim 2
Independent Claim
117 words
An apparatus for fabricating a thin film, said apparatus comprising a. a predetermined sequence of devices, said predetermined sequence including: a misted deposition device including a mist showerhead, a velocity reduction chamber and a deposition chamber, said mist showerhead separating said velocity reduction chamber from said deposition chamber; a drying device; and a heating device; b) a movable platen; and c) a plurality of substrate stations located on said movable platen; d) said movable platen oriented with respect to said predetermined sequence of said devices and said plurality of stations arranged on said movable platen so that each one of said plurality of stations simultaneously comes into the operational vicinity of a different one of said devices.
Claim 3
Dependent Claim
30 words
An apparatus as in claim 1 and further comprising a mist particle electrical acceleration system and wherein said mist showerhead comprises an electrode of a mist particle electrical acceleration system.
Claim 4
Dependent Claim
23 words
An apparatus as in claim 1 wherein said drying device comprises a heater, and said solidification device comprises a rapid thermal processing device.
Claim 5
Dependent Claim
19 words
An apparatus as in claim 1 wherein said predetermined sequence further comprises a pretreatment device before said deposition device.
Claim 6
Dependent Claim
15 words
An apparatus as in claim 1 wherein said predetermined sequence further comprises a cooling device.
Claim 7
Dependent Claim
22 words
An apparatus as in claim 5 wherein said cooling device is located after said rapid thermal processing device in said predetermined sequence.
Claim 8
Dependent Claim
12 words
An apparatus as in claim 1 and further including a loading/unloading device.
Claim 9
Dependent Claim
17 words
An apparatus as in claim 3 wherein said heater comprises a drying heater and a baking heater.
Claim 10
Dependent Claim
44 words
An apparatus as in claim 1 wherein said predetermined sequence of devices are arranged in a substantially circular predetermined sequence, said movable platen is substantially circular, and said stations are angularly distributed on said movable platen around the axis rotation of said movable platen.
Claim 11
Dependent Claim
26 words
An apparatus as in claim 9 and further including a drive motor for rotating said circular movable platen with respect to said predetermined sequence of devices.
Claim 12
Dependent Claim
19 words
An apparatus as in claim 1 wherein each of said plurality of stations further comprises a rotatable substrate holder.
Claim 13
Dependent Claim
17 words
An apparatus as in claim 1 wherein each of said plurality of stations includes an exhaust aperture.
Claim 14
Dependent Claim
62 words
An apparatus as in claim 12 wherein said deposition device comprises a misted deposition device, and said deposition device further includes a housing forming a deposition chamber in the operational vicinity of said deposition device, a showerhead for introducing said mist into said deposition chamber, and wherein said apparatus includes a vacuum pump in fluidic communication with each of said exhaust apertures.
Claim 15
Dependent Claim
22 words
An apparatus as in claim 1 and further including a vacuum chamber in which said devices and said movable platen are enclosed.
Claim 16
Dependent Claim
60 words
An apparatus as in claim 1 wherein said predetermined sequence of devices includes a plurality of deposition devices, an equal plurality of drying devices, and an equal plurality of heating devices, arranged in a periodic sequence with each of said drying devices following one of said deposition devices and each of said heating devices following one of said drying devices.
Claim 17
Dependent Claim
31 words
An apparatus as in claim 15 wherein each of said plurality of drying devices comprises a heater, and each of said plurality of solidification devices comprises a rapid thermal processing device.
Claim 18
Dependent Claim
30 words
An apparatus as in claim 15 wherein said periodic sequence further comprises an equal plurality of pre-treatment devices, each placed in said periodic sequence before one of said deposition devices.
Claim 19
Dependent Claim
30 words
An apparatus as in claim 15 wherein said periodic sequence further comprises an equal plurality of cooling devices, each placed in said periodic sequence after one of said solidification devices.
Claim 20
Dependent Claim
89 words
An apparatus as in claim 15 wherein said periodic sequence comprises a plurality of substantially concentric rings, each of said rings a different distance from a common axis, each of said rings including one of said deposition devices, one of said drying devices, and one of said rapid thermal processing devices, said movable platen is substantially circular, and said stations are angularly distributed on said movable platen around the axis of rotation of said movable platen in a plurality of circles corresponding to said rings of said periodic sequence.
Claim 21
Dependent Claim
40 words
An apparatus as in claim 1 wherein said devices are arranged in a substantially linear predetermined sequence, said movable platen is substantially linear, and said stations are linearly distributed on said movable platen along the length of said movable platen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-19 | 2004-09-18 | 2005-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-19 | 2008-09-18 | 2009-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-19 | 2012-09-18 | 2013-03-20 | $7700.00 | Window Closed / Lapsed |