Patent US6177151B1 successfully refreshed from Google Patents.
US6177151B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Matrix assisted pulsed laser evaporation direct write
Assignee: United States Department of the Navy
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Filing: 1999-05-25
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Granted: 2001-01-23
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Expires: 2019-05-25
Abstract
Abstract An device for depositing a transfer material onto a receiving substrate includes a source of pulsed laser energy, a receiving substrate, and a target substrate. The target substrate comprises a laser transparent support having a back surface and a front surface. The front surface has a coating that comprises a mixture of the transfer material to be deposited and a matrix material. The matrix material is a material that has the property that, when it is exposed to pulsed laser energy, it is more volatile than the transfer material. The source of pulsed laser energy is be positioned in relation to the target substrate so that pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support. The receiving substrate is positioned in a spaced relation to the target substrate so that the transfer material in the desorbed coating can be deposited at a defined location on the receiving substrate.
Inventors
- 👤 Douglas B. Chrisey
- 👤 R. Andrew McGill
- 👤 Alberto Pique
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:33
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; C23C14/22; C23C14/24; C23C14/28; B; B01; B01J; B01J2219/00; B01J2219/00274; B01J2219/00277; B01J2219/00351; B01J2219/00436; B01J2219/00441; B01J2219/00497; B01J2219/00527; B01J2219/00583; B01J2219/00596; B01J2219/00603; B01J2219/00605; B01J2219/0061; B01J2219/00612; B01J2219/00659; B01J2219/00718; B01J2219/0072; B01J2219/00745; B01J2219/0075; C40; C40B; C40B40/00; C40B40/18; C40B60/00; C40B60/14; H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7432
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
341 words
A method for creating a circuit element for an electronic device, the method comprising the steps of (a) providing a pulsed laser, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a transfer material and a matrix material, wherein the transfer material comprises particles of electronic material selected from the group consisting of metal particles, dielectric particles, ferroelectric particles, ferrite particles, ferrimagnetic particles, ferromagnetic particles, phosphor particles, superconductor particles and semiconductor particles, wherein the coating is a colloidal or particulate suspension of the particles of the transfer material in the matrix material, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the pulsed laser in relation to the target substrate and exposing the target substrate to pulsed laser energy from the pulsed laser so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the particles of the transfer material in the desorbed coating are deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the deposited particles of transfer material form a connected deposit of transfer material wherein the transfer material in the deposit is better connected or bonded than was the transfer material in the coating on the laser transparent support and wherein the deposit is patterned to form an electronic circuit element, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 2
Independent Claim
341 words
A method for creating a circuit element for an electronic device, the method comprising the steps of (a) providing a pulsed laser, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a transfer material and a matrix material, wherein the transfer material comprises particles of electronic material selected from the group consisting of metal particles, dielectric particles, ferroelectric particles, ferrite particles, ferrimagnetic particles, ferromagnetic particles, phosphor particles, superconductor particles and semiconductor particles, wherein the coating is a colloidal or particulate suspension of the particles of the transfer material in the matrix material, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the pulsed laser in relation to the target substrate and exposing the target substrate to pulsed laser energy from the pulsed laser so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the particles of the transfer material in the desorbed coating are deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the deposited particles of transfer material form a connected deposit of transfer material wherein the transfer material in the deposit is better connected or bonded than was the transfer material in the coating on the laser transparent support and wherein the deposit is patterned to form an electronic circuit element, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein the particles of the transfer material have a grain size of between about 10 nm and about 20 μm.
Claim 4
Dependent Claim
49 words
The method of claim 1 wherein the transfer material is a mixture of particles having different grain sizes and where the size distribution of the particles is selected so that the particles that are deposited in step (d) pack together more closely than do particles having a uniform size.
Claim 5
Dependent Claim
18 words
The method of claim 1 wherein the transfer material comprises metal particles coated with organic precursors to metals.
Claim 6
Dependent Claim
18 words
The method of claim 1 wherein the transfer material comprises ceramic particles coated with organic precursors to ceramics.
Claim 7
Dependent Claim
28 words
The method of claim 1 wherein the coating on the front surface of the target substrate has a thickness of between about 0.1 μm and about 100 μm.
Claim 8
Dependent Claim
28 words
The method of claim 1 wherein the coating on the front surface of the target substrate has a thickness of between about 1 μm and about 20 μm.
Claim 9
Dependent Claim
35 words
The method of claim 1 wherein the matrix material is selected from the group consisting of water, aryl compounds, arene compounds, halogenated organic compounds, hydrocarbons, ketones, esters, ethers, carboxylic acids, alcohols, phenols and phosphoric acid.
Claim 10
Dependent Claim
46 words
The method of claim 1 wherein the matrix material has the property of being a liquid at room temperature and wherein the coating is applied to the front surface of the laser transparent support as a liquid and then is frozen to form a solid coating.
Claim 11
Dependent Claim
23 words
The method of claim 1 wherein the matrix material is a material that decomposes into volatile components when exposed to pulsed laser energy.
Claim 12
Dependent Claim
13 words
The method of claim 10 wherein the matrix material is an addition polymer.
Claim 13
Dependent Claim
25 words
The method of claim 10 wherein the matrix material is selected from the group consisting of poly(alkenes), poly(acrylics), poly(methacrylics), poly(vinyls), poly(vinylketones), poly(styrenes), poly(oxides) and polyethers.
Claim 14
Dependent Claim
12 words
The method of claim 10 wherein the matrix material is a poly(methacrylic).
Claim 15
Dependent Claim
12 words
The method of claim 10 wherein the matrix material is a poly(vinylketone).
Claim 16
Dependent Claim
65 words
The method of claim 10 wherein the matrix material is selected from the group consisting of polyacrylic acid -butyl ester, nitrocellulose, poly(methacrylic acid)-methyl ester (PMMA), poly(methacrylic acid)-n butyl ester (PBMA), poly(methacrylic acid)-t butyl ester (PtBMA), polytetrafluoroethylene (PTFE), polyperfluoropropylene, poly N-vinyl carbazole, poly(methyl isopropenyl ketone), poly alphamethyl styrene, polyacrylic acid, polyvinylacetate, a mixture of polyvinylacetate and zincbromide, poly(oxymethylene), phenol-formaldehyde positive photoresist resins and photobleachable aromatic dyes.
Claim 17
Dependent Claim
58 words
The method of claim 1 including the further step of positioning the source of pulsed laser energy with respect to the receiving substrate so that the pulsed laser energy can be directed to strike the receiving substrate whereby the receiving substrate can be pretreated or whereby a transfer material deposited on the substrate can be annealed or etched.
Claim 18
Independent Claim
277 words
A method for creating a sensing element for a device for sensing the presence of a chemical analyte, the method comprising the steps of (a) providing a source of pulsed laser energy, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a mixture of a transfer material and a matrix material, wherein the transfer material is a material that selectively interacts with the chemical analyte, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the source of pulsed laser energy in relation to the target substrate and exposing the target substrate to pulsed laser energy so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the transfer material in the desorbed coating is deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the transfer material is deposited in a pattern that forms a sensing element of a sensing device, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 19
Independent Claim
277 words
A method for creating a sensing element for a device for sensing the presence of a chemical analyte, the method comprising the steps of (a) providing a source of pulsed laser energy, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a mixture of a transfer material and a matrix material, wherein the transfer material is a material that selectively interacts with the chemical analyte, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the source of pulsed laser energy in relation to the target substrate and exposing the target substrate to pulsed laser energy so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the transfer material in the desorbed coating is deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the transfer material is deposited in a pattern that forms a sensing element of a sensing device, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 20
Dependent Claim
13 words
The method of claim 17 wherein the transfer material is a chemoselective polymer.
Claim 21
Dependent Claim
43 words
The method of claim 17 wherein the transfer material is selected from the group consisting of a polymer with hydrogen bond acidic properties, a polymer with hydrogen bond basic properties, a dipolar polymer, a polarizable polymer, a nonpolar polymer and functionalized nanometal particles.
Claim 22
Dependent Claim
13 words
The method of claim 17 wherein the transfer material is poly(oxy{methyl[4-hydroxy-4,4,bis(trifluoromethyl)but-1-en-1-yl] silylene}) (SXFA).
Claim 23
Dependent Claim
13 words
The method of claim 17 wherein the transfer material is poly(4-vinylhexafluorocumyl alcohol (P4V).
Claim 24
Dependent Claim
35 words
The method of claim 17 wherein the matrix material is selected from the group consisting of water, aryl compounds, arene compounds, halogenated organic compounds, hydrocarbons, ketones, esters, ethers, carboxylic acids, alcohols, phenols and phosphoric acid.
Claim 25
Dependent Claim
46 words
The method of claim 17 wherein the matrix material has the property of being a liquid at room temperature and wherein the coating is applied to the front surface of the laser transparent support as a liquid and then is frozen to form a solid coating.
Claim 26
Dependent Claim
23 words
The method of claim 17 wherein the matrix material is a material that decomposes into volatile components when exposed to pulsed laser energy.
Claim 27
Dependent Claim
13 words
The method of claim 24 wherein the matrix material is an addition polymer.
Claim 28
Dependent Claim
25 words
The method of claim 24 wherein the matrix material is selected from the group consisting of poly(alkenes), poly(acrylics), poly(methacrylics), poly(vinyls), poly(vinylketones), poly(styrenes), poly(oxides) and polyethers.
Claim 29
Dependent Claim
66 words
The method of claim 24 wherein the matrix material is selected from the group consisting of polyacrylic acid -butyl ester, nitrocellulose, poly(methacrylic acid)-methyl ester (PMMA), poly(methacrylic acid)-n butyl ester (PBMA), poly(methacrylic acid)-t butyl ester (PtBMA), polytetrafluoroethylene (PTFE), polyperfluoropropylene, poly N-vinyl carbazole, poly(methyl isopropenyl ketone), poly alphamethyl styrene, polyacrylic acid, polyvinylacetate, a mixture of polyvinylacetate and zincbromide , poly(oxymethylene), phenol-formaldehyde positive photoresist resins and photobleachable aromatic dyes.
Claim 30
Independent Claim
281 words
A method for creating a sensing element for a device for sensing the presence of a biochemical or biological analyte, the method comprising the steps of (a) providing a source of pulsed laser energy, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a mixture of a transfer material and a matrix material, wherein the transfer material is a material that selectively interacts with the biochemical or biological analyte, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the source of pulsed laser energy in relation to the target substrate and exposing the target substrate to pulsed laser energy so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the transfer material in the desorbed coating is deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the transfer material is deposited in a pattern that forms a sensing element of a sensing device, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 31
Independent Claim
281 words
A method for creating a sensing element for a device for sensing the presence of a biochemical or biological analyte, the method comprising the steps of (a) providing a source of pulsed laser energy, (b) providing a receiving substrate, (c) providing a target substrate comprising a laser-transparent support having a back surface and a front surface, wherein the front surface has a coating that comprises a mixture of a transfer material and a matrix material, wherein the transfer material is a material that selectively interacts with the biochemical or biological analyte, and wherein the matrix material has the property of being or becoming more volatile than the transfer material when exposed to pulsed laser energy, (c) positioning the source of pulsed laser energy in relation to the target substrate and exposing the target substrate to pulsed laser energy so that the pulsed laser energy is directed through the back surface of the target substrate and through the laser-transparent support to strike the coating at a defined target location with sufficient energy to volatilize the matrix material at the location, causing the coating to desorb from the location and be lifted from the surface of the support, (d) positioning the receiving substrate in a spaced relation to the target substrate so that the transfer material in the desorbed coating is deposited at a defined receiving location on the receiving substrate, and (e) repeating steps (c) and (d) at successive defined target locations and successive defined receiving locations so that the transfer material is deposited in a pattern that forms a sensing element of a sensing device, and wherein steps (c), (d) and (e) are carried out at room temperature and atmospheric pressure.
Claim 32
Dependent Claim
37 words
The method of claim 28 wherein the transfer material is selected from the group consisting of proteins, oligopeptides, polypeptides, whole cells, biological tissue, cofactors, nucleic acids, DNA, RNA, antigens, oligosaccharides, polysaccharides, oligonucleotides, lectins, biotin, streptavidin, and lipids.
Claim 33
Dependent Claim
35 words
The method of claim 28 wherein the matrix material is selected from the group consisting of water, aryl compounds, arene compounds, halogenated organic compounds, hydrocarbons, ketones, esters, ethers, carboxylic acids, alcohols, phenols and phosphoric acid.
Claim 34
Dependent Claim
46 words
The method of claim 28 wherein the matrix material has the property of being a liquid at room temperature and wherein the coating is applied to the front surface of the laser transparent support as a liquid and then is frozen to form a solid coating.
Claim 35
Dependent Claim
23 words
The method of claim 28 wherein the matrix material is a material that decomposes into volatile components when exposed to pulsed laser energy.
Claim 36
Dependent Claim
13 words
The method of claim 32 wherein the matrix material is an addition polymer.
Claim 37
Dependent Claim
26 words
The method of claim 32 wherein the matrix material is is selected from the group consisting of poly(alkenes), poly(acrylics), poly(methacrylics), poly(vinyls), poly(vinylketones), poly(styrenes), poly(oxides) and polyethers.
Claim 38
Dependent Claim
65 words
The method of claim 32 wherein the matrix material is selected from the group consisting of polyacrylic acid -butyl ester, nitrocellulose, poly(methacrylic acid)-methyl ester (PMMA), poly(methacrylic acid)-n butyl ester (PBMA), poly(methacrylic acid)-t butyl ester (PtBMA), polytetrafluoroethylene (PTFE), polyperfluoropropylene, poly N-vinyl carbazole, poly(methyl isopropenyl ketone), poly alphamethyl styrene, polyacrylic acid, polyvinylacetate, a mixture of polyvinylacetate and zincbromide, poly(oxymethylene), phenol-formaldehyde positive photoresist resins and photobleachable aromatic dyes.
References Cited (Backward Citations)
DE2113336A1
Cited
US3745586A
Cited
US3978247A
Cited
US4064205A
Cited
US4245003A
Cited
US4702958A
Cited
US4752455A
Cited
US4970196A
Cited
US4895735A
Cited
US5156938A
Cited
US4987006A
Cited
US5171650A
Cited
US5256506A
Cited
US5173441A
Cited
US5292559A
Cited
US5725914A
Cited
US5492861A
Cited
US5736464A
Cited
US5308737A
Cited
WO1995013195A1
Cited
US5567336A
Cited
US5725706A
Cited
US6060127A
Cited
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