US5725706A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser transfer deposition
Assignee: Whitaker LLC
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Filing: 1996-03-12
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Granted: 1998-03-10
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Expires: 2016-03-12
Abstract
Abstract The present invention is directed to a method for producing a smooth and continuous pressure bonded layer of a material on a base substrate through the driving force of a pulsed laser. The method comprises the steps of selecting a laser absorptive material. Then applying thereto a thin layer of the material for pressure bonding to the base substrate. Next, placing the base substrate and the thin layer of material on the laser absorptive material in a vacuum, then placing the base substrate in close proximity to the thin layer of material. Finally, directing pulsed laser energy toward the laser absorptive material and the layer to be pressure bonded, whereby the laser energy is absorbed by the laser absorptive material causing heating and vaporization thereof to a controlled depth of the laser absorptive material, leaving remaining portions of the laser absorptive material unvaporized after the vaporization to act as a support for the material to be bonded. After bonding, the thin material adheres to the base substrate when the remaining continuous absorptive material is peeled away, the vaporization having provided the necessary pressure for pressure bonding on to the base material.
Inventors
- 👤 Eben Daniel Thoma
- 👤 Richard Taylor Williams
- 👤 Jeff Cherng-chou Wu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:50
CPC Classifications
C; C23; C23C; C23C26/00; C23C14/00; C23C14/04; C23C14/048; C23C14/22; C23C14/24; C23C14/28; H; H05; H05K; H05K3/00; H05K3/02; H05K3/04; H05K3/046
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
228 words
In a method for producing a smooth and continuous pressure bonded layer of a material, selected from the group consisting of conductive, semiconductive, superconductive and insulating materials, on a base substrate through the driving force of a pulsed laser, the improvement comprising in combination therewith, the steps of (a) selecting a laser absorptive material which will provide structural support for said material for pressure bonding to said base substrate; (b) applying thereto a thin layer of said material for pressure bonding to said base substrate; (c) placing said base substrate and said thin layer of material on said laser absorptive material in a vacuum, then placing said base substrate in close proximity to said thin layer of material; and (d) directing pulsed laser energy toward said laser absorptive material and said layer to be pressure bonded, whereby said laser energy is absorbed by said laser absorptive material causing heating and vaporization thereof to a controlled depth of said laser absorptive material, leaving remaining portions of said laser absorptive material unvaporized after said vaporization to act as a support for the material to be bonded, after bonding, the thin material adheres to the base substrate when the remaining continuous absorptive material is peeled away, said vaporization providing the necessary pressure for pressure bonding on to said base material, and no laser transparent material is used to provide structural support.
Claim 2
Dependent Claim
228 words
In a method for producing a smooth and continuous pressure bonded layer of a material, selected from the group consisting of conductive, semiconductive, superconductive and insulating materials, on a base substrate through the driving force of a pulsed laser, the improvement comprising in combination therewith, the steps of (a) selecting a laser absorptive material which will provide structural support for said material for pressure bonding to said base substrate; (b) applying thereto a thin layer of said material for pressure bonding to said base substrate; (c) placing said base substrate and said thin layer of material on said laser absorptive material in a vacuum, then placing said base substrate in close proximity to said thin layer of material; and (d) directing pulsed laser energy toward said laser absorptive material and said layer to be pressure bonded, whereby said laser energy is absorbed by said laser absorptive material causing heating and vaporization thereof to a controlled depth of said laser absorptive material, leaving remaining portions of said laser absorptive material unvaporized after said vaporization to act as a support for the material to be bonded, after bonding, the thin material adheres to the base substrate when the remaining continuous absorptive material is peeled away, said vaporization providing the necessary pressure for pressure bonding on to said base material, and no laser transparent material is used to provide structural support.
Claim 3
Dependent Claim
21 words
The method of claim 1, wherein the material to be pressure bonded is gold, a gold alloy, palladium, or palladium alloy.
Claim 4
Dependent Claim
18 words
The method of claim 1, wherein the material to be pressure bonded is multiple layers of precious metals.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein said laser is an ultraviolet laser and said polymeric film has an optical coefficient of absorption of at least 2×10 4 cm -1 at the ultraviolet wavelength.
Claim 6
Dependent Claim
12 words
The method of claim 4, wherein said laser is an excimer laser.
Claim 7
Dependent Claim
39 words
The method of claim 1, wherein said laser operates at a given wavelength and said laser absorptive layer has a coefficient of absorption at the wavelength sufficient to prevent the laser beam from reaching the material to be transferred.
Claim 8
Dependent Claim
14 words
The method of claim 1, wherein the laser absorptive layer is a polymeric film.
Claim 9
Dependent Claim
12 words
The method of claim 1, wherein the base substrate is a metal.
Claim 10
Dependent Claim
13 words
The method of claim 1, wherein the base substrate is a metal alloy.
Claim 11
Dependent Claim
21 words
The method of claim 1, wherein the base material is a metal or an alloy coated with a thin metal layer.
Claim 12
Dependent Claim
34 words
The method of claim 1, further comprising cleaning the surface of the base substrate with an ion gun while the material is under vacuum, prior to transferring the layer of material to be transferred.
Claim 13
Dependent Claim
33 words
The method of claim 1, further comprising depositing a surface layer of material on the base material while the base material is under vacuum, thereby forming a clean surface for the laser transfer.
Claim 14
Dependent Claim
11 words
The method of claim 12, wherein the polymeric film is polyimide.
Claim 15
Dependent Claim
27 words
The method of claim 1, wherein the thin layer of the material for pressure bonding is deposited on the laser absorptive material while in a vacuum chamber.
Claim 16
Dependent Claim
18 words
The method of claim 14, wherein the thin layer is deposited by sputtering onto the laser absorptive material.
Claim 17
Dependent Claim
44 words
The method of claim 1, wherein various layers of materials are deposited each on different strips of the laser absorptive material and are successively transferred to the base substrate by the laser, the transferred areas are shaped by variable optical adjustment of the laser.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-09 | 2001-09-08 | 2002-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-09 | 2005-09-08 | 2006-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-09 | 2009-09-08 | 2010-03-10 | $7700.00 | Window Closed / Lapsed |