Patent EP0284176A2 successfully refreshed from Google Patents.
Patent US6162336A successfully refreshed from Google Patents.
US6162336A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Clamping ring design to reduce wafer sticking problem in metal deposition
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1999-07-12
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Granted: 2000-12-19
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Expires: 2019-07-12
Abstract
Abstract A clamping ring design that eliminates the Wafer sticking problem. In the first embodiment of the present invention the wafer clamp ring is redesigned to sharply reduce the wafer to wafer-ring contact area. In the second embodiment of the present invention a clamp ring guide is added to prolong the lifetime of the clamp ring.
Inventors
- 👤 Chin Fong Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:18
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H10P72/7611; Y; Y10; Y10S; Y10S269/00; Y10S269/903
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
163 words
An apparatus for securing a semiconductor wafer having a circular surface having a periphery in addition to having a back surface, a front surface and a center, against motion during wafer processing, comprising: a compound clamping ring having a compound structure comprising a first and a second cut-back with both first and second cut-backs facing said front surface of said wafer, further having an inner diameter defining a circular opening having a center, said compound clamping ring having one continuous planar clamping surface for pressure opposition along said periphery of said wafer front surface of said wafer to effect wafer clamping; a wafer pedestal to which said wafer is securely attached during wafer processing; and a means of further securing said wafer to said wafer pedestal during wafer processing to further control flow of gas from a processing area to said back surface of said wafer and to control flow of contaminants from said back surface of said wafer to a processing area.
Claim 2
Independent Claim
163 words
An apparatus for securing a semiconductor wafer having a circular surface having a periphery in addition to having a back surface, a front surface and a center, against motion during wafer processing, comprising: a compound clamping ring having a compound structure comprising a first and a second cut-back with both first and second cut-backs facing said front surface of said wafer, further having an inner diameter defining a circular opening having a center, said compound clamping ring having one continuous planar clamping surface for pressure opposition along said periphery of said wafer front surface of said wafer to effect wafer clamping; a wafer pedestal to which said wafer is securely attached during wafer processing; and a means of further securing said wafer to said wafer pedestal during wafer processing to further control flow of gas from a processing area to said back surface of said wafer and to control flow of contaminants from said back surface of said wafer to a processing area.
Claim 3
Dependent Claim
158 words
The apparatus of claim 1 wherein said [compound structure consists of a first and a second cut-back wherein a] first cut back is furthest removed from said center of said circular opening of said clamping ring and has a cross section which is smaller than a second cut-back closest to the center of the wafer being processed with the objective of reducing contact between the wafer which is being processed and the clamping ring so as to inhibit formation of extraneous material between said wafer and said wafer clamping ring in addition to reducing effects of wafer shadowing, and said clamping ring having said inner diameter defining said circular opening and having one continuous planar clamping surface for pressure opposition along the periphery of the front surface of said wafer surface to effect wafer clamping in an even and controllable way to inhibit flow of gases between the back surface of said wafer and a wafer processing area.
Claim 4
Dependent Claim
52 words
The apparatus of claim 1, wherein said means of further securing said wafer to said wafer pedestal during wafer processing is a suck canal within said wafer pedestal and is provided to allow control over wafer flatness during wafer processing by exerting a negative pressure on the back surface of said wafer.
Claim 5
Dependent Claim
31 words
The apparatus of claim 1, wherein in addition a coolant feed opening is provided within said wafer pedestal to allow temperature control over the surface of the wafer during wafer processing.
Claim 6
Dependent Claim
16 words
The apparatus of claim 1, wherein said compound clamping ring has a low coefficient of expansion.
Claim 7
Dependent Claim
13 words
The apparatus of claim 1, wherein said compound clamping ring is electrically conductive.
Claim 8
Dependent Claim
49 words
The apparatus of claim 1 further comprising a secondary seal or guide provided in the second cut-back of said clamping ring to further enclose discontinuous wafer edge portions along the periphery of the front surface of said wafer and to thereby increase the life time of said clamping ring.
Claim 9
Dependent Claim
42 words
The apparatus of claim 7, wherein in addition a suck canal within said wafer pedestal is provided to allow control over flatness during wafer processing by applying negative pressure to the back surface of said wafer, urging said wafer towards said pedestal.
Claim 10
Dependent Claim
41 words
The apparatus of claim 7, wherein in addition a coolant feed opening is provided within said wafer pedestal to allow temperature control over the surface of the wafer during wafer processing by feeding coolant to the back surface of said wafer.
Claim 11
Dependent Claim
12 words
The apparatus of claim 7, wherein said clamping ring is electrically conductive.
Claim 12
Dependent Claim
15 words
An apparatus of claim 7, wherein said clamping ring has a low coefficient of expansion.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-19 | 2004-06-19 | 2004-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-19 | 2008-06-19 | 2008-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-19 | 2012-06-19 | 2012-12-19 | $7700.00 | Window Closed / Lapsed |