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US6156485A
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Film scheme to solve high aspect ratio metal etch masking layer selectivity and improve photo I-line PR resolution capability in quarter-micron technology
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-01-19
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Granted: 2000-12-05
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Expires: 2019-01-19
Abstract
Abstract A method of high aspect ratio etching (HARE) of metal layers in quarter micron technology is disclosed. High aspect ratio patterns are encountered because of the shrinking lateral dimensions over the constant remaining thickness of the features of ultra large scaled integrated chips. HARE is accomplished by employing a tungsten W-hardmask with a high selectivity of 10:1 with respect to the immediately underlying aluminum-copper metal layer. In order to protect the lithographic integrity, overlying organic BARC is used to prevent reflections from the W-hardmask as well as from the underlying metal layer. The lithographic resolution is further improved by using a thin photoresist layer in combination with the high selectivity hardmask. In this manner, the tradeoff that normally has to be made between a high resolution process and a reliable metal etch is circumvented.
Inventors
- 👤 Wen-Hsiang Tang
- 👤 Yi-Fei Wang
- 👤 Chih-Shen Hung
- 👤 Cheng-Hao Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:39
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/71; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; H10P76/40; H10P76/405
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
183 words
A method of forming a high selectivity metal etch masking film comprising the steps of: providing a semiconductor substrate having a substructure of devices, and a first metal layer formed thereon; forming a dielectric layer over said first metal layer; forming a glue layer over said dielectric layer; forming a second metal layer over said glue layer; forming a W-hardmask layer over said second metal layer, wherein said hardmask layer is formed by silicon reduction of tungsten hexafluoride, WF 6 at a flow rate between about 10 to 200 sccm, at pressure between about 1 to 100 torr, and temperature between about 350 to 500° C.; forming a bottom anti-reflective coating (BARC) over said W-hardmask layer; forming an organic BARC layer over said W-hardmask layer; forming a photoresist layer over said BARC; forming said photoresist layer with metal pattern; etching said metal pattern into said BARC and W-hardmask layer underlying said photoresist layer; removing said photoresist layer; removing said organic BARC layer; and transferring said line pattern in W-hardmask layer into said second metal layer, thus completing the patterning of said metal layer.
Claim 2
Independent Claim
183 words
A method of forming a high selectivity metal etch masking film comprising the steps of: providing a semiconductor substrate having a substructure of devices, and a first metal layer formed thereon; forming a dielectric layer over said first metal layer; forming a glue layer over said dielectric layer; forming a second metal layer over said glue layer; forming a W-hardmask layer over said second metal layer, wherein said hardmask layer is formed by silicon reduction of tungsten hexafluoride, WF 6 at a flow rate between about 10 to 200 sccm, at pressure between about 1 to 100 torr, and temperature between about 350 to 500° C.; forming a bottom anti-reflective coating (BARC) over said W-hardmask layer; forming an organic BARC layer over said W-hardmask layer; forming a photoresist layer over said BARC; forming said photoresist layer with metal pattern; etching said metal pattern into said BARC and W-hardmask layer underlying said photoresist layer; removing said photoresist layer; removing said organic BARC layer; and transferring said line pattern in W-hardmask layer into said second metal layer, thus completing the patterning of said metal layer.
Claim 3
Dependent Claim
11 words
The method of claim 1, wherein said semiconductor substrate is silicon.
Claim 4
Dependent Claim
21 words
The method of claim 1, wherein said dielectric layer is PECVD oxide having a thickness between about 2500 to 3000 Å.
Claim 5
Dependent Claim
22 words
The method of claim 1, wherein said glue layer is titanium nitride having a thickness between about 250 to 1500 angstroms (Å).
Claim 6
Dependent Claim
13 words
The method of claim 1, wherein said second metal layer is aluminum-copper alloy.
Claim 7
Dependent Claim
19 words
The method of claim 1, wherein said second metal layer has a thickness between about 3000 to 15000 Å.
Claim 8
Dependent Claim
19 words
The method of claim 1, wherein the thickness of said hardmask layer is between about 500 to 3000 Å.
Claim 9
Dependent Claim
12 words
The method of claim 1, wherein said BARC is an organic material.
Claim 10
Dependent Claim
17 words
The method of claim 1, wherein said BARC has a thickness between about 500 to 2000 Å.
Claim 11
Dependent Claim
18 words
The method of claim 1, wherein said photoresist layer has a thickness between about 7000 to 12000 Å.
Claim 12
Dependent Claim
57 words
The method of claim 1, wherein said etching said metal pattern into said BARC and W-hardmask underlying said photoresist layer is accomplished with a recipe comprising SF 6 , CHF 3 , CF 4 , N 2 , O 2 at a pressure between about 10 to 1.50 mT, and power between about 100 to 2000 watts.
Claim 13
Dependent Claim
17 words
The method of claim 1, wherein said removing said photoresist layer is accomplished by oxygen plasma ashing.
Claim 14
Dependent Claim
18 words
The method of claim 1, wherein said removing said BARC layer is accomplished by O 2 plasma ashing.
Claim 15
Dependent Claim
52 words
The method of claim 1, wherein said transferring said line pattern in W-hardmask layer into said second metal layer is accomplished with an etch recipe comprising Cl 2 , BCl 3 , HCl, N 2 at a pressure between about 5 to 150 mT and power between about 100 to 2000 watts.
Claim 16
Independent Claim
167 words
A method of forming a high selectivity metal etch masking film comprising the steps of: providing a semiconductor substrate having a substructure of devices, and a first metal layer formed thereon; forming a dielectric layer over said first metal layer; forming a glue layer over said dielectric layer; forming a second metal layer over said glue layer; forming a W-hardmask layer over said second metal layer, wherein said hardmask layer is formed by silicon reduction of tungsten hexafluoride, WF 6 at a flow rate between about 10 to 200 sccm, at pressure between about 1 to 100 torr, and temperature between about 350 to 500° C.; forming a silicon-oxynitride (SiON) over said W-hardmask layer; forming a photoresist layer over said SiON; forming said photoresist layer with metal pattern; etching said metal pattern into said SiON and said W-hardmask underlying said photoresist layer; removing said photoresist layer; and transferring said line pattern in W-hardmask layer into said second metal layer, thus completing the patterning of said metal layer.
Claim 17
Independent Claim
167 words
A method of forming a high selectivity metal etch masking film comprising the steps of: providing a semiconductor substrate having a substructure of devices, and a first metal layer formed thereon; forming a dielectric layer over said first metal layer; forming a glue layer over said dielectric layer; forming a second metal layer over said glue layer; forming a W-hardmask layer over said second metal layer, wherein said hardmask layer is formed by silicon reduction of tungsten hexafluoride, WF 6 at a flow rate between about 10 to 200 sccm, at pressure between about 1 to 100 torr, and temperature between about 350 to 500° C.; forming a silicon-oxynitride (SiON) over said W-hardmask layer; forming a photoresist layer over said SiON; forming said photoresist layer with metal pattern; etching said metal pattern into said SiON and said W-hardmask underlying said photoresist layer; removing said photoresist layer; and transferring said line pattern in W-hardmask layer into said second metal layer, thus completing the patterning of said metal layer.
Claim 18
Dependent Claim
11 words
The method of claim 15, wherein said semiconductor substrate is silicon.
Claim 19
Dependent Claim
21 words
The method of claim 15, wherein said dielectric layer is PECVD oxide having a thickness between about 2500 to 3000 Å.
Claim 20
Dependent Claim
22 words
The method of claim 15, wherein said glue layer is titanium nitride having a thickness between about 250 to 1500 angstroms (Å).
Claim 21
Dependent Claim
13 words
The method of claim 15, wherein said second metal layer is aluminum-copper alloy.
Claim 22
Dependent Claim
19 words
The method of claim 15, wherein said second metal layer has a thickness between about 3000 to 15000 Å.
Claim 23
Dependent Claim
19 words
The method of claim 15, wherein the thickness of said W-hardmask layer is between about 500 to 3000 Å.
Claim 24
Dependent Claim
17 words
The method of claim 15, wherein said silicon-oxynitride has a thickness between about 300 to 2000 Å.
Claim 25
Dependent Claim
18 words
The method of claim 15, wherein said photoresist layer has a thickness between about 7000 to 12000 Å.
Claim 26
Dependent Claim
56 words
The method of claim 15, wherein said etching said metal pattern into said silicon-oxynitride and said W-hardmask underlying said photoresist layer is accomplished with a recipe comprising SF 6 , CF 4 , CHF 3 , N 2 gases at a pressure between about 5 to 150 mT and power between about 50 to 1500 watts.
Claim 27
Dependent Claim
17 words
The method of claim 15, wherein said removing said photoresist layer is accomplished by oxygen plasma ashing.
Claim 28
Dependent Claim
53 words
The method of claim 15, wherein said transferring said line pattern in W-hardmask layer into said second metal layer is accomplished with an etch recipe comprising Cl 2 , BCl 3 , HCl, N 2 gases at a pressure between about 5 to 200 mT and power between about 50 to 2000 watts.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-12-05 | 2004-06-05 | 2004-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-05 | 2008-06-05 | 2008-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-05 | 2012-06-05 | 2012-12-05 | $7700.00 | Window Closed / Lapsed |