US4532002A
Expired / Lapsed
US
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Multilayer planarizing structure for lift-off technique
Assignee: RCA Corp
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Filing: 1984-04-10
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Granted: 1985-07-30
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Expires: 2004-04-10
Abstract
Abstract An improved method of forming a patterned layer of metallization on a substrate having topographical features is provided. A layer of a polymeric lift-off material is initially spin-coated onto the substrate, and a layer of a polymeric planarizing material spin-coated thereover. The dry etch rate of the lift-off layer is at least 1.2 times faster than that of the planarizing layer thereby forming a reverse slope wall profile in openings etched through both layers. A patterned hardmask layer is suitably used to dry etch the planarizing and lift-off layers, preferably in an oxygen-containing plasma. A layer of metallization is then deposited thereon. The metal in the openings is discontinuous from that deposited over the hardmask because of the reverse slope wall profile of the openings in the planarizing layers. The structure is then contacted with an organic solvent which penetrates to the base of the lift-off layer, again due to the reverse slope wall profile. The entire structure can thereupon be lifted from the substrate leaving the patterned metallization.
Inventors
- 👤 Lawrence K. White
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; H; H10; H10P; H10P76/00; H10P76/20; H10P76/202
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
144 words
A method of forming a patterned layer of metallization on a substrate having topographical features which comprises: (a) spin-coating on the substrate a layer of a polymeric lift-off material and, thereover, a layer of a polymeric planarizing material, wherein the dry etch rate of the lift-off layer is at least 1.2 times faster than that of the planarizing layer; (b) dry etching said layers selectively to form openings therethrough, the openings having a reverse slope wall profile as a result of the difference in etch rates of said layers; (c) depositing a layer of metallization over the resulting structure, the reverse slope wall profile causing the metallization deposited in said openings to separate from that overlying said planarizing layer; (d) contacting the resulting structure with an organic solvent to separate the lift-off layer from the substrate; and (e) removing said structure from the substrate.
Claim 2
Independent Claim
144 words
A method of forming a patterned layer of metallization on a substrate having topographical features which comprises: (a) spin-coating on the substrate a layer of a polymeric lift-off material and, thereover, a layer of a polymeric planarizing material, wherein the dry etch rate of the lift-off layer is at least 1.2 times faster than that of the planarizing layer; (b) dry etching said layers selectively to form openings therethrough, the openings having a reverse slope wall profile as a result of the difference in etch rates of said layers; (c) depositing a layer of metallization over the resulting structure, the reverse slope wall profile causing the metallization deposited in said openings to separate from that overlying said planarizing layer; (d) contacting the resulting structure with an organic solvent to separate the lift-off layer from the substrate; and (e) removing said structure from the substrate.
Claim 3
Dependent Claim
27 words
A method in accordance with claim 1, wherein the etch rate of said lift-off layer is at least two times faster than that of the planarizing layer.
Claim 4
Dependent Claim
27 words
A method in accordance with claim 1, wherein the lift-off layer is a polymer selected from the group consisting of poly(methylmethacrylate, poly(chloroprene), poly(epichlorohydrin), poly(vinylchloride), and chlorinated polyethylene.
Claim 5
Dependent Claim
13 words
A method in accordance with claim 3, wherein the lift-off layer is poly(methylmethacrylate).
Claim 6
Dependent Claim
24 words
A method in accordance with claim 1, wherein the planarizing layer is a novolac resin-based positive resist material or a rubber-based negative resist material.
Claim 7
Dependent Claim
32 words
A method in accordance with claim 1, wherein the thickness of the lift-off layer is from about 0.3 to about 2 times the height of the highest topographical feature on the substrate.
Claim 8
Dependent Claim
56 words
A method in accordance with claim 1, wherein the thickness of the planarizing layer is between about 0.2 and 5.0 times the thickness of the lift-off layer, with the provision that the thickness of the lift-off layer plus the planarizing layer is at least equal to the height of the highest topographical feature on the substrate.
Claim 9
Dependent Claim
19 words
A method in accordance with claim 7, wherein the lift-off and the planarizing layers are of about equal thickness.
Claim 10
Dependent Claim
45 words
A method in accordance with claim 1, wherein said lift-off and planarizing layers are etched utilizing a hardmask formed by depositing a layer of suitable hardmask material thereover, providing a patterned layer of resist material thereon and etching the exposed portion of the hardmask layer.
Claim 11
Dependent Claim
19 words
A method in accordance with claim 9, wherein said hardmask material is silicon dioxide, silicon nitride or amorphous silicon.
Claim 12
Dependent Claim
20 words
A method in accordance with claim 9, wherein the exposed portion of the hardmask layer is removed by plasma etching.
Claim 13
Dependent Claim
16 words
A method in accordance with claim 1, wherein the metallization is aluminum or an alloy thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1988-07-29 | 1989-01-28 | 1989-07-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-07-29 | 1993-01-28 | 1993-07-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-07-29 | 1997-01-28 | 1997-07-30 | $7700.00 | Window Closed / Lapsed |