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US6118100A
Expired / Lapsed
US
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Susceptor hold-down mechanism
Assignee: Mattson Technology Inc
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Filing: 1999-07-07
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Granted: 2000-09-12
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Expires: 2019-07-07
Abstract
Abstract A structure and method for holding a susceptor in a single-wafer RF heated CVD reactor allows the center portion of the susceptor to be heated and prevents susceptor and reactor damage due to overdriving and the susceptor from losing contact with a rotatable rod during thermal expansion. A plug, located on the bottom surface of the susceptor, heated by RF energy subsequently heats the center portion of the susceptor, thereby providing constant temperature gradients across the susceptor. The plug is connected to a rod which is contained in an upper tube and extends into a lower tube. The upper tube is connected to the susceptor via a locking mechanism. An upper spring in the upper tube applies a downward force on the upper tube such that an upward force on the bottom of the susceptor compresses the upper spring, thereby relieving stress on the susceptor and preventing damage due to overdriving. A lower spring is provided within a lower tube connected to the rod such that the lower spring forces the rod upward to keep continual contact with the plug during various times of thermal expansion. The two springs also allow easy removal and assembly of the susceptor and rod structure for cleaning and repair.
Inventors
- 👤 Robert D. Mailho
- 👤 Dean M. Dumitrescu
- 👤 Joseph H. MacLeish
- 👤 Mahesh K. Sanganeria
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:39
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584; C23C16/46; C30; C30B; C30B25/00; C30B25/02; C30B25/12
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
59 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the bottom surface of said susceptor to heat the center portion of said susceptor; a rod portion connected to said susceptor: and a first spring located within said rod portion, wherein said first spring compresses as force is applied to the bottom surface of said susceptor.
Claim 2
Dependent Claim
59 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the bottom surface of said susceptor to heat the center portion of said susceptor; a rod portion connected to said susceptor: and a first spring located within said rod portion, wherein said first spring compresses as force is applied to the bottom surface of said susceptor.
Claim 3
Dependent Claim
17 words
The structure of claim 1, wherein said heating plug is made of graphite coated with silicon carbide.
Claim 4
Dependent Claim
18 words
The structure of claim 1, further comprising a locking mechanism for connecting said susceptor to said rod portion.
Claim 5
Dependent Claim
19 words
The structure of claim 3, wherein said heating plug, said susceptor, and said locking mechanism form a unitary structure.
Claim 6
Dependent Claim
33 words
The structure of claim 1, wherein said rod portion comprises a rotatable rod contained within an upper tube, said upper tube connected to said susceptor and said rod connected to said heating plug.
Claim 7
Dependent Claim
15 words
The structure of claim 5, wherein said first spring is located within said upper tube.
Claim 8
Dependent Claim
42 words
The structure of claim 6, wherein said rod comprises a ridge separating a thicker upper portion and a thinner lower portion of said rod, and wherein said first spring is located between said ridge and a bottom portion of said upper tube.
Claim 9
Dependent Claim
23 words
The structure of claim 7, further comprising a lower tube, wherein the lower portion of said rod portion extends into said lower tube.
Claim 10
Dependent Claim
47 words
The structure of claim 5, further comprising a connecting plug to connect said lower tube to said rod and a second spring located between said connecting plug and an inner surface of said lower tube, wherein said second spring expands to force said rod toward said susceptor.
Claim 11
Dependent Claim
31 words
The structure of claim 9, further comprising pins located within said lower tube, said pins fitting into grooves on said connecting plug to connect said connecting plug to said lower tube.
Claim 12
Dependent Claim
14 words
The structure of claim 10, wherein the angular separation between said pins is unequal.
Claim 13
Dependent Claim
16 words
The structure of claim 11, wherein the angular separation between two adjacent said pins is 150°.
Claim 14
Dependent Claim
22 words
The structure of claim 5, wherein said rod is made of quartz, and wherein the ends of said rod are optically polished.
Claim 15
Dependent Claim
55 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the middle portion of said susceptor; a first spring-loaded connector underneath said susceptor to allow for pressure against the bottom surface of said susceptor; and a second spring-loaded connector underneath said heating plug to allow for thermal expansion of said heating plug.
Claim 16
Dependent Claim
55 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the middle portion of said susceptor; a first spring-loaded connector underneath said susceptor to allow for pressure against the bottom surface of said susceptor; and a second spring-loaded connector underneath said heating plug to allow for thermal expansion of said heating plug.
Claim 17
Dependent Claim
67 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the middle portion of said susceptor; an upper tube coupled to said susceptor; a rod coupling said susceptor to a lower tube; a first spring located in said upper tube applying a downward force on said upper tube; and a second spring located in said lower tube applying an upward force on said rod.
Claim 18
Dependent Claim
67 words
A susceptor and rod structure, comprising: a susceptor; a heating plug extending from the middle portion of said susceptor; an upper tube coupled to said susceptor; a rod coupling said susceptor to a lower tube; a first spring located in said upper tube applying a downward force on said upper tube; and a second spring located in said lower tube applying an upward force on said rod.
Claim 19
Independent Claim
53 words
A method of heating the center portion of a susceptor, comprising: heating a plug located below said center portion of said susceptor; releasing force applied to said center portion of said susceptor from thermal expansion of said plug; and transferring the heat from said plug conductively to the center portion of said susceptor.
Claim 20
Independent Claim
53 words
A method of heating the center portion of a susceptor, comprising: heating a plug located below said center portion of said susceptor; releasing force applied to said center portion of said susceptor from thermal expansion of said plug; and transferring the heat from said plug conductively to the center portion of said susceptor.
Claim 21
Dependent Claim
12 words
The method of claim 16, wherein said plug is silicon carbide-coated graphite.
Claim 22
Dependent Claim
15 words
The method of claim 16, wherein said plug and said susceptor form a unitary structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-12 | 2004-03-13 | 2004-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-12 | 2008-03-13 | 2008-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-12 | 2012-03-13 | 2012-09-12 | $7700.00 | Window Closed / Lapsed |