US5244694A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for improving the reactant gas flow in a reaction chamber
Assignee: ASM America Inc
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Filing: 1991-05-03
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Granted: 1993-09-14
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Expires: 2011-05-03
Abstract
Abstract Apparatus for carrying out an epitaxial deposition process upon a single wafer disposed in a reaction chamber. The chamber has a substantially rectangular cross section reduced in area for increased system efficiency. A susceptor may be mounted in a well or in a downstream portion of a dual height chamber having a greater cross sectional area. Purge gas supplied through an aperture in the chamber prevents undesirable reactant gas deposits beneath the susceptor. The velocity profile and flow of reactant gas beneath the susceptor are controlled by a shaped transversely extending gap between the susceptor and the upstream portion of the chamber.
Inventors
- 👤 Albert E. Ozias
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:11
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B25/00; C30B25/02; C30B25/10
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
282 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reaction chamber includes a bottom panel extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor, which susceptor is downstream of the terminal edge of the bottom panel; c) locating the susceptor in a well disposed proximate the terminal edge of the bottom panel to prevent the susceptor from being in the mainstream of flow of reactant gas between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing across the wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the circumference of susceptor, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the circumference of the susceptor upstream of the center of the susceptor and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate across the wafer having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second valve at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer is a function of and modified by the reactant gas flow through the varying width gap upstream of the wafer.
Claim 2
Independent Claim
282 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reaction chamber includes a bottom panel extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor, which susceptor is downstream of the terminal edge of the bottom panel; c) locating the susceptor in a well disposed proximate the terminal edge of the bottom panel to prevent the susceptor from being in the mainstream of flow of reactant gas between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing across the wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the circumference of susceptor, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the circumference of the susceptor upstream of the center of the susceptor and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate across the wafer having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second valve at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer is a function of and modified by the reactant gas flow through the varying width gap upstream of the wafer.
Claim 3
Dependent Claim
46 words
The method for processing a wafer within a reaction chamber as set forth in claim 1 including the step of reducing the flow rate of the reactant gas downstream of the susceptor by increasing the cross sectional area of the reaction chamber downstream of the susceptor.
Claim 4
Independent Claim
285 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reaction chamber includes a quartz plate extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor having a circumference, which susceptor is downstream of the terminal edge of the quartz plate; c) locating the susceptor in a well disposed proximate the terminal edge of the quartz plate to prevent the susceptor from being in the mainstream of flow of reactant gas between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing across the wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the circumference of susceptor, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the circumference of the susceptor upstream of the center of the susceptor and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate across the wafer having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second value at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer is a function of and modified by the reactant gas flow through the varying width gap upstream of the wafer.
Claim 5
Independent Claim
285 words
A method for processing a wafer within a reaction chamber, said method comprising in combination: a) receiving and exhausting a reactant gas through an inlet and an outlet, respectively, of the reaction chamber, which reaction chamber includes a quartz plate extending downstream of the inlet and terminating at a terminal edge; b) supporting the wafer upon a susceptor having a circumference, which susceptor is downstream of the terminal edge of the quartz plate; c) locating the susceptor in a well disposed proximate the terminal edge of the quartz plate to prevent the susceptor from being in the mainstream of flow of reactant gas between the inlet and the outlet; and d) shaping the velocity profile of the flow of reactant gas flowing across the wafer to assist in carrying out the vapor deposition process more uniformly across the wafer, said step of shaping including the step of providing a varying flow rate of reactant gas through a gap, which gap is defined between the terminal edge and the circumference of susceptor, and into the well, the gap being of a predetermined width at a central segment of the gap adjacent the circumference of the susceptor upstream of the center of the susceptor and increasing in width in opposed directions along the terminal edge, the varying reactant gas flow rate across the wafer having a first value at the central segment of the gap and ranging along the gap in opposed directions to a second value at the opposed extremities of the gap, whereby the velocity profile of the reactant gas flow laterally across the wafer is a function of and modified by the reactant gas flow through the varying width gap upstream of the wafer.
Claim 6
Dependent Claim
46 words
The method for processing a wafer within a reaction chamber as set forth in claim 3 including the step of reducing the flow rate of the reactant gas downstream of the susceptor by increasing the cross sectional area of the reaction chamber downstream of the susceptor.
References Cited (Backward Citations)
US4714594A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-13 | 1997-03-15 | 1997-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-13 | 2001-03-15 | 2001-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-13 | 2005-03-15 | 2005-09-14 | $7700.00 | Window Closed / Lapsed |