Patent US6107183A successfully refreshed from Google Patents.
US6107183A
Expired / Lapsed
US
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Method of forming an interlevel dielectric
Assignee: Micron Technology Inc
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Filing: 1996-07-10
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Granted: 2000-08-22
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Expires: 2016-07-10
Abstract
Abstract An interlevel dielectric structure includes forming first and second dielectric layers between which are located lines of a conductive material that are also formed with a dielectric material in spaces between the lines of conductive material, with the lower surface of the dielectric material extending lower than the lower surface of lines of conductive material adjacent thereto, and the upper surface of the dielectric material extending higher than the upper surface of conductive material adjacent thereto, thus reducing fringe and total capacitance between the lines of conductive material. The dielectric material, which has a dielectric constant of less than about 3.6, does not extend directly above the upper surface of the lines of conductive material, allowing formation of subsequent contacts down to the lines of conductive material without exposing the dielectric material to further processing. Various methods for forming the interlevel dielectric structure are disclosed.
Inventors
- 👤 Gurtej Sandhu
- 👤 Anand Srinivasan
- 👤 Ravi Iyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:17
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/074; H10W20/077; H10W20/098
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
254 words
A method of forming an interlevel dielectric comprising the steps of: providing a first dielectric layer over a surface of a substrate situated on a semiconductor wafer; depositing a conductive layer on said first dielectric layer; depositing an electrically conductive additional layer on said conductive layer; patterning said conductive layer and said additional layer by: forming a patterned mask layer on said additional layer, and etching through said additional layer and said conductive layer and into said first dielectric layer, leaving a space between adjacent remaining portions of said conductive layer, said adjacent remaining portions of said conductive layer forming lines of conductive material; depositing a layer of dielectric material to fill each said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; removing said layer of dielectric material from the top thereof downward to at least to the level of the top of said additional layer; removing said additional layer on said lines of conductive material to form a top surface on each of the lines of conductive material that is lower than the top surface of the layer of dielectric material; and depositing a second dielectric layer over the top surface of each line of conductive material and the top surface of the layer of dielectric material.
Claim 2
Independent Claim
254 words
A method of forming an interlevel dielectric comprising the steps of: providing a first dielectric layer over a surface of a substrate situated on a semiconductor wafer; depositing a conductive layer on said first dielectric layer; depositing an electrically conductive additional layer on said conductive layer; patterning said conductive layer and said additional layer by: forming a patterned mask layer on said additional layer, and etching through said additional layer and said conductive layer and into said first dielectric layer, leaving a space between adjacent remaining portions of said conductive layer, said adjacent remaining portions of said conductive layer forming lines of conductive material; depositing a layer of dielectric material to fill each said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; removing said layer of dielectric material from the top thereof downward to at least to the level of the top of said additional layer; removing said additional layer on said lines of conductive material to form a top surface on each of the lines of conductive material that is lower than the top surface of the layer of dielectric material; and depositing a second dielectric layer over the top surface of each line of conductive material and the top surface of the layer of dielectric material.
Claim 3
Dependent Claim
13 words
The method as defined in claim 1, wherein said additional layer comprises titanium.
Claim 4
Dependent Claim
13 words
The method as defined in claim 1, wherein said additional layer comprises TiN.
Claim 5
Dependent Claim
20 words
The method as defined in claim 1, wherein at least one said first and second dielectric layers comprises silicon dioxide.
Claim 6
Dependent Claim
13 words
The method as defined in claim 1, wherein said dielectric material comprises PTFE.
Claim 7
Dependent Claim
33 words
The method as defined in claim 1, wherein said step of removing said layer of dielectric material is selected from the group consisting of an etch back step and chemical mechanical polishing step.
Claim 8
Dependent Claim
35 words
The method as defined in claim 1, wherein the layer of dielectric material in each said space extends below and above the respective adjacent lines of conductive material sufficient to reduce the fringe capacitance therebetween.
Claim 9
Dependent Claim
33 words
The method as defined in claim 1, wherein said conductive material is selected from the group consisting of polysilicon, aluminum, copper, tungsten, and multiple layers of TiN/Al/TiN, TiN/Al/Ti, W/TiN/Ti, or any combinations thereof.
Claim 10
Dependent Claim
53 words
The method as defined in claim 1, wherein: removing said layer of dielectric material from the top thereof downward to at least to the level of the top of said additional layer forms a top surface of the layer of dielectric material that is co-planar with a top surface of the additional layer.
Claim 11
Dependent Claim
42 words
The method as defined in claim 9, wherein: depositing a second dielectric layer over all layers on said surface of said substrate forms an interface between the top surface on each of the lines of conductive material and the second dielectric layer.
Claim 12
Dependent Claim
44 words
The method as defined in claim 10, further comprising: planarizing the second dielectric layer to form a top surface that is parallel to: the top surface of each of the lines of conductive material; and the top surface of the layer of dielectric material.
Claim 13
Dependent Claim
26 words
The method as defined in claim 1, where the dielectric material of said layer of dielectric material has a dielectric constant of less than about 3.6.
Claim 14
Independent Claim
242 words
A method of forming an interlevel dielectric comprising: providing a first dielectric layer over a surface of a substrate; forming a conductive layer on said first dielectric layer; forming an electrically conductive additional layer on said conductive layer; patterning said conductive layer and said additional layer by: forming a patterned mask layer on said additional layer, and etching through said additional layer and said conductive layer and into said first dielectric layer, leaving a space between adjacent remaining portions of said conductive layer, said adjacent remaining portions of said conductive layer forming lines of conductive material; forming a layer of dielectric material to fill said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; removing said layer of dielectric material from the top thereof to at least to the level of the top of said additional layer; removing said additional layer on said lines of conductive material to form a top surface on each line of conductive material that is lower than the top surface of the layer of dielectric material; and forming a second dielectric layer over the top surface of each line of conductive material and the top surface of the layer of dielectric material.
Claim 15
Independent Claim
242 words
A method of forming an interlevel dielectric comprising: providing a first dielectric layer over a surface of a substrate; forming a conductive layer on said first dielectric layer; forming an electrically conductive additional layer on said conductive layer; patterning said conductive layer and said additional layer by: forming a patterned mask layer on said additional layer, and etching through said additional layer and said conductive layer and into said first dielectric layer, leaving a space between adjacent remaining portions of said conductive layer, said adjacent remaining portions of said conductive layer forming lines of conductive material; forming a layer of dielectric material to fill said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; removing said layer of dielectric material from the top thereof to at least to the level of the top of said additional layer; removing said additional layer on said lines of conductive material to form a top surface on each line of conductive material that is lower than the top surface of the layer of dielectric material; and forming a second dielectric layer over the top surface of each line of conductive material and the top surface of the layer of dielectric material.
Claim 16
Dependent Claim
25 words
The method as defined in claim 13, wherein said additional layer is composed of a material selected from the group consisting of titanium and TiN.
Claim 17
Dependent Claim
35 words
The method as defined in claim 13, wherein the layer of dielectric material in each said space extends below and above the respective adjacent lines of conductive material sufficient to reduce the fringe capacitance therebetween.
Claim 18
Dependent Claim
53 words
The method as defined in claim 13, wherein: removing said layer of dielectric material from the top thereof downward to at least to the level of the top of said additional layer forms a top surface of the layer of dielectric material that is co-planar with a top surface of the additional layer.
Claim 19
Dependent Claim
42 words
The method as defined in claim 16, wherein: forming a second dielectric layer over all layers on said surface of said substrate forms an interface between the top surface on each of the lines of conductive material and the second dielectric layer.
Claim 20
Dependent Claim
44 words
The method as defined in claim 17, further comprising: planarizing the second dielectric layer to form a top surface that is parallel to: the top surface of each of the lines of conductive material; and the top surface of the layer of dielectric material.
Claim 21
Independent Claim
239 words
A method of forming an interlevel dielectric including a first dielectric layer over a surface of a substrate, a conductive layer on the first dielectric layer, and an electrically conductive additional layer on the conductive layer, where the conductive layer and the additional layer are selectively removed to leave a space between adjacent remaining portions of said conductive layer, wherein the adjacent remaining portions of said conductive layer form lines of conductive material, the method comprising: forming a layer of dielectric material upon the additional layer and to fill each said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; planarizing the layer of dielectric material and the electrically conductive additional layer to form respective co-planar top surfaces; removing said electrically conductive additional layer on said lines of conductive material to form a top surface on each line of conductive material that is lower than the top surface of the layer dielectric material in each said space that is adjacent thereto; and forming a second dielectric layer upon the top surface of each line of conductive material and upon the top surface of the layer of dielectric material that is within each said space.
Claim 22
Independent Claim
239 words
A method of forming an interlevel dielectric including a first dielectric layer over a surface of a substrate, a conductive layer on the first dielectric layer, and an electrically conductive additional layer on the conductive layer, where the conductive layer and the additional layer are selectively removed to leave a space between adjacent remaining portions of said conductive layer, wherein the adjacent remaining portions of said conductive layer form lines of conductive material, the method comprising: forming a layer of dielectric material upon the additional layer and to fill each said space, wherein: the layer of dielectric material in each said space has a bottom surface; each line of conductive material has a bottom surface; and the bottom surface of the layer of dielectric material in each said space is lower than the bottom surface of each line of conductive material that is adjacent thereto; planarizing the layer of dielectric material and the electrically conductive additional layer to form respective co-planar top surfaces; removing said electrically conductive additional layer on said lines of conductive material to form a top surface on each line of conductive material that is lower than the top surface of the layer dielectric material in each said space that is adjacent thereto; and forming a second dielectric layer upon the top surface of each line of conductive material and upon the top surface of the layer of dielectric material that is within each said space.
Claim 23
Dependent Claim
23 words
The method as defined in claim 19, wherein the layer of dielectric material in each said space extends into the first dielectric layer.
Claim 24
Dependent Claim
35 words
The method as defined in claim 19, wherein: the layer of dielectric material in each said space extends below and above the respective adjacent lines of conductive material sufficient to reduce the fringe capacitance therebetween.
Claim 25
Dependent Claim
69 words
The method as defined in claim 19, wherein: the top surface of the layer of dielectric material in each said space is above an upper extent of the fringe capacitance between said respective adjacent lines of conductive material; and the bottom surface of the layer of dielectric material in each said space is below a lower extent of the fringe capacitance between said respective adjacent lines of conductive material.
Claim 26
Dependent Claim
15 words
The method as defined in claim 19, wherein said electrically conductive additional layer comprises titanium.
Claim 27
Dependent Claim
15 words
The method as defined in claim 19, wherein said electrically conductive additional layer comprises TiN.
Claim 28
Dependent Claim
20 words
The method as defined in claim 19, wherein at least one said first and second dielectric layers comprises silicon dioxide.
Claim 29
Dependent Claim
13 words
The method as defined in claim 19, wherein said dielectric material comprises PTFE.
Claim 30
Dependent Claim
38 words
The method as defined in claim 19, wherein said conductive layer on the first dielectric layer is selected from the group consisting of polysilicon, aluminum, copper, tungsten, and multiple layers of TiN/Al/TiN, TiN/Al/Ti, W/TiN/Ti, or any combinations thereof.
Claim 31
Dependent Claim
26 words
The method as defined in claim 19, where the dielectric material of said layer of dielectric material has a dielectric constant of less than about 3.6.
Claim 32
Dependent Claim
26 words
The method as defined in claim 19, where the dielectric material of said layer of dielectric material has a dielectric constant of less than about 2.9.
Claim 33
Dependent Claim
26 words
The method as defined in claim 19, where the dielectric material of said layer of dielectric material has a dielectric constant of less than about 2.2.
Claim 34
Independent Claim
162 words
A method of forming an interlevel dielectric structure including a single dielectric layer, adjacent portions of a single conductive layer on the single dielectric layer each having a top surface and a bottom surface, and a space separating adjacent pairs of portions of said single conductive layer, the method comprising: forming a plurality of top surfaces on the single dielectric layer each aligned with a respective one of said spaces and each being lower than the bottom surface of adjacent portions of said single conductive layer; and forming a single electrically insulating material in each space upon each top surface on the single dielectric layer, said single electrically insulating material having opposing sides that extend to a top surface that is higher than the top surface of each adjacent portion of said single conductive layer, whereby the single electrically insulating material extends both below and above the respective adjacent lines of the single conductive material sufficient to reduce the fringe capacitance therebetween.
Claim 35
Independent Claim
162 words
A method of forming an interlevel dielectric structure including a single dielectric layer, adjacent portions of a single conductive layer on the single dielectric layer each having a top surface and a bottom surface, and a space separating adjacent pairs of portions of said single conductive layer, the method comprising: forming a plurality of top surfaces on the single dielectric layer each aligned with a respective one of said spaces and each being lower than the bottom surface of adjacent portions of said single conductive layer; and forming a single electrically insulating material in each space upon each top surface on the single dielectric layer, said single electrically insulating material having opposing sides that extend to a top surface that is higher than the top surface of each adjacent portion of said single conductive layer, whereby the single electrically insulating material extends both below and above the respective adjacent lines of the single conductive material sufficient to reduce the fringe capacitance therebetween.
Claim 36
Dependent Claim
49 words
The method as defined in claim 31, further comprising: forming a single electrically non-conductive material upon the single electrically insulating material; and exposing one of said top surfaces of one of said portions of the single conductive layer by forming an opening extending through the single electrically non-conductive material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-08-22 | 2004-02-21 | 2004-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-22 | 2008-02-21 | 2008-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-22 | 2012-02-21 | 2012-08-22 | $7700.00 | Window Closed / Lapsed |