US6100193A
Expired / Lapsed
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Method of manufacturing a semiconductor device
Assignee: Toshiba Corp
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Filing: 1997-09-24
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Granted: 2000-08-08
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Expires: 2017-09-24
Abstract
Abstract A MOSFET in which the gate electrode is formed of a polycrystalline silicon film, a silicon nitride film having a nitrogen surface density of lens than 8×10 14 cm -2 , and a tungsten film--these films formed one upon another in the order mentioned. The gate electrode thus formed, serves to shorten the delay time of the MOSFET.
Inventors
- 👤 Shintaro Suehiro
- 👤 Yasushi Akasaka
- 👤 Kyoichi Suguro
- 👤 Kazuaki Nakajima
- 👤 Tadashi Iijima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:55
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D62/00; H10D62/80; H10D62/83; H10D64/01354; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518; H10D64/60; H10D64/62; H10D64/66; H10D64/661; H10D64/662; H10D64/664; H10W; H10W20/00; H10W20/01
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
169 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing a semiconductor element on a substrate; depositing a first conductive film containing a metal and nitrogen on said semiconductor film, said metal being of such a type that a decrease in Gibbs free energy occurring in forming a nitride of said metal from said metal is smaller than a decrease in Gibbs free energy occurring in forming a nitride of said semiconductor element from said semiconductor element; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film consisting essentially of said metal, and thereby forming a third conductive film containing nitrogen and said semiconductor element and positioned in contact with said semiconductor film between said second conductive film and said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film, said second conductive film, and said third conductive film.
Claim 2
Independent Claim
169 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing a semiconductor element on a substrate; depositing a first conductive film containing a metal and nitrogen on said semiconductor film, said metal being of such a type that a decrease in Gibbs free energy occurring in forming a nitride of said metal from said metal is smaller than a decrease in Gibbs free energy occurring in forming a nitride of said semiconductor element from said semiconductor element; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film consisting essentially of said metal, and thereby forming a third conductive film containing nitrogen and said semiconductor element and positioned in contact with said semiconductor film between said second conductive film and said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film, said second conductive film, and said third conductive film.
Claim 3
Dependent Claim
42 words
The method according claim 1, further comprising a step of depositing a metal film consisting essentially of a metal on said first conductive film, between said step of depositing said first conductive film and said step of heating said first conductive film.
Claim 4
Dependent Claim
20 words
The method according to claim 2, wherein said first conductive film and said metal film consist of the same metal.
Claim 5
Dependent Claim
37 words
The method according to claim 1, wherein said semiconductor element consists of silicon, and said metal of said first conductive film consists of a metal selected from the group consisting of tungsten, molybdenum, niobium, tantalum, and copper.
Claim 6
Dependent Claim
13 words
The method according to claim 4, wherein said semiconductor consists essentially of silicon.
Claim 7
Dependent Claim
21 words
The method according to claim 1, wherein said at least one of an electrode and a wiring comprises a gate electrode.
Claim 8
Independent Claim
145 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing a semiconductor element on a substrate; depositing a first conductive film containing a metal and nitrogen on said semiconductor film, said metal being of such a type that a decrease in Gibbs free energy occurring in forming a nitride of said metal from said metal is smaller than a decrease in Gibbs free energy occurring in forming a nitride of said semiconductor element from said semiconductor element; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film containing nitrogen, said metal, and said semiconductor element, and positioned in contact with said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film and second conductive film.
Claim 9
Independent Claim
145 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing a semiconductor element on a substrate; depositing a first conductive film containing a metal and nitrogen on said semiconductor film, said metal being of such a type that a decrease in Gibbs free energy occurring in forming a nitride of said metal from said metal is smaller than a decrease in Gibbs free energy occurring in forming a nitride of said semiconductor element from said semiconductor element; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film containing nitrogen, said metal, and said semiconductor element, and positioned in contact with said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film and second conductive film.
Claim 10
Dependent Claim
43 words
The method according to claim 7, further comprising a step of depositing a metal film consisting essentially of a metal on said first conductive film, between said step of depositing said first conductive film and said step of heating said first conductive film.
Claim 11
Dependent Claim
20 words
The method according to claim 8, wherein said first conductive film and said metal film consist of the same metal.
Claim 12
Dependent Claim
37 words
The method according to claim 7, wherein said semiconductor element consists of silicon, and said metal of said first conductive film consists of a metal selected from the group consisting of tungsten, molybdenum, niobium, tantalum, and copper.
Claim 13
Dependent Claim
13 words
The method according to claim 10, wherein said semiconductor consists essentially of silicon.
Claim 14
Dependent Claim
21 words
The method according to claim 7, wherein said at least one of an electrode and a wiring comprises a gate electrode.
Claim 15
Dependent Claim
21 words
The method according to claim 1 or 7, wherein said semiconductor film is a silicon film or a silicon germanium film.
Claim 16
Independent Claim
82 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a silicon film on a semiconductor substrate; forming a silicon carbide film on said silicon film, said silicon carbide film having a ratio of carbon atoms ranging from 50 to 75 atomic %; forming a metal film on said silicon carbide film; and performing selective anisotropic etching on said silicon film, said silicon carbide film and said metal film to form at least one of an electrode and a wiring.
Claim 17
Independent Claim
82 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a silicon film on a semiconductor substrate; forming a silicon carbide film on said silicon film, said silicon carbide film having a ratio of carbon atoms ranging from 50 to 75 atomic %; forming a metal film on said silicon carbide film; and performing selective anisotropic etching on said silicon film, said silicon carbide film and said metal film to form at least one of an electrode and a wiring.
Claim 18
Dependent Claim
52 words
The method according to claim 14, wherein said step of forming said silicon carbide film comprises the steps of: forming a carbon film on said silicon film; and implanting ions into said carbon film to mix carbon atoms and silicon atoms at an interface between said carbon film and said silicon film.
Claim 19
Dependent Claim
16 words
The method according to claim 15, wherein said ions are those of an electrically active impurity.
Claim 20
Dependent Claim
18 words
The method according to claim 14, further comprising a step of oxidizing a part of said silicon film.
Claim 21
Independent Claim
116 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing silicon on a substrate; depositing a first conductive film containing tungsten and nitrogen on said semiconductor film; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film consisting essentially of tungsten, and thereby forming a third conductive film containing nitrogen and silicon and positioned in contact with said semiconductor film between said second conductive film and said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film, said second conductive film, and said third conductive film.
Claim 22
Independent Claim
116 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing silicon on a substrate; depositing a first conductive film containing tungsten and nitrogen on said semiconductor film; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film consisting essentially of tungsten, and thereby forming a third conductive film containing nitrogen and silicon and positioned in contact with said semiconductor film between said second conductive film and said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film, said second conductive film, and said third conductive film.
Claim 23
Dependent Claim
42 words
The method according to claim 18, further comprising a step of depositing a metal film consisting essentially of tungsten on said first conductive film, between said step of depositing said first conductive film and said step of heating said first conductive film.
Claim 24
Dependent Claim
13 words
Tho method according to claim 18, wherein said semiconductor consists essentially of silicon.
Claim 25
Dependent Claim
21 words
The method according to claim 18, wherein said at least one of an electrode and a wiring comprises a gate electrode.
Claim 26
Independent Claim
92 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing silicon on a substrate; depositing a first conductive film containing tungsten and nitrogen on said semiconductor film; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film containing nitrogen, tungsten, and silicon, and positioned in contact with said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film and second conductive film.
Claim 27
Independent Claim
92 words
A method of manufacturing a semiconductor device, comprising the steps of: forming a semiconductor film consisting essentially of a semiconductor containing silicon on a substrate; depositing a first conductive film containing tungsten and nitrogen on said semiconductor film; and heating said first conductive film, thereby changing all or part of said first conductive film to a second conductive film containing nitrogen, tungsten, and silicon, and positioned in contact with said semiconductor film to form at least one of an electrode and a wiring which includes said semiconductor film and second conductive film.
Claim 28
Dependent Claim
42 words
The method according to claim 22, further comprising a step of depositing a metal film consisting essentially of tungsten on said first conductive film, between said step of depositing said first conductive film and said stop of heating said first conductive film.
Claim 29
Dependent Claim
13 words
The method according to claim 22, wherein said semiconductor consists essentially of silicon.
Claim 30
Dependent Claim
21 words
The method according to claim 23, wherein said at least one of an electrode and a wiring comprises a gate electrode.
References Cited (Backward Citations)
US5976975A
Cited
US5529954A
Cited
US5503704A
Cited
US5668394A
Cited
US5593924A
Cited
US5981380A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-08-08 | 2004-02-07 | 2004-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-08 | 2008-02-07 | 2008-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-08 | 2012-02-07 | 2012-08-08 | $7700.00 | Window Closed / Lapsed |