Abstract Ions generated under an atmospheric pressure pass through vacuum chambers partitioned through first, second and third fine holes. The ions are led to an MS part where the ions are mass-analyzed. A first vacuum chamber adjacent to an atmospheric pressure part has not vacuum pump for independently pumping this chamber. The first vacuum chamber is evacuated by a common pump together with a second vacuum chamber via a bypass hole formed in the wall having the second aperture. A pressure of the first vacuum chamber can be set to several 100 Pa, while a pressure of the second vacuum chamber can be set to several 10 Pa. Sufficient desolvation has been attained by an ion acceleration voltage of approximately 100 V in the first vacuum chamber, while a speed spread can be restrained. The ions are accelerated by approximately 10 V in the second vacuum chamber, and the speed can be restrained as low as possible.
A mass spectrometer comprising means for ionizing a sample under substantially atmospheric pressure, a higher pressure vacuum chamber having a pressure set at a level lower than the atmospheric pressure, a lower pressure vacuum chamber having a pressure set at a level lower than the pressure of the higher pressure vacuum chamber, the higher pressure vacuum chamber including a first chamber and a second chamber, first evacuating means for evacuating the higher pressure vacuum chamber, second evacuating means for evacuating the lower pressure vacuum chamber, the ionized sample being introduced into the lower pressure vacuum chamber so as to be mass-analyzed therein, and a capillary connected to the first chamber for introducing the ionized sample, the second chamber having an evacuation passage connected to the first evacuating means, and the first chamber being evacuated through the second chamber by the first evacuating means.
Claim 2
Dependent Claim
143 words
A mass spectrometer comprising means for ionizing a sample under substantially atmospheric pressure, a higher pressure vacuum chamber having a pressure set at a level lower than the atmospheric pressure, a lower pressure vacuum chamber having a pressure set at a level lower than the pressure of the higher pressure vacuum chamber, the higher pressure vacuum chamber including a first chamber and a second chamber, first evacuating means for evacuating the higher pressure vacuum chamber, second evacuating means for evacuating the lower pressure vacuum chamber, the ionized sample being introduced into the lower pressure vacuum chamber so as to be mass-analyzed therein, and a capillary connected to the first chamber for introducing the ionized sample, the second chamber having an evacuation passage connected to the first evacuating means, and the first chamber being evacuated through the second chamber by the first evacuating means.
Claim 3
Dependent Claim
20 words
A mass spectrometer according to claim 1, wherein the lower pressure vacuum chamber is arranged adjacent to the second chamber.