Patent US6069017A successfully refreshed from Google Patents.
US6069017A
Expired / Lapsed
US
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Method for real-time in-line testing of semiconductor wafers
Assignee: SEMILAB SEMICONDUCTOR PHYSICS LABORATORY Co Ltd
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Filing: 1997-05-08
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Granted: 2000-05-30
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Expires: 2017-05-08
Abstract
Abstract An apparatus and method for the real-time, in-line testing of semiconductor wafers during the manufacturing process. In one embodiment the apparatus includes a probe assembly within a semiconductor wafer processing line. As each wafer passes adjacent the probe assembly, a source of modulated light, within the probe assembly, having a predetermined wavelength and frequency of modulation, impinges upon the wafer. A sensor in the probe assembly measures the surface photovoltage induced by the modulated light. A computer then uses the induced surface photovoltage to determine various electrical characteristics of the wafer.
Inventors
- 👤 Emil Kamieniecki
- 👤 Jerzy Ruzyllo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:49
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/207; G; G01; G01R; G01R31/00; G01R31/26; G01R31/2648; G01R31/265; G01R31/2656; G01R31/28; G01R31/282; G01R31/2831
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
28 words
A method of restoring a doping concentration at the surface of a wafer comprising the steps of: providing a wafer; and exposing said wafer to broad band illumination.
Claim 2
Independent Claim
28 words
A method of restoring a doping concentration at the surface of a wafer comprising the steps of: providing a wafer; and exposing said wafer to broad band illumination.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein said step of exposing said wafer to illumination comprises illumination with a 250 W halogen light source.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-30 | 2003-11-29 | 2004-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-30 | 2007-11-29 | 2008-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-30 | 2011-11-29 | 2012-05-30 | $7700.00 | Window Closed / Lapsed |