US4433288A
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US
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Method and apparatus for determining minority carrier diffusion length in semiconductors
Assignee: RCA Corp
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Filing: 1981-07-06
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Granted: 1984-02-21
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Expires: 2001-07-06
Abstract
Abstract Method and apparatus are provided for determining the diffusion length of minority carriers in semiconductor material, particularly amorphous silicon, which has a significantly small minority carrier diffusion length using the constant magnitude surface-photovoltage (SPV) method. Steady or modulated illumination at several wavelengths provides the light excitation on the surface of the material to generate the SPV. A manually controlled or automatic servo system maintains a constant predetermined value of the SPV for each wavelength. A probe electrode immersed in an electrolyte solution containing redox couples (preferably quinhydrone) having an oxidation-reduction potential (E) in the order of +0.6 to -1.65 volts couples the SPV to a measurement system. The redox couple solution functions to create a liquid Schottky barrier at the surface of the material. The Schottky barrier is contacted by merely placing the probe in the solution. The redox solution is placed over and in contact with the material to be tested and light is passed through the solution to generate the SPV. To compensate for colored redox solutions a portion of the redox solution not over the material is also illuminated for determining the color compensated light intensity. Steady red light is also used as an optical bias to reduce deleterious space-charge effects that occur in amorphous silicon.
Inventors
- 👤 Arnold R. Moore
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 03:12
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; Y; Y10; Y10S; Y10S136/00; Y10S136/29
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
185 words
A method for determining the minority carrier diffusion length of a sample of semiconductor material, the sample having two major surfaces, one of the surfaces arranged for illumination and the other surface shielded from illumination including the steps of: (a) covering a portion of the one major surface of the sample with an electrolyte solution containing redox couples having redox (oxidation-reduction) potential in the range of +0.6 to -1.65 volts, said electrolyte solution being soluble, stable and non-reactive to the semiconductor material and free of solid or gaseous products and forming a liquid Schottky barrier at said surface portion; (b) illuminating a portion of the one major surface of the sample with monochromatic light that is of a selected wavelength by passing said light through said redox couple solution; (c) providing an electrical signal representing the surface photovoltage (SPV) on the sample generated in response to said light; (d) controlling the SPV electrical signal to a predetermined value; and (e) providing a first electrical signal representing the illuminating intensity (I) incident upon the sample, and a second electrical signal representing the wavelength of the light.
Claim 2
Independent Claim
185 words
A method for determining the minority carrier diffusion length of a sample of semiconductor material, the sample having two major surfaces, one of the surfaces arranged for illumination and the other surface shielded from illumination including the steps of: (a) covering a portion of the one major surface of the sample with an electrolyte solution containing redox couples having redox (oxidation-reduction) potential in the range of +0.6 to -1.65 volts, said electrolyte solution being soluble, stable and non-reactive to the semiconductor material and free of solid or gaseous products and forming a liquid Schottky barrier at said surface portion; (b) illuminating a portion of the one major surface of the sample with monochromatic light that is of a selected wavelength by passing said light through said redox couple solution; (c) providing an electrical signal representing the surface photovoltage (SPV) on the sample generated in response to said light; (d) controlling the SPV electrical signal to a predetermined value; and (e) providing a first electrical signal representing the illuminating intensity (I) incident upon the sample, and a second electrical signal representing the wavelength of the light.
Claim 3
Dependent Claim
26 words
The method of claim 1 wherein said material is amorphous silicon and the light is at a wavelength within the range of 4,000 to 7,000 angstroms.
Claim 4
Dependent Claim
33 words
The method of claim 2 wherein the redox couple solution comprises a stannous/stannic (Sn +2 /Sn +4 ) couple in an acid solution in which the standard electrode potential E is -0.15 volts.
Claim 5
Dependent Claim
35 words
The method of claim 2 wherein the redox couple solution comprises a ferrocyanide/ferricyanide [Fe(CN) 6 -3 /Fe(CN) 6 -4 ] couple in an acid solution in which the standard electrode potential (E) is -0.36 volts.
Claim 6
Dependent Claim
33 words
The method of claim 2 wherein the redox couple solution comprises a ferrous/ferric (Fe +2 /Fe +3 ) couple in an acid solution in which the standard electrode potential (E) is -0.77 volts.
Claim 7
Dependent Claim
32 words
The method of claim 2 wherein the redox couple solution comprises a cerous/ceric (Ce +3 /Ce +4 ) couple in an acid solution in which the electrical potential (E) is -1.61 volts.
Claim 8
Dependent Claim
40 words
The method of claim 2 wherein the redox couple solution comprises a hydroquinone/quinone couple [C 6 H 4 (OH) 2 /C 6 H 4 O 2 ] in standard buffered solution in which the electrical potential (E) is about -0.7+0.059×pH.
Claim 9
Dependent Claim
30 words
The method of claim 1 wherein said SPV electrical signal is provided by a metallic electrode inserted in said solution conducting therefrom electrical signals generated in said redox couple solution.
Claim 10
Dependent Claim
79 words
The method of claim 1 further comprising the steps of: (a) passing light through a second solution consisting of said electrolyte and said redox couples to a photodetector, (b) generating, in response to detected light, said first electrical signal (I) whereby the effects on the SPV signal due to light absorption through the solution covering said sample portion is compensated so that the value of the SPV signal is independent of the light absorption effects of the sample-covering solution.
Claim 11
Dependent Claim
27 words
The method of claim 1 further comprising the step of illuminating said one major surface with steady red light to suppress space charge effects in said sample.
Claim 12
Dependent Claim
36 words
The method of claim 1 comprising the step of automatically plotting a curve of illuminating intensity (I) versus the reciprocal absorption coefficient (α) as a function of wavelength (λ) for a plurality of wavelengths of light.
Claim 13
Dependent Claim
13 words
The method of claim 1 comprising illuminating the sample with steady monochromatic light.
Claim 14
Dependent Claim
13 words
The method of claim 1 comprising illuminating the sample with chopped monochromatic light.
Claim 15
Independent Claim
190 words
An apparatus for determining the minority carrier diffusion length of a sample of semiconductor material, the sample having two major surfaces, one of the surfaces arranged for illumination and the other surface shielded from illumination comprising: (a) means for supporting over a portion of the one major surface an electrolyte solution containing redox couples having a redox (oxidation-reduction) potential in the range of +0.6 to -1.65 volts, said electrolyte solution being soluble, stable, and non-reactive to the semiconductor material and free of solid or gaseous products and forming a liquid Schottky barrier at said surface portion; (b) means for illuminating a portion of the one major surface of the sample with monochromatic light that is of a selected wavelength by passing said light through said redox couple solution; (c) means for providing an electrical signal representing the surface photovoltage (SPV) on the sample generated in response to said light; (d) means for controlling the SPV electrical signal to a predetermined value; and (e) means for providing a first electrical signal representing the illuminating intensity (I) incident upon the sample, and a second electrical signal representing the wavelength of the light.
Claim 16
Independent Claim
190 words
An apparatus for determining the minority carrier diffusion length of a sample of semiconductor material, the sample having two major surfaces, one of the surfaces arranged for illumination and the other surface shielded from illumination comprising: (a) means for supporting over a portion of the one major surface an electrolyte solution containing redox couples having a redox (oxidation-reduction) potential in the range of +0.6 to -1.65 volts, said electrolyte solution being soluble, stable, and non-reactive to the semiconductor material and free of solid or gaseous products and forming a liquid Schottky barrier at said surface portion; (b) means for illuminating a portion of the one major surface of the sample with monochromatic light that is of a selected wavelength by passing said light through said redox couple solution; (c) means for providing an electrical signal representing the surface photovoltage (SPV) on the sample generated in response to said light; (d) means for controlling the SPV electrical signal to a predetermined value; and (e) means for providing a first electrical signal representing the illuminating intensity (I) incident upon the sample, and a second electrical signal representing the wavelength of the light.
Claim 17
Dependent Claim
28 words
The apparatus according to claim 14 wherein said semiconductor material is amorphous silicon and wherein said light has a wavelength within the range of 4000 to 7000 angstroms.
Claim 18
Dependent Claim
33 words
The apparatus according to claim 15 wherein the redox couple solution comprises a stannous/stannic (Sn +2 /Sn +4 ) couple in an acid solution in which the electrical potential (E) is -0.15 volts.
Claim 19
Dependent Claim
35 words
The apparatus according to claim 15 wherein the redox couple solution comprises a ferrocyanide/ferricyanide [Fe(CN) 6 -4 Fe(CN) 6 -3 ] couple in an acid solution in which the electrical potential (E) is -0.36 volts.
Claim 20
Dependent Claim
33 words
The apparatus according to claim 15 wherein the redox couple solution comprises a ferrous/ferric (Fe +2 /Fe +3 ) couple in an acid solution in which the electrical potential (E) is -0.77 volts.
Claim 21
Dependent Claim
33 words
The apparatus according to claim 15 wherein the redox couple solution comprises a cerous/ceric (Ce +3 /Ce +4 ) couple in an acid solution in which the electrical potential (E) is -1.61 volts.
Claim 22
Dependent Claim
42 words
The apparatus according to claim 15 wherein the redox couple solution comprises a hydraquinone/quinone couple (C 6 H 4 (OH) 2 /C 6 H 4 O 2 ) couple in an acid solution in which the electrical potential (E) is about -0.7+0.059×pH.
Claim 23
Dependent Claim
64 words
The apparatus of claim 14 wherein said electrolyte support means comprises: (a) a hollow member having a relatively large upper opening and a relatively small bottom opening, the size of said smaller opening defining the sample portion to be illuminated, said member being positioned over said sample, and (b) means for containing said solution within said member and covering only said sample portion surface.
Claim 24
Dependent Claim
36 words
The apparatus of claim 21 wherein said lower opening is circular and a resilient o-ring is retained in position between said member and said sample surface by a downward force to prevent leakage of said solution.
Claim 25
Dependent Claim
189 words
The apparatus of claim 22 further including: (a) a second electrolyte support means comprising: (a1) a hollow member having an upper and lower opening of the same respective dimensions as said first-mentioned, hollow-member support means, (a2) a transparent sealing closure plate over said lower opening to retain said solution in said second member, and further comprising (b) conduit means between said first and second hollow member to allow said solution to flow freely between the respective hollow members (c) said first and second hollow members being spatially positioned so that the closure plate is at the same elevation as said sample, (d) photodetector means positioned beneath said closure to receive light passing through redox couple solution in said second hollow member, (e) means for illuminating said redox couple solution through the upper opening of said second member with light from the same source of light illuminating said sample, and (f) the electrical signal generated by said photodetector means being the first electrical signal representing the illuminating intensity (I) incident upon the sample and being compensated for absorption effects due to the redox couple solution in said first hollow member.
Claim 26
Dependent Claim
29 words
The apparatus according to claim 14 further including a means for illuminating said major one surface portion with steady red light to suppress space charge effects in said sample.
Claim 27
Dependent Claim
20 words
The apparatus according to claim 14 further including plotting means responsive to said first and second signals for automatic plotting.
Claim 28
Dependent Claim
31 words
The apparatus according to claim 15 wherein said sample is formed of N-type amorphous silicon semiconductor material and wherein said redox solution has a redox potential of +0.1 to -1.65 volts.
Claim 29
Dependent Claim
31 words
The apparatus according to claim 14 wherein said sample is formed of P-type amorphous silicon semiconductor material and wherein said redox solution has a redox potential of +0.6 to +0.1 volts.
Claim 30
Dependent Claim
24 words
The apparatus according to claim 14 wherein said electrical signal means includes a high impedance amplifier to reduce the current drawn through said solution.
Claim 31
Dependent Claim
15 words
The apparatus according to claim 14 wherein said illuminating means includes a xenon light source.
Claim 32
Dependent Claim
21 words
The apparatus according to claim 29 further including variably adjustable attenuator means to attenuate light intensity from said xenon light source.
Claim 33
Dependent Claim
34 words
The apparatus according to claim 30 further including servo means responsive to said SPV signal to automatically adjust said attenuator to control the light intensity from said xenon light source to a predetermined value.
References Cited (Backward Citations)
US4051437A
Cited
US4333051A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-20 | 1987-08-22 | 1988-02-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-20 | 1991-08-22 | 1992-02-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-20 | 1995-08-22 | 1996-02-21 | $7700.00 | Window Closed / Lapsed |