Patent US6066527A successfully refreshed from Google Patents.
US6066527A
Expired / Lapsed
US
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Buried strap poly etch back (BSPE) process
Assignee: Qimonda AG
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Filing: 1999-07-26
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Granted: 2000-05-23
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Expires: 2019-07-26
Abstract
Abstract In accordance with the present invention, a method for etching back filler material for a buried strap for deep trench capacitors includes the steps of forming a trench in a substrate, filling the trench with a first filler material, recessing the first filler material to a predetermined depth relative to a dielectric collar formed in the trench, forming a divot by etching back the dielectric collar, depositing a liner over the first filler material and portions of the substrate exposed by the formation of the trench, and depositing a second filler material on the liner. A surface of the second filler material is prepared by etching the surface with a wet etchant to provide a hydrogen terminated silicon surface. Wet etching the second filler material is performed to etch back the second filler material selective to the liner and the substrate. The second filler material is etched to form a buried strap.
Inventors
- 👤 Stephan Kudelka
- 👤 Alexander Michaelis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:47
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/038; H10B12/0385
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
144 words
A method for etching back filler material for a buried strap in deep trench capacitors comprising the steps of: forming a trench in a substrate; filling the trench with a first filler material; recessing the first filler material to a depth relative to a dielectric collar formed in the trench; etching a divot in the dielectric collar; depositing a liner over the first filler material and portions of the substrate exposed by the formation of the trench; depositing a second filler material on the liner and in the divot; preparing a surface of the second filler material by etching the surface with a wet etchant to provide a hydrogen terminated silicon surface; and wet etching the second filler material to etch back the second filler material selective to the liner and the substrate, the second filler material being etched to form a buried strap.
Claim 2
Independent Claim
144 words
A method for etching back filler material for a buried strap in deep trench capacitors comprising the steps of: forming a trench in a substrate; filling the trench with a first filler material; recessing the first filler material to a depth relative to a dielectric collar formed in the trench; etching a divot in the dielectric collar; depositing a liner over the first filler material and portions of the substrate exposed by the formation of the trench; depositing a second filler material on the liner and in the divot; preparing a surface of the second filler material by etching the surface with a wet etchant to provide a hydrogen terminated silicon surface; and wet etching the second filler material to etch back the second filler material selective to the liner and the substrate, the second filler material being etched to form a buried strap.
Claim 3
Dependent Claim
29 words
The method as recited in claim 1, wherein the step of preparing a surface includes the step of preparing the surface by wet etching the surface with hydrogen fluoride.
Claim 4
Dependent Claim
33 words
The method as recited in claim 2, wherein the step of preparing a surface includes the step of preparing the surface by wet etching the surface at a temperature of about 25° C.
Claim 5
Dependent Claim
28 words
The method as recited in claim 1, wherein the step of wet etching includes the step of wet etching the second filler material by employing a base chemistry.
Claim 6
Dependent Claim
19 words
The method as recited in claim 4, wherein the base chemistry includes one of ammonium hydroxide and potassium hydroxide.
Claim 7
Dependent Claim
34 words
The method as recited in claim 1, wherein the step of wet etching includes the step of wet etching the second filler material at temperatures of between about 25° C. to about 85° C.
Claim 8
Dependent Claim
27 words
The method as recited in claim 1, wherein the step of wet etching includes the step of wet etching the second filler material in a batch process.
Claim 9
Dependent Claim
14 words
The method as recited in claim 1, wherein the second filler material includes polysilicon.
Claim 10
Dependent Claim
12 words
The method as recited in claim 1, wherein the liner includes nitride.
Claim 11
Dependent Claim
17 words
The method as recited in claim 9, wherein the nitride includes a thickness of about 0.8 nm.
Claim 12
Dependent Claim
36 words
The method as recited in claim 1, wherein the step of wet etching includes the step of wet etching the second filler material selective to the substrate with a selectivity of at least 40 to 1.
Claim 13
Independent Claim
152 words
A method for etching back polysilicon selective to crystalline silicon for semiconductor fabrication comprising the steps of: providing a crystalline silicon substrate having trenches formed therein; forming an oxide collar in an upper portion of the trenches; depositing a polysilicon material in the trenches and recessing the polysilicon material to a depth below a top portion of the oxide collar; recessing the oxide collar to form a divot in each trench; depositing a liner along exposed surfaces of the substrate in the trenches, in the divots and on the polysilicon material; depositing a filler material to fill the trenches and divots; preparing a surface of the filler material by etching the surface with a wet etchant to provide a hydrogen terminated silicon surface; and wet etching the filler material by employing a base chemistry to etch back the filler material selective to the substrate and the liner to form a buried strap.
Claim 14
Independent Claim
152 words
A method for etching back polysilicon selective to crystalline silicon for semiconductor fabrication comprising the steps of: providing a crystalline silicon substrate having trenches formed therein; forming an oxide collar in an upper portion of the trenches; depositing a polysilicon material in the trenches and recessing the polysilicon material to a depth below a top portion of the oxide collar; recessing the oxide collar to form a divot in each trench; depositing a liner along exposed surfaces of the substrate in the trenches, in the divots and on the polysilicon material; depositing a filler material to fill the trenches and divots; preparing a surface of the filler material by etching the surface with a wet etchant to provide a hydrogen terminated silicon surface; and wet etching the filler material by employing a base chemistry to etch back the filler material selective to the substrate and the liner to form a buried strap.
Claim 15
Dependent Claim
29 words
The method as recited in claim 12, wherein the step of preparing a surface includes the step of preparing the surface by wet etching the surface with hydrogen fluoride.
Claim 16
Dependent Claim
33 words
The method as recited in claim 13, wherein the step of preparing a surface includes the step of preparing the surface by wet etching the surface at a temperature of about 25° C.
Claim 17
Dependent Claim
35 words
The method as recited in claim 12, wherein the step of wet etching includes the step of wet etching the filler material by employing ammonium hydroxide for between about 40 second to about 140 seconds.
Claim 18
Dependent Claim
33 words
The method as recited in claim 12, wherein the step of wet etching includes the step of wet etching the filler material at temperatures of between about 25° C. to about 85° C.
Claim 19
Dependent Claim
26 words
The method as recited in claim 12, wherein the step of wet etching includes the step of wet etching the filler material in a batch process.
Claim 20
Dependent Claim
13 words
The method as recited in claim 12, wherein the filler material includes polysilicon.
Claim 21
Dependent Claim
12 words
The method as recited in claim 12, wherein the liner includes nitride.
Claim 22
Dependent Claim
17 words
The method as recited in claim 19, wherein the nitride includes a thickness of about 0.8 nm.
Claim 23
Dependent Claim
35 words
The method as recited in claim 12, wherein the step of wet etching includes the step of wet etching the filler material selective to the substrate with a selectivity of at least 40 to 1.
Claim 24
Independent Claim
193 words
A method for etching back polysilicon selective to crystalline silicon for forming a buried strap for a deep trench capacitor comprising the steps of: providing a crystalline silicon substrate having trenches formed therein; forming an oxide collar in an upper portion of the trenches depositing a polysilicon material in the trenches and recessing the polysilicon material to a depth below a top portion of the oxide collar; recessing the oxide collar to form a divot in each trench; depositing a nitride liner along exposed surfaces of the substrate in the trenches, in the divots and on the polysilicon material; depositing a second polysilicon material to fill the trenches and divots; preparing a surface of the second polysilicon material by etching the surface with hydrogen fluoride at a temperature of about 25° C. to provide a hydrogen terminated silicon surface; and wet etching the second polysilicon material to form a buried strap in each trench by employing one of ammonium hydroxide and potassium hydroxide at temperatures of between about 25° C. to about 85° C. to etch back the second polysilicon material selective to the substrate and the nitride liner in a batch process.
Claim 25
Independent Claim
193 words
A method for etching back polysilicon selective to crystalline silicon for forming a buried strap for a deep trench capacitor comprising the steps of: providing a crystalline silicon substrate having trenches formed therein; forming an oxide collar in an upper portion of the trenches depositing a polysilicon material in the trenches and recessing the polysilicon material to a depth below a top portion of the oxide collar; recessing the oxide collar to form a divot in each trench; depositing a nitride liner along exposed surfaces of the substrate in the trenches, in the divots and on the polysilicon material; depositing a second polysilicon material to fill the trenches and divots; preparing a surface of the second polysilicon material by etching the surface with hydrogen fluoride at a temperature of about 25° C. to provide a hydrogen terminated silicon surface; and wet etching the second polysilicon material to form a buried strap in each trench by employing one of ammonium hydroxide and potassium hydroxide at temperatures of between about 25° C. to about 85° C. to etch back the second polysilicon material selective to the substrate and the nitride liner in a batch process.
Claim 26
Dependent Claim
36 words
The method as recited in claim 22, wherein the step of wet etching includes the step of wet etching the second polysilicon material by employing ammonium hydroxide for between about 40 seconds to about 800 seconds.
Claim 27
Dependent Claim
18 words
The method as recited in claim 22, wherein the nitride liner includes a thickness of about 0.8 nm.
Claim 28
Dependent Claim
36 words
The method as recited in claim 22, wherein the step of wet etching includes the step of wet etching the second polysilicon material selective to the substrate with a selectivity of at least 40 to 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-23 | 2003-11-22 | 2004-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-23 | 2007-11-22 | 2008-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-23 | 2011-11-22 | 2012-05-23 | $7700.00 | Window Closed / Lapsed |