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US6060387A
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Transistor fabrication process in which a contact metallization is formed with different silicide thickness over gate interconnect material and transistor source/drain regions
Assignee: Hewlett Packard Development Co LP
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Filing: 1995-11-20
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Granted: 2000-05-09
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Expires: 2015-11-20
Abstract
Abstract A new process for creating a transistor in an integrated circuit provides for two suicide formations, each independent of the other, from two metal depositions and formations steps. The process produces a sufficiently low resistance silicide layer over the source/drain region surfaces of the transistor while also creating a lower resistance silicide over the gate interconnects. In an example embodiment of the invention a near-planar isolation process is used applied such that the gate interconnect surfaces are co-planar. A first silicide layer is formed over the source/drain regions. A dielectric gap-fill material is applied. A planarization method such as chemical mechanical polishing is used to remove the gap fill material down to the top surface of the gate interconnect. A relatively thick suicide is then formed over the top surface of the gate interconnect.
Inventors
- 👤 Adam Shepela
- 👤 Gregory J. Grula
- 👤 Bjorn Zetterlund
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:40
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0212; H10D30/0213
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
98 words
A method of forming an integrated circuit device on a silicon substrate comprising the steps of: forming a gate interconnect and source and drain regions in said silicon substrate on opposite sides of said gate interconnect; providing a first silicide layer over a surface of said source and drain regions; depositing a layer of gap filling dielectric material having a thickness greater than the height of said gate interconnect; planarizing said gap filling dielectric material to expose a top surface of said gate interconnect; and providing a second silicide layer on said top surface of said gate interconnect.
Claim 2
Independent Claim
98 words
A method of forming an integrated circuit device on a silicon substrate comprising the steps of: forming a gate interconnect and source and drain regions in said silicon substrate on opposite sides of said gate interconnect; providing a first silicide layer over a surface of said source and drain regions; depositing a layer of gap filling dielectric material having a thickness greater than the height of said gate interconnect; planarizing said gap filling dielectric material to expose a top surface of said gate interconnect; and providing a second silicide layer on said top surface of said gate interconnect.
Claim 3
Dependent Claim
15 words
The method as in claim 1, wherein said planarization is accomplished through chemical mechanical polishing.
Claim 4
Dependent Claim
25 words
The method as in claim 1, wherein said step of providing said first silicide layer includes depositing a layer of a first silicide forming metal.
Claim 5
Dependent Claim
22 words
The method as in claim 3, wherein said first silicide forming metal is one of palladium, platinum, nickel, cobalt, titanium or tungsten.
Claim 6
Dependent Claim
22 words
The method as in claim 3, wherein said first silicide forming metal has a thickness less than or equal to 200 Angstroms.
Claim 7
Dependent Claim
19 words
The method as in claim 3, wherein said first silicide forming metal is deposited using a sputter deposition technique.
Claim 8
Dependent Claim
25 words
The method as in claim 1 wherein said step of providing said second silicide layer includes depositing a layer of a second silicide forming metal.
Claim 9
Dependent Claim
22 words
The method as in claim 7, wherein said second silicide forming metal is one of palladium, platinum, nickel, cobalt, titanium or tungsten.
Claim 10
Dependent Claim
22 words
The method as in claim 7, wherein said second silicide forming metal has a thickness greater than or equal to 200 Angstroms.
Claim 11
Dependent Claim
19 words
The method as in claim 7, wherein said second silicide forming metal is deposited using a sputter deposition technique.
Claim 12
Dependent Claim
19 words
The method as in claim 1, wherein said gate interconnect has a thickness range of 2200 and 3500 Angstroms.
Claim 13
Dependent Claim
21 words
The method as in claim 1, wherein said gap filling dielectric material has a thickness of between 5000 and 7000 Angstroms.
Claim 14
Independent Claim
98 words
A method of forming a semiconductor device, the method comprising: forming first and second source/drain regions in a silicon region, the first and second source/drain regions being separated by a channel region; forming a silicon gate overlying the channel region and insulated therefrom; forming a layer of siliciding metal over the device; reacting the layer of siliciding metal with the first and source/drain regions and the gate to form silicide regions on the first and second source/drain regions and the gate; removing the silicide region from on the gate; and forming a second silicide region on the gate.
Claim 15
Independent Claim
98 words
A method of forming a semiconductor device, the method comprising: forming first and second source/drain regions in a silicon region, the first and second source/drain regions being separated by a channel region; forming a silicon gate overlying the channel region and insulated therefrom; forming a layer of siliciding metal over the device; reacting the layer of siliciding metal with the first and source/drain regions and the gate to form silicide regions on the first and second source/drain regions and the gate; removing the silicide region from on the gate; and forming a second silicide region on the gate.
Claim 16
Dependent Claim
31 words
The method of claim 13 and further comprising forming a dielectric layer over the first and second source/drain regions and the gate after reacting the layer but before removing the silicide.
Claim 17
Dependent Claim
25 words
The method of claim 14 and further comprising planarizing the dielectric layer wherein the planarizing causes the silicide region to be removed from the gate.
Claim 18
Dependent Claim
14 words
The method of claim 15 wherein the planarizing is performed using chemical mechanical polishing.
Claim 19
Dependent Claim
24 words
The method of claim 13 wherein the second silicide region has a thickness which is greater than the thickness of the first silicide region.
Claim 20
Independent Claim
82 words
A method of forming a semiconductor device, the method comprising: providing a MOS transistor including first and second source/drain regions in a silicon region, the first and second source/drain regions being separated by a channel region, the MOS transistor further including a silicon gate overlying the channel region and insulated therefrom; forming silicide regions over the gate and at least one of the source/drain regions; removing the silicide region from over the gate; and forming a second silicide region on the gate.
Claim 21
Independent Claim
82 words
A method of forming a semiconductor device, the method comprising: providing a MOS transistor including first and second source/drain regions in a silicon region, the first and second source/drain regions being separated by a channel region, the MOS transistor further including a silicon gate overlying the channel region and insulated therefrom; forming silicide regions over the gate and at least one of the source/drain regions; removing the silicide region from over the gate; and forming a second silicide region on the gate.
Claim 22
Dependent Claim
47 words
The method of claim 18 and fuirther comprising forming a dielectric layer over the first and second source/drain regions and the gate after forming silicide regions over the gate and at least one of the source/drain regions but before removing the suicide region from over the gate.
Claim 23
Dependent Claim
26 words
The method of claim 19 and further comprising planarizing the dielectric layer wherein the planarizing causes the silicide region to be removed from over the gate.
Claim 24
Dependent Claim
14 words
The method of claim 20 wherein the planarizing is performed using chemical mechanical polishing.
Claim 25
Dependent Claim
24 words
The method of claim 18 wherein the second silicide region has a thickness which is greater than the thickness of the first silicide region.
Claim 26
Dependent Claim
35 words
The method of claim 18 wherein forming silicide regions over the gate and at least one of the source/drain regions comprises forming silicide regions over the gate and both the first and second source/drain regions.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-09 | 2003-11-08 | 2004-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-09 | 2007-11-08 | 2008-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-09 | 2011-11-08 | 2012-05-09 | $7700.00 | Window Closed / Lapsed |