US6048786A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming fluorinated resin or amorphous carbon layer and devices containing same
Assignee: Fujitsu Ltd
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Filing: 1998-02-18
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Granted: 2000-04-11
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Expires: 2018-02-18
Abstract
Abstract A resin or amorphous carbon layer is coated on a substrate and then fluorinated by exposing it in a F2 gas atmosphere. The thus fluorinated resin or amorphous carbon layer can be excellent in dielectric constant and thermal resistance. The resin may be photo-sensitive so that the resin can be patterned before the fluorination. Alternatively, the resin can be fluorinated before patterning.
Inventors
- 👤 Hiroshi Kudo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:27
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; G03F7/0046; G03F7/038; G03F7/16; G03F7/168; G03F7/26; G03F7/38; G03F7/40; G03F7/405; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S430/145; Y10S430/146; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
62 words
A process for forming a pattern of a fluorinated resin layer on a substrate, comprising the steps of: forming a resin layer on a substrate, exposing the resin layer to a fluorine gas atmosphere to convert the resin layer to a fluorinated resin layer, and patterning the fluorinated resin layer to obtain a pattern of the fluorinated resin layer on the substrate.
Claim 2
Dependent Claim
62 words
A process for forming a pattern of a fluorinated resin layer on a substrate, comprising the steps of: forming a resin layer on a substrate, exposing the resin layer to a fluorine gas atmosphere to convert the resin layer to a fluorinated resin layer, and patterning the fluorinated resin layer to obtain a pattern of the fluorinated resin layer on the substrate.
Claim 3
Dependent Claim
37 words
A process according to claim 1, wherein said resin layer is substantially fluorinated but only a portion adjacent to the bottom thereof is not fluorinated so that the resin layer maintains a high adhesion to the substrate.
Claim 4
Dependent Claim
42 words
A process according to claim 1, wherein said resin layer is made of a resin selected from the group consisting of polyethylene, polypropylene, ethylene-propylene copolymer, polystyrene, polyacrylonitrile, polyacrylamide, phenol-formaldehyde, vinyl, ether, acrylic, and methacrylic resins and derivatives thereof and halogen-containing resins thereof.
Claim 5
Dependent Claim
72 words
A process for forming a pattern of a fluorinated resin layer on a substrate, comprising the steps of: forming a resin layer on a substrate, patterning the resin layer to form a pattern of the resin layer on the substrate, and exposing the pattern of the resin layer to a fluorine gas atmosphere to convert the pattern of the resin layer to a pattern of a fluorinated resin layer on the substrate.
Claim 6
Dependent Claim
72 words
A process for forming a pattern of a fluorinated resin layer on a substrate, comprising the steps of: forming a resin layer on a substrate, patterning the resin layer to form a pattern of the resin layer on the substrate, and exposing the pattern of the resin layer to a fluorine gas atmosphere to convert the pattern of the resin layer to a pattern of a fluorinated resin layer on the substrate.
Claim 7
Dependent Claim
38 words
A process according to claim 3, wherein said resin layer is substantially fluorinated but only a portion adjacent to the bottom thereof is not fluorinated so that the fluorinated resin layer maintains a high adhesion to the substrate.
Claim 8
Dependent Claim
42 words
A process according to claim 4, wherein said resin layer is made of a resin selected from the group consisting of polyethylene, polypropylene, ethylene-propylene copolymer, polystyrene, polyacrylonitrile, polyacrylamide, phenol-formaldehyde, vinyl, ether, acrylic, and methacrylic resins and derivatives thereof and halogen-containing resins thereof.
Claim 9
Dependent Claim
67 words
A process for forming a pattern of a fluorinated amorphous carbon layer on a substrate, comprising the steps of: forming an amorphous carbon layer on a substrate, exposing the amorphous layer to a fluorine gas atmosphere to convert the amorphous carbon layer to a fluorinated carbon layer, and patterning the fluorinated amorphous carbon layer to obtain a pattern of the fluorinated amorphous carbon layer on the substrate.
Claim 10
Dependent Claim
67 words
A process for forming a pattern of a fluorinated amorphous carbon layer on a substrate, comprising the steps of: forming an amorphous carbon layer on a substrate, exposing the amorphous layer to a fluorine gas atmosphere to convert the amorphous carbon layer to a fluorinated carbon layer, and patterning the fluorinated amorphous carbon layer to obtain a pattern of the fluorinated amorphous carbon layer on the substrate.
Claim 11
Dependent Claim
39 words
A process according to claim 7, wherein said amorphous carbon layer is substantially fluorinated but only a portion adjacent to the bottom thereof is not fluorinated so that the amorphous carbon layer maintains a high adhesion to the substrate.
Claim 12
Dependent Claim
79 words
A process for forming a pattern of a fluorinated amorphous carbon layer on a substrate, comprising the steps of: forming an amorphous carbon layer on a substrate, patterning the amorphous carbon layer to form a pattern of the amorphous carbon layer on the substrate, and exposing the pattern of the amorphous carbon layer to a fluorine gas atmosphere to convert the pattern of the amorphous carbon layer to a pattern of a fluorinated amorphous carbon layer on the substrate.
Claim 13
Dependent Claim
79 words
A process for forming a pattern of a fluorinated amorphous carbon layer on a substrate, comprising the steps of: forming an amorphous carbon layer on a substrate, patterning the amorphous carbon layer to form a pattern of the amorphous carbon layer on the substrate, and exposing the pattern of the amorphous carbon layer to a fluorine gas atmosphere to convert the pattern of the amorphous carbon layer to a pattern of a fluorinated amorphous carbon layer on the substrate.
Claim 14
Dependent Claim
40 words
A process according to claim 9, wherein said amorphous carbon layer is substantially fluorinated but only a portion adjacent to the bottom thereof is not fluorinated so that the fluorinated amorphous carbon layer maintains a high adhesion to the substrate.
Claim 15
Dependent Claim
47 words
A multi-layer wiring board, comprising a substrate, a electrically conductive layer on the substrate, and a insulating layer of a resin on the electrically conductive layer, wherein said resin is fluorinated in a major portion thereof except for a thin region adjacent to the electrically conductive layer.
Claim 16
Dependent Claim
47 words
A multi-layer wiring board, comprising a substrate, a electrically conductive layer on the substrate, and a insulating layer of a resin on the electrically conductive layer, wherein said resin is fluorinated in a major portion thereof except for a thin region adjacent to the electrically conductive layer.
Claim 17
Dependent Claim
49 words
A multi-layer wiring board, comprising a substrate, a electrically conductive layer on the substrate, and a insulating layer of a amorphous carbon on the electrically conductive layer, wherein said amorphous carbon is fluorinated in a major portion thereof except for a thin region adjacent to the electrically conductive layer.
Claim 18
Dependent Claim
49 words
A multi-layer wiring board, comprising a substrate, a electrically conductive layer on the substrate, and a insulating layer of a amorphous carbon on the electrically conductive layer, wherein said amorphous carbon is fluorinated in a major portion thereof except for a thin region adjacent to the electrically conductive layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-11 | 2003-10-11 | 2004-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-11 | 2007-10-11 | 2008-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-11 | 2011-10-11 | 2012-04-11 | $7700.00 | Window Closed / Lapsed |