US6035293A
Expired / Lapsed
US
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Validating process data in manufacturing process management
Assignee: Advanced Micro Devices Inc
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Filing: 1997-10-20
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Granted: 2000-03-07
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Expires: 2017-10-20
Abstract
Abstract An approach for managing a manufacturing process is provided. A specification and recipe management system (RSMS) manages the validation of new specifications that reference one or more recipes and one or more contexts stored in a recipe management system (RMS). The validation of new specifications includes verifying that RMS code blocks contained in the new specification can be processed by the RMS. Also, the versions of recipes and contexts referenced in the specification are checked to ensure that they are either the current, valid version number or a valid new version number. The RSMS provides a specification browser for examining cross-reference information for specifications, recipes and contexts. The cross-reference information specifies recipes and contexts referenced in a selected specification, subject to a recipe/context filter. In addition, the cross-reference information identifies specifications that reference a selected recipe or a selected context, subject to a specification filter. A project editor allows specifications, recipes and contexts to be grouped into projects for release. The versions of recipes and context referenced by the specifications contained in the project are compared to ensure that the same version of a recipe is referenced by all of the specifications in a project and that all specification referencing changing recipes or contexts are in the project.
Inventors
- 👤 Mikkel Lantz
- 👤 John Shea
- 👤 Valerie Guinan
- 👤 Richard Bartlett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:59
CPC Classifications
G; G06; G06Q; G06Q10/00; G06Q10/06; Y; Y10; Y10S; Y10S707/00; Y10S707/99931; Y10S707/99951; Y10S707/99952; Y10S707/99953
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
120 words
A method for validating process data, the method comprising the steps of: first determining whether a reference in the process data to a first set of process instructions satisfies a set of syntax criteria; second determining whether the reference to the first set of process instructions specifies a valid version of the set of process instructions; third determining whether a reference in the process data to a set of process identification data satisfies the set of syntax criteria; fourth determining whether the reference in the process data to the set of process identification data specifies a valid version of the set of process identification data; and validating the process data based on the first, second, third, and fourth determining steps.
Claim 2
Independent Claim
120 words
A method for validating process data, the method comprising the steps of: first determining whether a reference in the process data to a first set of process instructions satisfies a set of syntax criteria; second determining whether the reference to the first set of process instructions specifies a valid version of the set of process instructions; third determining whether a reference in the process data to a set of process identification data satisfies the set of syntax criteria; fourth determining whether the reference in the process data to the set of process identification data specifies a valid version of the set of process identification data; and validating the process data based on the first, second, third, and fourth determining steps.
Claim 3
Dependent Claim
93 words
The method of claim 1, wherein the second determining step includes the steps of if the reference to the first set of process instructions specifies an existing set of process instructions, determining whether the reference to the first set of process instructions specifies a most current version of the set of process instructions, and if the reference to the first set of process instructions specifies a new set of process instructions, determining whether the reference to the first set of process instructions specifies a next available version of the set of process instructions.
Claim 4
Dependent Claim
97 words
The method of claim 2, wherein the third determining step includes the steps of if the reference to the set of process identification data specifies an existing set of process identification data, determining whether the reference to the set of process identification data specifies the most current version of the set of process identification data, and if the reference to the set of process identification data specifies a new set of process identification data, determining whether the reference to the set of process identification data specifies the next available version of the set of process identification data.
Claim 5
Dependent Claim
50 words
The method of claim 1, wherein: the method further comprises fifth determining whether a reference in the first set of process instructions to a second set of process instructions satisfies the set of syntax criteria, and the validating step includes validating the process data based on the fifth determining step.
Claim 6
Dependent Claim
39 words
The method of claim 1, wherein the step of validating the process data includes the steps of reserving a version identification associated with process data, and providing a validation signal to indicate that the process data has been validated.
Claim 7
Dependent Claim
64 words
The method of claim 1, further comprising the step of in response to receiving and reviewing an approval of the process data designating the version of the set of process instructions as the valid version for the first set of process instructions, and designating the version of the set of process identification data as the valid version for the set of process identification data.
Claim 8
Dependent Claim
66 words
The method of claim 1, further including in response to receiving a request to identify one or more sets of process instructions associated with the process data, performing the steps of examining the process data to identify the reference in the process data to the first set of process instructions, and providing the reference in the process data that references the first set of process instructions.
Claim 9
Dependent Claim
102 words
The method of claim 1, further including in response to receiving a request to identify one or more sets of process data that reference the first set of process instructions performing the steps of examining the one or more sets of process data to determine if any of the one or more sets of process data reference the set of process instructions, and if any of the one or more sets of process data references the set of process instructions, then providing the identity of any of the one or more sets of process data that reference the set of process instructions.
Claim 10
Dependent Claim
108 words
The method of claim 1, further including in response to a request to approve a project that includes two or more sets of process data, performing the steps of determining whether first and second references in the two or more sets of process data to the set of process steps specify the same version of the set of process steps, and if the first and second references to the set of process steps do not specify the same version of the set of process steps, then signaling that the two or more sets of process data do not specify the same version of the set of process steps.
Claim 11
Dependent Claim
155 words
A computer-readable medium carrying one or more sequences of one or more instructions for validating process data, wherein the execution of the one or more sequences of one or more instructions by one or more processors causes the one or more processors to perform the steps of: first determining whether a reference in the process data to a first set of process instructions satisfies a set of syntax criteria; second determining whether the reference to the first set of process instructions specifies a valid version of the set of process instructions; third determining whether a reference in the process data to a set of process identification data satisfies the set of syntax criteria; fourth determining whether the reference in the process data to the set of process identification data specifies a valid version of the set of process identification data; and validating the process data based on the first, second, third, and fourth determining steps.
Claim 12
Dependent Claim
155 words
A computer-readable medium carrying one or more sequences of one or more instructions for validating process data, wherein the execution of the one or more sequences of one or more instructions by one or more processors causes the one or more processors to perform the steps of: first determining whether a reference in the process data to a first set of process instructions satisfies a set of syntax criteria; second determining whether the reference to the first set of process instructions specifies a valid version of the set of process instructions; third determining whether a reference in the process data to a set of process identification data satisfies the set of syntax criteria; fourth determining whether the reference in the process data to the set of process identification data specifies a valid version of the set of process identification data; and validating the process data based on the first, second, third, and fourth determining steps.
Claim 13
Dependent Claim
90 words
The computer-readable medium of claim 10, wherein the second determining step includes the steps of if the reference to the set of process instructions specifies an existing set of process instructions, determining whether the reference to the set of process instructions specifies a most current version of the set of process instructions, and if the reference to the set of process instructions specifies a new set of process instructions, determining whether the reference to the set of process instructions specifies the next available version of the set of process instructions.
Claim 14
Dependent Claim
98 words
The computer-readable medium of claim 11, wherein the third determining step includes the steps of if the reference to the set of process identification data specifies an existing set of process identification data, determining whether the reference to the set of process identification data specifies the most current version of the set of process identification data, and if the reference to the set of process identification data specifies a new set of process identification data, determining whether the reference to the set of process identification data specifies the next available version of the set of process identification data.
Claim 15
Dependent Claim
54 words
The computer-readable medium of claim 10, wherein: the method further includes the step of fifth determining whether a reference in the first set of process instructions to a second set of process instructions satisfies the set of syntax criteria, and the validating step includes validating the process data based upon the fifth determining step.
Claim 16
Dependent Claim
40 words
The computer-readable medium of claim 10, wherein the step of validating the process data includes the steps of reserving a version identification associated with process data, and providing a validation signal to indicate that the process data has been validated.
Claim 17
Dependent Claim
64 words
The computer-readable medium of claim 10, further comprising in response to receiving an approval of the process data, performing the steps of designating the version of the first set of process instructions as the valid version for the set of process instructions, and designating the version of the set of process identification data as the valid version for the set of process identification data.
Claim 18
Dependent Claim
66 words
The computer-readable medium of claim 10, further including in response to a request to identify one or more sets of process instructions associated with the process data, performing the steps of examining the process data to identify the reference in the process data to the first set of process instructions, and providing the reference in the process data that references the first set of process instructions.
Claim 19
Dependent Claim
102 words
The computer-readable medium of claim 10, further including in response to a request to identify one or more sets of process data that reference the first set of process instructions, performing the steps of examining the one or more sets of process data to determine if any of the one or more sets of process data reference the set of process instructions, and if any of the one or more sets of process data references the set of process instructions, then providing the identity of any of the one or more sets of process data that reference the set of process instructions.
Claim 20
Dependent Claim
106 words
The computer-readable medium of claim 10, further including in response to a request to approve a project that includes two or more sets of process data, performing the steps of determining whether first and second references in the two or more sets of process data to the set of process steps specify the same version of the recipe, and if the first and second references to the set of process steps do not specify the same version of the set of process steps, then signaling that the two or more sets of process data do not specify the same version of the set of process steps.
Claim 21
Dependent Claim
106 words
A computer system configured to validate and release process data, the computer system comprising: a) a validation process configured for validating the process data by performing the steps of i) determining whether a reference in the process data to a set of process instructions satisfies a set of syntax criteria, ii) determining whether the reference to the set of process instructions specifies a valid version of the set of process instructions; and b) a release process configured for approving the process data by performing the step of designating the version of the set of process instructions as the valid version for the set of process instructions.
Claim 22
Dependent Claim
106 words
A computer system configured to validate and release process data, the computer system comprising: a) a validation process configured for validating the process data by performing the steps of i) determining whether a reference in the process data to a set of process instructions satisfies a set of syntax criteria, ii) determining whether the reference to the set of process instructions specifies a valid version of the set of process instructions; and b) a release process configured for approving the process data by performing the step of designating the version of the set of process instructions as the valid version for the set of process instructions.
Claim 23
Dependent Claim
56 words
The computer system of claim 19, further comprising a browser process configured to provide reference information in the process data to the set of process instructions by examining the process data to identify one or more references to the set of process instructions, and providing the one or more references to the set of process instructions.
Claim 24
Dependent Claim
128 words
The computer system of claim 19, further comprising a project editor process configured to generate a project that includes one or more sets of process data by performing the steps of generating an association between the one or more sets of process data to be included in the project, determining whether first and second references in the one or more sets of process data to the set of process steps specify the same version of the set of process steps, and if the first and second references to the set of process steps do not specify the same version of the set of process steps, then signaling that the two or more sets of process data do not specify the same version of the set of process steps.
Claim 25
Independent Claim
114 words
A method for verifying a semiconductor process specification used in the fabrication of a semiconductor device, the method comprising the steps of: determining whether a reference in the specification to a recipe that specifies a sequence of process instructions satisfies a set of syntax criteria; determining whether the reference in the specification to the recipe specifies a valid version of the recipe; determining whether a reference in the specification to a context that specifies semiconductor process identification data satisfies the set of syntax criteria; determining whether the reference in the specification to the context specifies a valid version of the context; and validating the specification based upon one or more of the determining steps.
Claim 26
Independent Claim
114 words
A method for verifying a semiconductor process specification used in the fabrication of a semiconductor device, the method comprising the steps of: determining whether a reference in the specification to a recipe that specifies a sequence of process instructions satisfies a set of syntax criteria; determining whether the reference in the specification to the recipe specifies a valid version of the recipe; determining whether a reference in the specification to a context that specifies semiconductor process identification data satisfies the set of syntax criteria; determining whether the reference in the specification to the context specifies a valid version of the context; and validating the specification based upon one or more of the determining steps.
Claim 27
Dependent Claim
75 words
The method of claim 22, wherein the step of determining whether the reference in the specification to the recipe specifies a valid version of the recipe includes the steps of if the reference specifies an existing version of the recipe, determining whether the reference specifies the most recent version of the recipe, and if the reference specifies a new version of the recipe, determining whether the reference specifies the next available version of the recipe.
Claim 28
Dependent Claim
75 words
The method of claim 22, wherein the step of determining whether the reference in the specification to the context specifies a valid version of the context includes the steps of if the reference specifies an existing version of the context, determining whether the reference specifies the most recent version of the context, and if the reference specifies a new version of the context, determining whether the reference specifies the next available version of the context.
Claim 29
Dependent Claim
42 words
The method of claim 22, wherein the step of validating the specification based upon the determining steps includes the steps of reserving a version identification associated with the specification, and providing a validation signal to indicate that the specification has been validated.
Claim 30
Dependent Claim
114 words
A semiconductor process management system comprising: a) a recipe management system (RMS) that contains one or more recipes and one or more contexts, wherein each recipe specifies a sequence of process instructions and wherein each context specifies process identification data; b) a processing station for performing a processing step on a semiconductor device in response to processing one or more recipes and one or more contexts; c) a processing manager that contains one or more specifications, wherein each specification contains references to one or more recipes and one or more contexts; and d) a recipe and specification management system (RSMS) for verifying one or more specifications used during the fabrication of the semiconductor device.
Claim 31
Dependent Claim
114 words
A semiconductor process management system comprising: a) a recipe management system (RMS) that contains one or more recipes and one or more contexts, wherein each recipe specifies a sequence of process instructions and wherein each context specifies process identification data; b) a processing station for performing a processing step on a semiconductor device in response to processing one or more recipes and one or more contexts; c) a processing manager that contains one or more specifications, wherein each specification contains references to one or more recipes and one or more contexts; and d) a recipe and specification management system (RSMS) for verifying one or more specifications used during the fabrication of the semiconductor device.
Claim 32
Dependent Claim
30 words
The semiconductor process management system of claim 26 further comprising a client for generating and editing one or more specifications and submitting one or more specifications to the process manager.
Claim 33
Dependent Claim
24 words
The semiconductor process management system of claim 27, wherein the client includes a specification browser for identifying cross-reference information between specification, recipes and contexts.
Claim 34
Dependent Claim
25 words
The semiconductor process management system of claim 27, wherein the client includes a project editor for logically associating one or more specifications with a project.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-07 | 2003-09-06 | 2004-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-07 | 2007-09-06 | 2008-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-07 | 2011-09-06 | 2012-03-07 | $7700.00 | Window Closed / Lapsed |