Patent US683713A successfully refreshed from Google Patents.
Patent US6025635A successfully refreshed from Google Patents.
US6025635A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Short channel transistor having resistive gate extensions
Assignee: GlobalFoundries Inc
•
Filing: 1997-07-09
•
Granted: 2000-02-15
•
Expires: 2017-07-09
Abstract
Abstract A semiconductor apparatus formed on a semiconductor substrate includes a first active region in the substrate, and a second active region adjacent to the surface of the substrate separated from the first active region by a channel region. A gate oxide region may overlie at least a portion of the first and second active regions. The apparatus further includes a gate positioned over the channel region and having a first end and a second end respectively associated with the first and second active regions. The gate includes a first low conductive region and a second low conduction region at said first and second ends, respectively. A method for making the transistor structure of the present invention is also provided. In one aspect, the invention comprises: forming a transistor region on a silicon substrate, the region including a first and second spacers on a first side and a second side of the region, respectively, the spacers overlying a first oxide layer on the surface of the substrate; etching the first oxide layer leaving a first and second gaps between the first and second spacers, respectively, and the silicon substrate; forming a gate oxide layer overlying the surface of the substrate in the transistor region, the gate oxide having a thickness; and filling the transistor region with polysilicon to cover the gate oxide region.
Inventors
- 👤 Zoran Krivokapic
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:46
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D64/259; H10D30/00; H10D30/01; H10D30/021; H10D30/0217; H10D30/0223; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01324; H10D64/018; H10D64/021; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17; H10W20/00; H10W20/01; H10W20/031; H10W20/0698; H10D30/0212; H10D64/017; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/1414; H10P32/17; H10P32/171
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
105 words
An apparatus, comprising: a semiconductor substrate; a first active region in the substrate; a second active region adjacent to the surface of the substrate separated from the first active region by a channel region; a gate oxide region overlying at least a portion of the first and second active regions; and a silicon gate positioned over the channel region and having a first end and a second end, the first end of the silicon gate having therein a first resistive region overlying the first active region and the second end of the silicon gate having therein a second resistive region overlying the second active region.
Claim 2
Independent Claim
105 words
An apparatus, comprising: a semiconductor substrate; a first active region in the substrate; a second active region adjacent to the surface of the substrate separated from the first active region by a channel region; a gate oxide region overlying at least a portion of the first and second active regions; and a silicon gate positioned over the channel region and having a first end and a second end, the first end of the silicon gate having therein a first resistive region overlying the first active region and the second end of the silicon gate having therein a second resistive region overlying the second active region.
Claim 3
Dependent Claim
28 words
The apparatus of claim 1 wherein the silicon gate further comprises a first spacer, a second spacer, and a polysilicon region positioned between the first and second spacers.
Claim 4
Dependent Claim
52 words
The apparatus of claim 2 wherein the first and second spacers are separated from the gate oxide region by a first gap and a second gap, respectively, and a first and second portions of said polysilicon region positioned in said first and second gaps to comprise said first and second resistive regions.
Claim 5
Dependent Claim
25 words
The apparatus of claim 2 wherein the first resistive region and the second resistive region of the silicon gate each comprise a silicon extension region.
Claim 6
Dependent Claim
65 words
The apparatus of claim 1 wherein the silicon gate forms a portion of a gate structure, the gate structure comprising the gate oxide region, a first and second spacers positioned adjacent the respective first and second ends of the silicon gate, and the first and second resistive regions further comprising a first and second silicon gate extension regions, respectively, underlying the first and second spacers.
Claim 7
Dependent Claim
21 words
The apparatus of claim 1 wherein the apparatus comprises a transistor having a channel length of less than about 0.18 micrometers.
Claim 8
Dependent Claim
97 words
A semiconductor apparatus, comprising: a semiconductor substrate; a gate oxide overlying a portion of the semiconductor substrate; a silicon gate structure comprising a length defined on a first side and a second side by a first and second spacers adjacent to the first and second sides, respectively, the first and second spacers positioned above the gate oxide and separated from the gate oxide by a first and second gaps, respectively, and a first and second silicon extension regions positioned in the respective first and second gaps between the gate oxide and the first and second spacers, respectively.
Claim 9
Dependent Claim
97 words
A semiconductor apparatus, comprising: a semiconductor substrate; a gate oxide overlying a portion of the semiconductor substrate; a silicon gate structure comprising a length defined on a first side and a second side by a first and second spacers adjacent to the first and second sides, respectively, the first and second spacers positioned above the gate oxide and separated from the gate oxide by a first and second gaps, respectively, and a first and second silicon extension regions positioned in the respective first and second gaps between the gate oxide and the first and second spacers, respectively.
Claim 10
Dependent Claim
21 words
The apparatus of claim 7 wherein the silicon gate structure includes a polysilicon region positioned between the first and second spacers.
Claim 11
Dependent Claim
19 words
The apparatus of claim 8 wherein the polysilicon region has a higher resistance in the first and second gaps.
Claim 12
Dependent Claim
79 words
A transistor, comprising: a semiconductor substrate; a source and a drain region positioned in the substrate and separated from each other by a channel region; and a semiconductor gate overlying a portion of the source and drain region, the gate having therein a first resistance region and a second resistance region each having a higher resistance than other portions of the gate, the first resistance region overlying the source region and the second resistance region overlying the drain region.
Claim 13
Dependent Claim
79 words
A transistor, comprising: a semiconductor substrate; a source and a drain region positioned in the substrate and separated from each other by a channel region; and a semiconductor gate overlying a portion of the source and drain region, the gate having therein a first resistance region and a second resistance region each having a higher resistance than other portions of the gate, the first resistance region overlying the source region and the second resistance region overlying the drain region.
Claim 14
Dependent Claim
28 words
The transistor of claim 10 wherein the semiconductor gate further comprises a first spacer, a second spacer, and a polysilicon region positioned between the first and second spacers.
Claim 15
Dependent Claim
14 words
The transistor of claim 11 further including a gate oxide on the semiconductor substrate.
Claim 16
Dependent Claim
43 words
The transistor of claim 12 wherein the first and second spacers are separated from the gate oxide by a first and second gaps, respectively, and a first and second portions of the polysilicon region are positioned in the first and second gaps, respectively.
Claim 17
Dependent Claim
33 words
The transistor of claim 13 wherein the first and second portions of the polysilicon region has a higher resistance in the first and second gaps than in other parts of the polysilicon region.
Claim 18
Dependent Claim
18 words
The apparatus of claim 14 wherein said transistor has a channel length of less than about 0.18 micrometers.
Claim 19
Dependent Claim
84 words
A MOS transistor having a source and a drain formed in a semiconductor substrate, comprising: a silicon gate structure positioned over a channel region separating the source and drain regions, the gate structure having therein a first and second spacers positioned above a gate oxide and separated from the gate oxide by a first and second gaps, respectively, and a first and second resistive regions positioned in the respective first and second gains between the sate oxide and the first and second spacers, respectively.
Claim 20
Dependent Claim
84 words
A MOS transistor having a source and a drain formed in a semiconductor substrate, comprising: a silicon gate structure positioned over a channel region separating the source and drain regions, the gate structure having therein a first and second spacers positioned above a gate oxide and separated from the gate oxide by a first and second gaps, respectively, and a first and second resistive regions positioned in the respective first and second gains between the sate oxide and the first and second spacers, respectively.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-14 | 2003-08-16 | 2004-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-14 | 2007-08-16 | 2008-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-14 | 2011-08-16 | 2012-02-15 | $7700.00 | Window Closed / Lapsed |