Method for the self-aligned silicide formation in IC fabrication

Claim 2

An improved method for forming a self-aligned silicide layer on an integrated circuit structure by employing a slot configuration which is fabricated with the following steps: (a) forming first thin dielectric layer after the formation of S/D junctions in said integrated circuit structure; (b) forming second dielectric layer on said first thin dielectric layer; (c) forming third dielectric layer on said second dielectric layer; (d) anisotropically and selectively etching said third dielectric layer to form spacers on sidewalls of said second dielectric layer; (e) selectively etching said second dielectric layer to form another spacers on sidewalls of said first thin dielectric layer; (f) selectively and isotropically etching said first thin dielectric layer to form vertical slots on sidewalls of poly lines and horizontal slots on S/D surfaces; (g) forming a metal layer on said integrated circuit structure; (h) forming silicide layers by annealing said integrated circuit structure at an elvated temperature; (i) selectively etching off unreacted portion of said metal layer.

Claim 3

The method of claim 1 wherein said first thin dielectric layer is silicon dioxide, said second dielectric layer is silicon nitride, and said third dielectric layer is silicon dioxide.

Claim 4

The method of claim 1 wherein said first thin dielectric layer is silicon dioxide, said second dielectric layer is silicon nitride, and said third dielectric layer is omitted.

Claim 5

The method of claim 3 wherein said second dielectric layer is anisotropically and selectively etched.

Claim 6

The method of claim 1 wherein said first thin dielectric layer is silicon nitride, said second dielectric layer is silicon dioxide, and said third dielectric layer is silicon nitride.

Claim 7

The method of claim 1 wherein said first thin dielectric layer is silicon nitride, said second dielectric layer is silicon dioxide, and said third dielectric layer is omitted.

Claim 8

The method of claim 6 wherein said second dielectric layer is anisotropically and selectively etched.

Claim 9

The method of claim 1 wherein said second dielectric layer has different material compositions and etch characteristics from both said first thin dielectric layer and said third dielectric layer which are allowed to be the same materials.

Claim 10

The method of claim 1 wherein said slots have high aspect ratio great than 1.

Claim 11

The method of claim 1 wherein said first thin dielectric layer, said second dielectric layer, and said third dielectric layer are repeatedly formed to construct multiple said slots.

Claim 12

The method of claim 1 wherein said forming a metal layer is achieved with the sputtering technique, with the chemical vapor deposition, and with the evaporation technique.

Claim 13

The method of claim 1 wherein said annealing is carried out in the sputter vacuum chamber during the sputter of said metal layer by heating said integrated circuit structure to stimulate the reaction between silicon and said metal layer.

Claim 14

The method of claim 1 wherein said annealing is carried out with the two-step process which comprises the steps of: (a) forming said silicide layer at low temperature in said sputter vacuum chamber during the sputter of said metal layer; (b) selectively etching off unreached portion of said metal layer; (c) heating said integrated circuit structure to high temperature.

Claim 15

The method of claim 13 wherein said low temperature is below the reaction temperature between said silicon dioxide and said metal layer, and said high temperature is typically at temperature to achieve the low resistance of said silicide layer.

Claim 16

The method of claim 1 wherein said silicide layer is repeatedly formed on said poly lines on an insulating dielectric layer to construct multilayer interconnects with the technique as set forth therein.

Claim 17

The method of claim 1 wherein said silicide layers are formed with the thicker thickness on said poly lines by first forming said vertical slots with the use of the photoresist to cover said S/D surfaces, followed by forming thinner said silicide layer on said S/D surfaces with the help of the photoresist to cover said poly lines to form said horizontal slots on said S/D surfaces.

Claim 18

The method of claim 1 wherein said silicide layer having thicker thickness on said poly lines and thinner thickness on said S/D surfaces are formed with the process comprising the steps of: (a) silicon nitride deposition on doped poly layer in said integrated circuit structure; (b) forming said poly lines by etching said silicon nitride and said poly layer; (c) oxidizing said integrated circuit structure at elvated temperature; (d) another silicon nitride layer deposition; (e) forming silicon dioxide layer on said another silicon nitride layer; (f) anisotropically etching said silicon dioxide layer; (g) selectively etching said another silicon nitride layer and said silicon nitride; (h) forming a thicker metal layer on said integrated circuit structure; (i) forming a thicker silicide layer by heating said integrated circuit structure; (j) selectively etching off unreacted portion of said thicker metal layer; (k) selectively etching off said silicon dioxide on said S/D surfaces; (l) forming second thinner metal layer on said integrated circuit structure; (m) forming thinner silicide layer by heating said integrated circuit structure; (n) selectively etching off unreacted portion of said second thinner metal layer;

Claim 19

The method of claim 16 wherein said thicker thickness of said silicide layer is formed on the desired locations of said S/D surfaces for the purpose of the electrical ground connect of said integrated circuit structure.

Claim 20

The method of claim 17 wherein said thicker thickness of said silicide layer is formed on the desired locations of said S/D surfaces for the purpose of the electrical ground connection of said integrated circuit structure.

Claim 21

The method of claim 1 wherein said metal layer is discontinued by forming said vertical slots and said horizontal slots.