Patent US6284316B1 successfully refreshed from Google Patents.
Patent US6020511A successfully refreshed from Google Patents.
US6020511A
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Methods, complexes, and systems for forming metal-containing films
Assignee: Micron Technology Inc
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Filing: 1998-08-25
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Granted: 2000-02-01
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Expires: 2018-08-25
Abstract
Abstract A method of forming a film on a substrate using, Group III metal complexes, including Group IIIA metals and Group IIIB metals, which include the lanthanides. The complexes and methods are particularly suitable for the preparation of semiconductor structures using chemical vapor deposition techniques and systems.
Inventors
- 👤 Brian A. Vaartstra
- 👤 Brenda D. Wanner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:38
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2922; C; C07; C07F; C07F5/00; C07F5/003; C07F5/06; C07F5/069; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/20; H10P14/24; H10P14/2902; H10P14/2905; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P14/40; H10P14/42; H10P14/43
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
37 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH (Formula III) wherein: M is a Group IIIB metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 2
Dependent Claim
37 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH (Formula III) wherein: M is a Group IIIB metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 3
Dependent Claim
37 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH.sub.2 (Formula IV) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 4
Dependent Claim
37 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH.sub.2 (Formula IV) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 5
Dependent Claim
43 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MHR.sup.5 (Formula V); wherein: M is a Group IIIA metal; R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group; and R 5 is an organic group.
Claim 6
Dependent Claim
43 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MHR.sup.5 (Formula V); wherein: M is a Group IIIA metal; R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group; and R 5 is an organic group.
Claim 7
Dependent Claim
38 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.2 MH (Formula VI) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 8
Dependent Claim
38 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.2 MH (Formula VI) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 9
Dependent Claim
44 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.2 MHR.sup.5 (Formula VII) wherein: M is a Group IIIA metal; R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group; and R 5 is an organic group.
Claim 10
Dependent Claim
44 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.2 MHR.sup.5 (Formula VII) wherein: M is a Group IIIA metal; R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group; and R 5 is an organic group.
Claim 11
Dependent Claim
38 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.3 MH (Formula VIII) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 12
Dependent Claim
38 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.3 MH (Formula VIII) wherein: M is a Group IIIA metal; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 13
Dependent Claim
47 words
A complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.x ML.sub.y (Formula I) wherein: M is a Group IIIB metal; each R 1 , R 2 , R 3 , and R 4 group is independently an organic group; L is an organic group; x=1 to 4; and y=1 to 4.
Claim 14
Dependent Claim
47 words
A complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)].sub.x ML.sub.y (Formula I) wherein: M is a Group IIIB metal; each R 1 , R 2 , R 3 , and R 4 group is independently an organic group; L is an organic group; x=1 to 4; and y=1 to 4.
Claim 15
Dependent Claim
12 words
The complex of claim 7 wherein M is Sc, Y, or La.
Claim 16
Dependent Claim
11 words
The complex of claim 7 wherein L is an alkyl moiety.
Claim 17
Dependent Claim
34 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH (Formula III) wherein: M is Al; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 18
Dependent Claim
34 words
A hydride complex of the formula: [(R.sup.1)NC(R.sup.2)C(R.sup.3)N(R.sup.4)]MH (Formula III) wherein: M is Al; and R 1 , R 2 , R 3 , and R 4 are each independently H or an organic group.
Claim 19
Dependent Claim
33 words
The hydride complex of claim 1 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group.
Claim 20
Dependent Claim
33 words
The hydride complex of claim 1 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety.
Claim 21
Dependent Claim
33 words
The hydride complex of claim 2 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group.
Claim 22
Dependent Claim
33 words
The hydride complex of claim 2 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety.
Claim 23
Dependent Claim
45 words
The hydride complex of claim 3 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group and R 5 is a (C 1 -C 30 ) organic group.
Claim 24
Dependent Claim
45 words
The hydride complex of claim 3 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety and R 5 is a (C 1 -C 4 ) alkyl moiety.
Claim 25
Dependent Claim
33 words
The hydride complex of claim 4 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group.
Claim 26
Dependent Claim
33 words
The hydride complex of claim 4 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety.
Claim 27
Dependent Claim
45 words
The hydride complex of claim 5 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group and R 5 is a (C 1 -C 30 ) organic group.
Claim 28
Dependent Claim
45 words
The hydride complex of claim 5 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety and R 5 is a (C 1 -C 4 ) alkyl moiety.
Claim 29
Dependent Claim
33 words
The hydride complex of claim 6 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group.
Claim 30
Dependent Claim
33 words
The hydride complex of claim 6 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety.
Claim 31
Dependent Claim
33 words
The hydride complex of claim 7 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 30 ) organic group.
Claim 32
Dependent Claim
33 words
The hydride complex of claim 7 wherein each R 1 , R 2 , R 3 , and R 4 group is independently H or a (C 1 -C 4 ) alkyl moiety.
References Cited (Backward Citations)
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| 7.5 Years (Year 8) | 2007-01-31 | 2007-08-02 | 2008-02-01 | $3760.00 | Window Closed / Lapsed |
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